Alkaline plating bath for electroless deposition of cobalt alloys

Patent metadata

Field	Value
Publication number	US-8961670-B2
Application number	US-201314376657-A
Country	US
Kind code	B2
Filing date	Jan 9, 2013
Priority date	Mar 14, 2012
Publication date	Feb 24, 2015
Grant date	Feb 24, 2015

Abstract

The present invention relates to aqueous, alkaline plating bath compositions for electroless deposition of ternary and quaternary cobalt alloys Co-M-P, Co-M-B and Co-M-B—P, wherein M is selected from the group consisting of Mn, Zr, Re, Mo, Ta and W which comprise a propargyl derivative as the stabilizing agent. The cobalt alloy layers derived there from are useful as barrier layers and cap layers in electronic devices such as semiconducting devices, printed circuit boards, and IC substrates.

First claim

The invention claimed is:

1. An aqueous, alkaline plating bath composition for electroless deposition of ternary and quaternary cobalt alloys Co-M-P, Co-M-B and Co-M-B—P, wherein M is selected from the group consisting of Mn, Zr, Re, Mo, Ta and W, the plating bath comprising
(i) a source of cobalt ions,
(ii) a source of M ions,
(iii) at least one complexing agent selected from the group consisting of carboxylic acids, hydroxyl carboxylic acids, aminocarboxylic acids and salts of the aforementioned and wherein the concentration of the at least one complexing agent ranges from 0.01 to 0.3 mol/l,
(iv) at least one reducing agent selected from the group consisting of hypophosphite ions, borane-based reducing agents, and mixtures thereof, and
(v) a stabilising agent according to formula (1):

wherein X is selected from O and NR 4 , n ranges from 1 to 6, m ranges from 1 to 8; R 1 , R 2 , R 3 and R 4 are independently selected from hydrogen and C 1 to C 4 alkyl; Y is selected from SO 3 R 5 , CO 2 R 5 and PO 3 R 5 2 , and R 5 is selected from hydrogen, sodium, potassium and ammonium wherein the concentration of the stabilising agent according to formula (1) ranges from 0.05 to 5.0 mmol/l.

2. The aqueous, alkaline plating bath according to claim 1 wherein Y is SO 3 R 5 with R 5 selected from hydrogen, sodium, potassium and ammonium.

3. The aqueous, alkaline plating bath according to claim 1 wherein the plating bath has a pH value of 7.5 to 12.

4. The aqueous, alkaline plating bath according to claim 1 wherein the concentration of cobalt ions ranges from 0.01 to 0.2 mol/l.

5. The aqueous, alkaline plating bath according to claim 1 wherein the concentration of the M ions ranges from 0.01 to 0.2 mol/l.

6. The aqueous, alkaline plating bath according to claim 1 wherein M is selected from the group consisting of Mo and W.

7. The aqueous, alkaline plating bath according to claim 1 wherein the concentration of the at least one reducing agent ranges from 0.01 to 0.5 mol/l.

8. The aqueous, alkaline plating bath according to claim 1 wherein the at least one reducing agent are hypophosphite ions.

9. A method for electroless deposition of ternary and quaternary cobalt alloys Co-M-P, Co-M-B and Co-M-B—P, wherein M is selected from the group consisting of Mn, Zr, Re, Mo, Ta and W comprising, in this order, the steps
(i) Providing a substrate,
(ii) Immersing the substrate in the aqueous, alkaline plating bath according to claim 1 ,
and thereby depositing a ternary or quaternary cobalt alloy Co-M-P, Co-M-B and Co-M-B—P, wherein M is selected from the group consisting of Mn, Zr, Re, Mo, Ta and W onto the substrate.

Assignees

• Atotech Deutschland Gmbh

Inventors

• Bera Holger
• Brunner Heiko

Classifications

• C23C18/50 Primary

  with alloys based on iron, cobalt or nickel · CPC title

• C23C18/1633

  Process of electroless plating · CPC title