Device for separating two substrates

Patent metadata

Field	Value
Publication number	US-9914233-B2
Application number	US-201314423607-A
Country	US
Kind code	B2
Filing date	Sep 3, 2013
Priority date	Sep 7, 2012
Publication date	Mar 13, 2018
Grant date	Mar 13, 2018

Abstract

This disclosure relates to a device for separating two substrates to be utilized in electronics, optics, optoelectronics and/or photovoltaics. The device separates the substrates at an interface, the device comprising a holder; a member for retaining the structure, the member being mounted on the holder; a tool for separating the two substrates, also mounted on the holder; and means for moving the separating tool and/or means for moving the retaining member relative to the holder so as to bring them closer together or move them farther apart from each other, preferably over a limited range of travel.
This device is noteworthy in that the separating tool comprises a leading edge that has, in cross-section, in succession from its tip or its front edge to its back, a tapered portion that is extended by a flared portion.

First claim

The invention claimed is:

1. A device for separating two substrates at a separation interface, at least one of the two substrates being intended to be used in electronics, optics, optoelectronics and/or photovoltaics, the two substrates together forming a structure, the device comprising:
a holder;
a member for retaining the structure, the member being mounted on the holder;
a separating tool for separating the two substrates, the separating tool also mounted on the holder, the separating tool comprising a leading edge having, in cross-section, in succession from a tip or a front edge thereof to a back thereof, a tapered portion that is extended by a flared portion that is extended by a back portion; and
moving means for providing relative movement between the separating tool and the retaining member, the moving means making it possible to move the tool and/or member relative to the holder so as to bring the separating tool and the retaining member closer together or move the separating tool and the retaining member farther apart from each other;
wherein:
the tapered portion of the separating tool has an isosceles-triangle-shaped cross-section having two sides, an angle at a tip of the isosceles-triangle-shaped cross-section having a non-zero angle that is lower than 30°, a height of the isosceles-triangle-shaped cross-section of the tapered portion being between 2 mm and 20 mm;
the flared portion has an isosceles-trapezium-shaped cross-section having two sides adjacent to and extending away from the two sides of the tapered portion, an angle between the two sides at a tip of the isosceles-trapezium-shaped cross-section being larger than 30°, a height of the isosceles-trapezium-shaped cross-section of the flared portion being between 10 mm and 100 mm;
the back portion has a rectangular parallelepiped-shaped cross-section having two sides adjacent to and extending away from the two sides of the flared portion, the border between the flared portion and the back portion being configured to support the two substrates without the two substrates contacting the tapered portion once the separating tool penetrates a distance therebetween; and
the separating tool has a longitudinal, vertical plane of symmetry passing through the tip or the front edge to the back of the separating tool, each of the two sides of the tapered portion, the flared portion and the back portion is symmetric with respect to the longitudinal, vertical plane of symmetry.

2. The device of claim 1 , wherein a thickness of the separating tool measured level with a base of the isosceles-trapezium-shaped cross-section of the flared portion is larger than two times the product of the tangent of half the angle at the tip of the isosceles-triangle-shaped cross-section of the tapered portion and the height of the isosceles-triangle-shaped cross-section of the tapered portion.

3. The device of claim 1 , wherein the leading edge of the separating tool is an elongate rectilinear element.

4. The device of claim 1 , wherein the separating tool comprises a fluoropolymer or a material covered with a lubricant.

5. The device of claim 4 , wherein the separating tool comprises polytetrafluoroethylene.

6. The device of claim 4 , wherein the separating tool comprises a material covered with a lubricant.

7. The device of claim 1 , wherein the retaining member comprises a vertical retaining groove, the groove having a bottom and two lateral walls inclined upward and toward an exterior of the groove, the groove allowing the structure or the two substrates to be retained in an at least substantially vertical position, and wherein the moving means are configured to move the separating tool and/or the retaining member in a vertical plane.

8. The device of claim 7 , wherein an angle between the two lateral walls is larger than or equal to 8°.

9. The device of claim 7 , wherein the vertical retaining groove is circularly arcuate in shape.

10. The device of claim 7 , wherein:
the retaining groove has a longitudinal, vertical plane of symmetry passing through the bottom of the groove; and
the retaining member and the separating tool are mounted on the holder so that the separating tool is located above the retaining member and so that their respective vertical planes of symmetry are coincident.

11. The device of claim 7 , wherein the bottom of the vertical retaining groove has a width between about 1.5 mm and 4 mm.

12. The device of claim 7 , wherein a depth of the vertical retaining groove is at least 10 mm.

13. The device of claim 7 , further comprising a central rest protruding vertically from the bottom of the vertical retaining groove.

14. The device of claim 13 , wherein the rest has a height between 50 μm and 600 μm and a width between 50 μm and 300 μm.

15. The device of claim 13 , further comprising a spring housed in a void in the bottom of the groove, the rest mounted on the spring so as to be vertically movable.

16. The device of claim 1 , wherein the separating tool further includes a spray nozzle in a central portion of the separating tool, the spray nozzle connected to a source for supplying a liquid to the spray nozzle.

17. The device of claim 16 , wherein the liquid has a composition promoting the separation of the two substrates at the separation interface.

Assignees

• Soitec Silicon On Insulator

Inventors

• Landru Didier

Classifications

• H10P72/0428 Primary

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• B32B43/006

  Delaminating · CPC title

• Y10T156/1961

  Severing delaminating means [e.g., chisel, etc.] · CPC title

• Y10T156/1179

  with poking during delaminating [e.g., jabbing, etc.] · CPC title

• B26D3/28 Primary

  Splitting layers from work; Mutually separating layers by cutting (B26D3/30 takes precedence; Recovery of plastics or other constituents of waste material containing plastics B29B17/00) · CPC title