Plating bath compositions for electroless plating of metals and metal alloys

Patent metadata

Field	Value
Publication number	US-9909216-B2
Application number	US-201515526771-A
Country	US
Kind code	B2
Filing date	Dec 4, 2015
Priority date	Dec 16, 2014
Publication date	Mar 6, 2018
Grant date	Mar 6, 2018

Abstract

The present invention relates to additives which may be employed in electroless metal and metal alloy plating baths and a process for use of said plating baths. Such additives reduce the plating rate and increase the stability of electroless plating baths and therefore, such electroless plating baths are particularly suitable for the deposition of said metal or metal alloys into recessed structures such as trenches and vias in printed circuit boards, IC substrates and semiconductor substrates. The electroless plating baths are further useful for metallization of display applications.

First claim

The invention claimed is:

1. An electroless plating bath for deposition of copper, nickel, cobalt or alloys thereof comprising at least one source for metal ions and at least one reducing agent characterized in that the electroless plating bath further comprises a plating rate modifier according to formula (I)

wherein monovalent residues R 1 to R 2 , end group Y and divalent spacer group Z and index n are selected from the following groups
R 1 is selected from the group consisting of —O—R 3 and —NH—R 4 wherein R 3 is selected from hydrogen, lithium, sodium, potassium, rubidium, caesium, ammonium, alkyl, aryl, and R 4 is selected from hydrogen, alkyl and aryl;
R 2 is selected from the group consisting of hydrogen, alkyl, alkylaryl, and aryl;
Y is selected from the group consisting of

 wherein the monovalent residue R 1 ′ is selected from the group consisting of —O—R 3 ′ and —NH—R 4 ′ wherein R 3 ′ is selected from hydrogen, lithium, sodium, potassium, rubidium, caesium, ammonium, alkyl, aryl, and R 4 ′ is selected from hydrogen, alkyl and aryl and monovalent residue R 2 ′ is selected from the group consisting of hydrogen, alkyl, alkylaryl, and aryl and n′ is an integer ranging from 1 to 2;
Z is

 wherein R 5 to R 8 are unbranched saturated alkylene residues wherein individual hydrogen bonded to said unbranched saturated alkylene residues in each case are optionally substituted by a functional group selected from alkyl, aryl and hydroxyl (—OH); wherein p is an integer ranging from 1 to 100, q is an integer ranging from 0 to 99, r is an integer ranging from 0 to 99, s is an integer ranging from 0 to 99 with the proviso that the sum of (p+q+r+s) ranges from 1 to 100; and
n is an integer ranging from 1 to 2.

2. The electroless plating bath according to claim 1 characterized in that Y is

3. The electroless plating bath according to claim 1 characterized in that the residues R 5 to R 8 in the plating rate modifier are unbranched saturated C 1 - to C 6 -alkylene residues wherein individual hydrogen bonded to said unbranched saturated alkylene residues in each case optionally are substituted by a functional group selected from alkyl, aryl and hydroxyl.

4. The electroless plating bath according to claim 1 wherein residues R 5 to R 8 in the plating rate modifier are selected from the group consisting of ethane-1,2-diyl(—CH 2 —CH 2 —), propane-1,2-diyl (—CH(CH 3 )—CH 2 —), butane-1,2-diyl (—CH(CH 2 -CH 3 )—CH 2 —) and 2-hydroxypropane-1,3-diyl(—CH 2 —CH(OH)—CH 2 —).

5. The electroless plating bath according to claim 1 characterized in that the plating rate modifier according to formula (I) is contained in the electroless plating bath in a concentration of 0.1 to 1500 μmol/l.

6. The electroless plating bath according to claim 1 wherein the source of metal ions is selected from water soluble copper, nickel and cobalt salts and water soluble copper, nickel and cobalt compounds.

7. The electroless plating bath according to claim 1 wherein the electroless plating bath further comprises a stabilising agent.

