Plasma cell for providing VUV filtering in a laser-sustained plasma light source

Patent metadata

Field	Value
Publication number	US-9927094-B2
Application number	US-201313741566-A
Country	US
Kind code	B2
Filing date	Jan 15, 2013
Priority date	Jan 17, 2012
Publication date	Mar 27, 2018
Grant date	Mar 27, 2018

Abstract

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

First claim

What is claimed:

1. A plasma cell in a laser-sustained plasma light source, the plasma cell comprising:
a plasma bulb filled with a gas suitable for generating a plasma, the plasma bulb being substantially transparent to light emanated from a pump laser when the laser-sustained plasma light source is in operation to sustain the gas contained in the plasma bulb in a plasma state within the plasma bulb, the plasma bulb further being substantially transparent to at least a portion of a collectable spectral region of illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation, wherein a filter layer is disposed on an interior surface of the plasma bulb; and
a filter assembly disposed within an internal volume of the plasma bulb, the filter assembly establishing a separation from the plasma bulb, wherein the filter assembly blocks a selected spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation,
wherein the filter layer is thermally coupled to a thermal management sub-system, wherein the thermal management sub-system includes at least one of a heat exchanger or a heat sink, wherein the thermal management sub-system maintains the filter layer disposed on the interior surface of the plasma bulb at substantially the same temperature as the filter assembly when the laser-sustained plasma light source is in operation.

2. The plasma cell of claim 1 , wherein the collectable spectral region of illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation comprises:
at least one of infrared light, visible light, or ultraviolet light.

3. The plasma cell of claim 1 , wherein the filter assembly blocks an ultraviolet spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation.

4. The plasma cell of claim 1 , wherein the filter assembly blocks a vacuum ultraviolet spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation.

5. The plasma cell of claim 1 , wherein the filter layer includes at least one of: a hafnium oxide deposition, a titanium oxide deposition, and a zirconium oxide deposition to absorb at least a portion of the selected spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation.

6. The plasma cell of claim 1 , wherein the filter layer includes a coating of a sub-wavelength microstructured layer, wherein the sub-wavelength microstructured layer forms at least one of:
an absorptive coating to absorb at least a portion of the selected spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation; and
a reflective coating to reflect at least a portion of the selected spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation.

7. The plasma cell of claim 1 , wherein the filter assembly is mechanically coupled to an internal surface of the plasma bulb.

8. The plasma cell of claim 1 , wherein at least one of the plasma bulb and the filter assembly has at least one of a substantially cylindrical shape, a substantially spherical shape, a substantially prolate spheroidal shape, an ellipsoidal shape and a substantially cardioid shape.

9. The plasma cell of claim 1 , wherein the gas comprises:
at least one of Ar, Kr, N 2 , H 2 O, O 2 , H 2 , CH 4 , one or more metal halides, an AR/Xe mixture, ArHg, KrHg, and XeHg.

10. The plasma cell of claim 1 , wherein at least one of the plasma bulb and the filter assembly is formed from a glass material.

11. The plasma cell of claim 10 , wherein the glass material of at least one of the plasma bulb and the filter assembly comprises:
a fused silica glass.

12. The plasma cell of claim 1 , wherein the filter layer includes a coating of a microstructured layer, and wherein the microstructured layer is formed with a significant degree of roughness on a surface of the plasma bulb to lower stress experienced by the plasma bulb when the laser-sustained plasma light source is in operation.

13. The plasma cell of claim 1 , wherein the filter assembly softens when the laser-sustained plasma light source is in operation.

14. The plasma cell of claim 1 , wherein the filter assembly comprises:
a rolled sheet of sapphire.

15. The plasma cell of claim 14 , wherein a thickness of the rolled sheet of sapphire ranges between approximately 5 mm and approximately 20 mm.

16. The plasma cell of claim 1 , wherein at least one coating material is disposed on an interior surface of the filter assembly.

17. The plasma cell of claim 16 , wherein the at least one coating material includes at least one of: a hafnium oxide deposition, a titanium oxide deposition, and a zirconium oxide deposition to absorb at least a portion of the selected spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation.

18. The plasma cell of claim 16 , wherein the at least one coating material includes a coating of a sub-wavelength microstructured layer, wherein the sub-wavelength microstructured layer forms at least one of:
an absorptive coating to absorb at least a portion of the selected spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation; and
a reflective coating to reflect at least a portion of the selected spectral region of the illumination emitted by the gas in the plasma state when the laser-sustained plasma light source is in operation.

19. The plasma cell of claim 16 , wherein the at least one coating material includes a coating of a microstructured layer, wherein the microstructured layer is formed with a significant degree of roughness on a surface of the filter assembly to lower stress experienced by the filter assembly when the laser-sustained plasma light source is in operation.

20. The plasma cell of claim 1 , wherein the filter assembly is formed from a first material, wherein the plasma bulb is formed from a second material.

21. The plasma cell of claim 1 , wherein the internal volume of the plasma bulb does not include electrodes.

22. The plasma cell of claim 20 , wherein the first material and the second material are substantially the same.

23. The plasma cell of claim 20 , wherein the first material and the second material are substantially different.

Assignees

• Kla Tencor Corp

Inventors

• Bezel Ilya
• Shchemelinin Anatoly
• Shifrin Eugene
• Panzer Matthew
• Derstine Matthew
• Wang Jincheng
• Chimmalgi Anant
• Patil Rajeev
• Brunner Rudolf

Classifications

• H01J61/35

  provided with coatings on the walls thereof; Selection of materials for the coatings (using coloured coatings H01J61/40; using luminescent coatings H01J61/42) · CPC title

• H01J65/04 Primary

  Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title

• H01J61/20

  mercury vapour · CPC title

• H01J61/125 Primary

  having an halogenide as principal component · CPC title

• H01J61/40

  by light filters; by coloured coatings in or on the envelope · CPC title