Laser sustained plasma light source with electrically induced gas flow

Patent metadata

Field	Value
Publication number	US-9390892-B2
Application number	US-201313924608-A
Country	US
Kind code	B2
Filing date	Jun 23, 2013
Priority date	Jun 26, 2012
Publication date	Jul 12, 2016
Grant date	Jul 12, 2016

Abstract

A laser sustained plasma light source includes a plasma bulb containing a working gas flow driven by an electric current sustained within the plasma bulb. Charged particles are introduced into the working gas of the plasma bulb. An arrangement of electrodes maintained at different voltage levels drive the charged particles through the working gas. The movement of the charged particles within the working gas causes the working gas to flow in the direction of movement of the charged particles by entrainment. The resulting working gas flow increases convection around the plasma and increases laser to plasma interaction. The working gas flow within the plasma bulb can be stabilized and controlled by control of the voltages present on the each of the electrodes. A more stable flow of working gas through the plasma contributes to a more stable plasma shape and position within the plasma bulb.

First claim

What is claimed is:

1. A laser sustained plasma light source, comprising: a laser operable to generate an amount of illumination light; and a plasma bulb having at least one wall operable in part to contain a working gas, wherein the illumination light generated by the laser is incident on the working gas and generates a laser sustained plasma emission; a first electrode configured to emit a plurality of charged particles into the working gas of the plasma bulb; and a second electrode configured to attract a portion of the plurality of charged particles and generate a flow of charged particles from the first electrode toward the second electrode, wherein the flow of charged particles generates a flow of the working gas through the laser sustained plasma; a voltage source coupled to at least one electrode of the laser sustained plasma source, wherein the voltage source generates a voltage difference between at least two electrodes of the laser sustained plasma source; a controller coupled to the voltage source, wherein the controller is operable to control the voltage difference between the at least two electrodes of the laser sustained plasma source such that the flow of the working pas through the laser sustained plasma is controlled.

2. The laser sustained plasma light source of claim 1 , further comprising:
a third electrode disposed within the plasma bulb, wherein a voltage difference between the first electrode and the second electrode is different than a voltage difference between the first electrode and the third electrode.

3. The laser sustained plasma light source of claim 1 , further comprising:
a plurality of electrodes disposed along a periphery of the plasma bulb outside of the plasma bulb, wherein a voltage difference between at least one of the plurality of electrodes disposed along the periphery and the first electrode steers the flow of charged particles within the plasma bulb.

4. The laser sustained plasma light source of claim 3 , wherein a first voltage is applied to a first of the plurality of electrodes disposed along the periphery and a second voltage is applied to a second of the plurality of electrodes disposed along the periphery.

5. The laser sustained plasma light source of claim 1 , further comprising:
at least one optical element configured to focus a portion of the laser sustained plasma emission to the first electrode to stimulate the emission of the plurality of charged particles into the working gas.

6. The laser sustained plasma light source of claim 1 , wherein the second electrode is a portion of the at least one wall of the plasma bulb.

7. The laser sustained plasma light source of claim 1 , wherein an electric arc is sustained between the first electrode and the second electrode, and wherein a heat plume generated by the electric arc generates the flow of the working gas through the laser sustained plasma.

8. The laser sustained plasma light source of claim 1 , further comprising:
a mechanical flow control structure disposed within the plasma bulb.

9. The laser sustained plasma light source of claim 1 , wherein the emission of the plurality of charged particles into the working gas of the plasma bulb from the first electrode is stimulated by any of: a voltage applied to the first electrode, a heating of the first electrode by an electric arc, a heating of the first electrode by passing a current through the first electrode, and absorption of photons by the first electrode.

10. A method comprising: stimulating a laser sustained plasma emission in a plasma bulb comprising a working gas; emitting a plurality of charged particles into the working gas of the plasma bulb; and generating an electric current based on a flow of the charged particles, wherein the electric current generates a controlled flow of the working gas through the laser sustained plasma; wherein the generating of the electric current involves generating a controlled electric field in the plasma bulb including the plurality of charged particles, and wherein the generating of the controlled electric field involves supplying a first voltage to a first electrode and supplying a second voltage to a second electrode separated from the first electrode by an amount of the working gas: controlling the first voltage and the second voltage such that a voltage difference between the first and second electrodes controls the sustained flow of the working gas through the laser sustained plasma.

11. The method of claim 10 , further comprising: supplying a third voltage to a third electrode disposed along a periphery of the plasma bulb, wherein a voltage difference between the third electrode and the first electrode steers the electric current within the plasma bulb.

12. The method of claim 10 , further comprising: focusing a portion of the laser sustained plasma emission to the first electrode to stimulate the emitting of the plurality of charged particles into the working gas of the plasma bulb.

13. The method of claim 10 , wherein the second electrode is a portion of at least one wall of the plasma bulb.

14. The method of claim 10 , wherein the generating of the sustained flow of the working gas through the laser sustained plasma involves generating an electric arc between a first electrode and a second electrode separated from the first electrode by an amount of the working gas.

15. A laser sustained plasma light source comprising:
a laser operable to generate an amount of illumination light;
a plasma bulb having at least one wall operable in part to contain a working gas, wherein the illumination light generated by the laser is incident on the working gas and generates a laser sustained plasma emission;
a first electrode configured to emit a plurality of charged particles into the working gas of the plasma bulb;
a second electrode configured to attract a portion of the plurality of charged particles and generate a flow of charged particles from the first electrode toward the second electrode, wherein the flow of charged particles generates a flow of the working gas through the laser sustained plasma; and
a computer configured to control the flow of the working gas through the laser sustained plasma by controlling a voltage difference between the first and second electrodes.

16. The laser sustained plasma light source of claim 15 , wherein the controlling the voltage difference between the first and second electrodes involves:
receiving an indication of an operating condition of the laser sustained plasma light source; and
determining a command signal to be communicated to a voltage source coupled to the second electrode.

Assignees

• Kla Tencor Corp

Inventors

• Shchemelinin Anatoly
• Bezel Ilya

Classifications

• H01J65/04

  Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title

• H01J61/20

  mercury vapour · CPC title

• H01J61/125

  having an halogenide as principal component · CPC title

• H01J37/32055 Primary

  Arc discharge · CPC title

• H01J61/28

  Means for producing, introducing, or replenishing gas or vapour during operation of the lamp · CPC title