8. The electroless plating bath according to claim 6 wherein water soluble nickel salts and water soluble nickel compounds and the reducing agent is selected from hypophosphite compounds, boron-based reducing agents, formaldehyde, hydrazine and mixtures thereof.

9. The electroless plating bath according to claim 6 wherein water soluble cobalt salts and water soluble cobalt compounds and wherein the reducing agent is selected from hypophosphite compounds, boron-based reducing agents, formaldehyde, hydrazine and mixtures thereof.

10. The electroless plating bath according to claim 6 wherein water soluble copper salts and water soluble copper compounds and the at least one reducing agent is selected from the group consisting of formaldehyde, paraformaldehyde, glyoxylic acid, sources of glyoxylic acid, aminoboranes, alkali borohydrides, hydrazine, polysaccharides, sugars, hypophosphoric acid, glycolic acid, formic acid, salts of aforementioned acids and mixtures thereof.

11. A process for the deposition of a metal or metal alloy, comprising the steps of
(i) providing a substrate;
(ii) contacting said substrate with an electroless plating bath according to claim 1 ; and thereby depositing a metal or metal alloy on at least a portion of said substrate.

12. The process for the deposition of a metal or metal alloy according to claim 11 wherein the process further comprises the step of
(i.a) pretreating the substrate.

13. The process for the deposition of a metal or metal alloy according to claim 11 wherein the substrate is selected from the group consisting of glass, plastic, silicon, dielectric and metallic substrates.

14. The process for the deposition of a metal or metal alloy according to claim 13 wherein the substrate is selected from printed circuit boards, chip carriers, semiconductor wafers, circuit carriers and interconnect devices.

15. The process for the deposition of a metal or metal alloy according to claim 13 wherein the substrate is selected from polyimide (PI) and polyethylene terephthalate (PET) foils.

16. An electroless plating bath according to claim 2 characterized in that the residues R 5 to R 8 in the plating rate modifier are unbranched saturated C 1 - to C 6 -alkylene residues wherein individual hydrogen bonded to said unbranched saturated alkylene residues in each case optionally are substituted by a functional group selected from alkyl, aryl and hydroxyl.

17. The electroless plating bath according to claim 2 wherein residues R 5 to R 8 in the plating rate modifier are selected from the group consisting of ethane-1,2-diyl (—CH 2 —CH 2 —), propane-1,2-diyl (—CH(CH 3 )—CH 2 —), butane-1,2-diyl (—CH(CH 2 -CH 3 )—CH 2 —) and 2-hydroxypropane-1,3-diyl(—CH 2 —CH(OH)—CH 2 —).

18. The electroless plating bath according to claim 3 wherein residues R 5 to R 8 in the plating rate modifier are selected from the group consisting of ethane-1,2-diyl (—CH 2 —CH 2 —), propane-1,2-diyl (—CH(CH 3 )—CH 2 —), butane-1,2-diyl (—CH(CH 2 -CH 3 )—CH 2 —) and 2-hydroxypropane-1,3-diyl(—CH 2 —CH(OH)—CH 2 —).

19. The electroless plating bath according to claim 16 wherein residues R 5 to R 8 in the plating rate modifier are selected from the group consisting of ethane-1,2-diyl (—CH 2 —CH 2 —), propane-1,2-diyl (—CH(CH 3 )—CH 2 —), butane-1,2-diyl (—CH(CH 2 -CH 3 )—CH 2 —) and 2-hydroxypropane-1,3-diyl(—CH 2 —CH(OH)—CH 2 —).

Assignees

• Atotech Deutschland Gmbh

Inventors

• Brunner Heiko
• Kohlmann Lars
• Karasahin Senguel
• Dammasch Matthias
• Pape Simon
• Lucks Sandra

Classifications

• C23C18/405

  Formaldehyde · CPC title

• C23C18/34 Primary

  using reducing agents · CPC title

• C23C18/50 Primary

  with alloys based on iron, cobalt or nickel · CPC title

• C23C18/40

  using reducing agents · CPC title

• C23C18/1641

  Organic substrates, e.g. resin, plastic · CPC title