Integrated fan-out pillar probe system

Patent metadata

Field	Value
Publication number	US-9915699-B2
Application number	US-201414488852-A
Country	US
Kind code	B2
Filing date	Sep 17, 2014
Priority date	Sep 17, 2014
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

A method of probe testing dies, the method includes loading a wafer having a first die and a second die into a prober and bringing probes of the prober into contact with first contact pads of the first die according to first probe parameters. A first probe contact test of first values of the contact between the probes and the first contact pads is performed, and a die test of the first die is performed after performing the probe contact test. Results of the die test and results of the probe contact test are saved and second probe parameters are automatically generated based on at least the results of the first probe contact test.

First claim

What is claimed is:

1. A method, comprising:
loading a wafer having a first die and a second die into a prober;
bringing probes of the prober into contact with first contact pads of the first die according to first probe parameters;
performing a first probe contact test of first values of the contact between the probes and the first contact pads;
performing a die test of the first die after the performing the probe contact test;
saving results of the die test and results of the probe contact test;
automatically generating second probe parameters based on at least the results of the first probe contact test;
bringing the probes of the prober into contact with the first contact pads of the first die according to the second probe parameters, the first probe parameters being different than the second probe parameters;
prior to testing another die, retesting the first die by performing a second probe contact test of second values of the contact between the probes and the first contact pads; and
automatically generating third probe parameters based on at least the results of the second probe contact test.

2. The method of claim 1 , further comprising:
bringing probes of the prober into contact with second contact pads of the second die according to the third probe parameters; and
performing a third probe contact test of third values of the contact between the probes and the second contact pads.

3. The method of claim 2 , wherein the first values, the second values, and the third values are resistances.

4. The method of claim 2 , wherein the first probe parameters, the second probe parameters, and the third probe parameters each comprise a probe cleaning frequency, a probe overdrive or a touchdown count.

5. The method of claim 1 , further comprising:
generating the first probe parameters based on at least a wafer parameter or a lot parameter.

6. The method of claim 5 , wherein the first probe parameters are generated based on results of a previous first probe contact test.

7. The method of claim 1 , further comprising modifying one of lot parameters and wafer parameters based on the results of the die test or the results of the first probe contact test.

8. A method, comprising:
determining a wafer parameter for a wafer in a die test system;
determining first probe parameters for a first die on the wafer based on at least the wafer parameter;
bringing a probe into contact with a first contact pad of the first die according to the first probe parameters;
performing a first probe contact test of contact between the probe and the first contact pad;
automatically determining second probe parameters for the first die based on at least first results of the first probe contact test;
bringing the probe into contact with the first contact pad of the first die according to the second probe parameters;
performing a second probe contact test of contact between the probe and the first contact pad;
automatically determining third probe parameters for a second die based on at least second results of the second probe contact test;
bringing the probe into contact with a second contact pad of the second die according to the third probe parameters; and
performing a third probe contact test of contact between the probe and the second contact pad.

9. The method of claim 8 , wherein the first results comprise a resistance of a contact between the probe and the first contact pad.

10. The method of claim 8 , wherein the first probe parameters, the second probe parameters, and the third probe parameters each comprise a probe cleaning frequency, a probe overdrive or a touchdown count.

11. The method of claim 10 , wherein the bringing the probe into contact with the first contact pad comprises cleaning the probe upon determining that the probe should be cleaned according to the probe cleaning frequency.

12. The method of claim 8 , wherein the first die is a different die than the second die.

13. The method of claim 8 , further comprising performing a die test of the first die after the performing the probe contact test and using the probe in contact with the first contact pad according to the first probe parameters.

14. The method of claim 13 , wherein the third probe parameters for the second die are determined based on at least results of the die test.

15. A die test system, comprising:
a data storage module;
an analyzer in signal communication with the data storage module and configured to determine first probe parameters for a first die on a wafer based on at least a wafer parameter;
a tester configured to transmit the first probe parameters over a bus; and
a prober configured to receive the first probe parameters over the bus, the prober configured to bring probes into contact with first contact pads of the first die according to the first probe parameters, the prober having first circuitry configured to perform a first probe contact test of a quality of contact between the probes and the first contact pads, the prober further configured to transmit first results of the probe contact test to the analyzer;
wherein the analyzer is further configured to receive the first results and to determine second probe parameters based on at least the first results, the analyzer further configured to determine whether to perform a second probe contact test of the first die on the wafer based on at least the second probe parameters.

16. The system of claim 15 , wherein the first results comprise a resistance of the contact between the probes and the first contact pads.

17. The system of claim 15 , wherein the first probe parameters comprise a probe cleaning frequency, a probe overdrive or a touchdown count.

18. The system of claim 15 , wherein the first circuitry is further configured to perform a die test of the first die after the performing the second probe contact test and using the probes in contact with the first contact pads according to the second probe parameters.

19. The system of claim 15 , wherein the wafer parameter comprises a warpage of the wafer.

20. The system of claim 18 , wherein the analyzer is further configured to determine whether to perform a second test of the first die.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Wang Mill-Jer
• Peng Ching-Nen
• Lin Hung-Chih
• Chen Hao
• Lee Mincent
• Tien Chen-Hung
• How Chang Chia

Classifications

• G01R31/2894

  Aspects of quality control [QC] (G01R31/31718 takes precedence; program control for QC G05B19/41875) · CPC title

• G01R31/2893 Primary

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title

• G01R31/2891

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title

• G01R3/00

  Apparatus or processes specially adapted for the manufacture {or maintenance} of measuring instruments {, e.g. of probe tips} · CPC title