Plasma cell for laser-sustained plasma light source

Patent metadata

Field	Value
Publication number	US-9318311-B2
Application number	US-201213647680-A
Country	US
Kind code	B2
Filing date	Oct 9, 2012
Priority date	Oct 11, 2011
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

First claim

What is claimed:

1. A refillable plasma cell suitable for use in a laser-sustained plasma light source, comprising:
a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation; and
a gas port assembly, the gas port assembly including a receiving cap, the receiving cap being reversibly couplable to a delivery cap so as to establish a reversible fluidic connection between a gas source and an internal portion of the plasma bulb.

2. The plasma cell of claim 1 , wherein the bulb has at least one of a substantially cylindrical shape and a substantially spherical shape.

3. The plasma cell of claim 1 , wherein the bulb has a substantially cardioid shape.

4. The plasma cell of claim 1 , wherein the bulb has a peak disposed on the internal surface of the bulb configured to direct convection within the plasma bulb.

5. The plasma cell of claim 1 , wherein the bulb is electrodeless.

6. The plasma cell of claim 1 , further comprising:
one or more electrodes disposed within the bulb, the one or more electrodes configured to initiate plasma generation within the bulb.

7. The plasma cell of claim 6 , wherein the one or more electrodes comprise:
a concave electrode configured for capture and redirection of a convection plume within the plasma bulb.

8. The plasma cell of claim 6 , wherein the one or more electrodes comprise:
a substantially flat electrode configured to protect a top portion of the bulb.

9. The plasma cell of claim 6 , wherein the one or more electrodes comprise:
a filamentary electrode running along the longitudinal orientation of the plasma bulb.

10. The plasma cell of claim 6 , wherein the one or more electrodes comprise:
an electrode arranged off-center relative to the center of the plasma bulb.

11. The plasma cell of claim 1 , wherein the gas port assembly comprises:
a clamp configured to reversibly mechanically couple the delivery cap and the receiving cap.

12. The plasma cell of claim 1 , wherein the gas comprises:
at least one of Ar, Kr, N 2 , H 2 O, O 2 , H 2 , CH 4 , one or more metal halides, an Ar:Xe mixture, ArHg, KrHg, and XeHg.

13. The plasma cell of claim 1 , wherein the glass material of the plasma bulb comprises:
at least one of a low OH content fused synthetic quartz glass material and a high OH content fused synthetic silica glass material.

14. The plasma cell of claim 1 , wherein the glass material of the plasma bulb comprises:
at least one of SUPRASIL 1, SUPRASIL 2, SUPRASIL 300, SUPRASIL 310, HERALUX PLUS, and HERALUX-VUV.

15. A plasma cell equipped with a heat pipe for use in a laser-sustained plasma light source, comprising:
a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation;
one or more electrodes disposed within the bulb, the one or more electrodes configured to initiate plasma generation within the bulb;
a heat pipe in thermal communication with the one or more electrodes, the heat pipe further being in thermal communication with a heat exchanger, configured to transfer thermal energy from within the plasma bulb to a medium external to the plasma bulb; and
a gas port assembly, the gas port assembly configured to establish a reversible fluidic connection between a gas source and an internal portion of the plasma bulb.

16. The plasma cell of claim 15 , wherein the heat pipe is configured to transfer thermal energy from one or more electrodes of the plasma bulb to a medium external to the plasma bulb.

17. The plasma cell of claim 15 , wherein the heat pipe includes a volume of gas material within the external surface of the heat pipe.

18. The plasma cell of claim 15 , wherein the heat pipe comprises:
a phase transition based heat pipe.

19. The plasma cell of claim 15 , wherein the heat pipe is configured to transfer thermal from a plume generated by gas from a plasma region within the plasma bulb to a medium external to the plasma bulb.

20. The plasma cell of claim 15 , wherein the heat pipe includes a volume of molten material within the external surface of the heat pipe.

21. The plasma cell of claim 15 , wherein the bulb has at least one of a substantially cylindrical shape, a substantially spherical shape, and a substantially cardioid shape.

22. The plasma cell of claim 15 , wherein the one or more electrodes comprise:
a concave electrode configured for capture and redirection of a convection plume within the plasma bulb.

23. The plasma cell of claim 15 , wherein the one or more electrodes comprise:
a substantially flat electrode configured to protect a top portion of the bulb.

24. The plasma cell of claim 15 , wherein the one or more electrodes comprise:
a filamentary electrode running along the longitudinal orientation of the plasma bulb.

25. The plasma cell of claim 15 , wherein the one or more electrodes comprise:
an electrode arranged off-center relative to the center of the plasma bulb.

26. The plasma cell of claim 15 , wherein the gas comprises:
at least one of Ar, Kr, N 2 , H 2 O, O 2 , H 2 , CH 4 , one or more metal halides, an Ar:Xe mixture, ArHg, KrHg, and XeHg.

27. The plasma cell of claim 15 , wherein the glass material of the plasma bulb comprises:
at least one of a low OH content fused synthetic quartz glass material and a high OH content fused synthetic silica glass material.

28. The plasma cell of claim 15 , wherein the glass material of the plasma bulb comprises:
at least one of SUPRASIL 1, SUPRASIL 2, SUPRASIL 300, SUPRASIL 310, HERALUX PLUS, and HERALUX-VUV.

29. A plasma cell equipped with one or more radiation shields for use in a laser-sustained plasma light source, comprising:
a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, wherein the plasma bulb is configured to contain a gas suitable for plasma generation;
one or more electrodes disposed within the bulb, the one or more electrodes configured to initiate plasma generation within the bulb;
one or more radiation shields disposed on the one or more electrodes, wherein the one or more radiation shields are configured to shield the glass material of the bulb from radiation emitted by a plasma region within the plasma bulb; and
a gas port assembly, the gas port assembly configured to establish a reversible fluidic connection between a gas source and an internal portion of the plasma bulb.

30. The plasma cell of claim 29 , wherein the one or more electrodes comprise:
a top electrode disposed at an upper portion of the plasma bulb; and
a bottom electrode disposed at a bottom portion of the plasma bulb.

31. The plasma cell of claim 30 , wherein the one or more radiation shields comprise:
at least one of a top radiation shield coupled to the top electrode and a bottom radiation shield coupled to the bottom electrode.

32. The plasma cell of claim 29 , wherein the one or more radiation shields are further configured to redirect convection currents from the plasma region within the plasma bulb.

33. The plasma cell of claim 29 , wherein the bulb has at least one of a substantially cylindrical shape, a substantially spherical shape, and a substantially cardioid shape.

34. The plasma cel

Assignees

• Kla Tencor Corp

Inventors

• Chimmalgi Anant
• Shchemelinin Anatoly
• Bezel Ilya
• Patil Rajeev

Classifications

• H01J61/526 Primary

  heating or cooling of electrodes · CPC title

• H01J61/28

  Means for producing, introducing, or replenishing gas or vapour during operation of the lamp · CPC title

• H01J65/04

  Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title