Systems for providing illumination in optical metrology

Patent metadata

Field	Value
Publication number	US-9512985-B2
Application number	US-201313774025-A
Country	US
Kind code	B2
Filing date	Feb 22, 2013
Priority date	Feb 22, 2013
Publication date	Dec 6, 2016
Grant date	Dec 6, 2016

Abstract

The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

First claim

What is claimed is:

1. A system for providing illumination to a measurement head, comprising:
a plurality of illumination sources including a first illumination source, a second illumination source, a third illumination source, a fourth illumination source, a fifth illumination source, and a sixth illumination source;
a first fold mirror configured to reflect illumination from the first illumination source along a guidance path;
a second fold mirror configured to reflect illum…

Assignees

• Kla Tencor Corp

Inventors

• Brady Gregory R
• Shchegrov Andrei V
• Rotter Lawrence D
• Shaughnessy Derrick
• Shchemelinin Anatoly
• Bezel Ilya
• Arain Muzammil A
• Vasiliev Anatoly A
• Allen James Andrew
• Shulepov Oleg
• Hill Andrew V
• Bachar Ohad
• Markowitz Moshe
• Ish-Shalom Yaron
• Sela Ilan
• Manassen Amnon
• Svizher Alexander
• Khokhlov Maxim
• Abramov Avi
• Tsibulevsky Oleg
• Kandel Daniel
• Ghinovker Mark

Classifications

• G02B6/29362

  Physics · mapped topic

• G01J3/0218

  Physics · mapped topic

• G02B6/353

  Physics · mapped topic

• G02B6/29332

  Physics · mapped topic

• F21V13/08 Primary

  Mechanical Engineering · mapped topic