Pre-treatment process for electroless plating

Patent metadata

Field	Value
Publication number	US-9896765-B2
Application number	US-201515112205-A
Country	US
Kind code	B2
Filing date	Jan 14, 2015
Priority date	Feb 21, 2014
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

The present invention discloses a process for electroless plating of a metal or metal alloy onto copper features of an electronic device such as a printed circuit board which suppresses undesired skip plating and extraneous plating. The process comprises the steps i) providing such a substrate, ii) activating of the copper features with noble metal ions; iii) removing excessive noble metal ions or precipitates formed thereof with an aqueous pre-treatment composition comprising an acid, a source for halide ions and an additive selected from the group consisting of thiourea, thiourea derivatives and polymers comprising thiourea groups, and iv) electroless plating of a metal or metal alloy layer.

First claim

The invention claimed is:

1. A process for electroless (autocatalytic) metal and metal alloy plating comprising, in this order, the steps of
i. providing a substrate comprising a copper surface,
ii. contacting said substrate comprising the copper surface with a noble metal ion containing composition,
iii. contacting said substrate contacted in step ii with an aqueous pre-treatment composition comprising an acid, a source for halide ions and an additive selected from the group consisting of

thiourea compounds according to formula (1)

wherein R 1 , R 2 and R 3 are independently selected from the group consisting of H, substituted C 1 to C 6 alkyl and unsubstituted C 1 to C 6 alkyl, and R 4 is selected from the group consisting of H, substituted C 1 to C 6 alkyl, unsubstituted C 1 to C 6 alkyl and —N(R 7 )—C(S)—NR 5 R 6 wherein R 5 , R 6 and R 7 are independently selected from the group consisting of H, substituted C 1 to C 6 alkyl and unsubstituted C 1 to C 6 alkyl,
compounds according to formula (2)
R 8 —C(S)—NR 9 R 10   (2)

wherein R 8 is selected from the group consisting of H, substituted C 1 to C 6 alkyl and unsubstituted C 1 to C 6 alkyl and R 9 and R 10 are independently selected from the group consisting of H, substituted C 1 to C 6 alkyl and unsubstituted C 1 to C 6 alkyl
and polymers comprising thiourea groups,
wherein the concentration of said additive ranges from 1 to 200 mg/l and
wherein the pH value of the aqueous pre-treatment composition is ≦3 and
iv. depositing a metal or metal alloy layer onto said substrate by electroless (autocatalytic) plating utilizing a plating bath.

2. The process according to claim 1 wherein the noble metal ion is palladium.

3. The process according to claim 1 wherein the acid is selected from the group consisting of inorganic acids, carboxylic acids, sulfonic acids and mixtures thereof.

4. The process according to claim 1 wherein the source for halide ions is selected from the group consisting of lithium chloride, sodium chloride, potassium chloride and ammonium chloride.

5. The process according to claim 1 wherein the concentration of halide ions in the aqueous pre-treatment composition ranges from 0.01 to 100 g/l.

6. The process according to claim 1 , wherein the concentration of the additive in the aqueous pre-treatment composition ranges from 5 to 150 mg/I.

7. The process according to claim 1 wherein R 1 , R 2 and R 3 are independently selected from the group consisting of H, methyl, ethyl, propyl and butyl, R 4 is selected from the group consisting of H, methyl, ethyl, propyl, butyl and R 8 is selected from the group consisting of H, methyl, ethyl, propyl and butyl and R 9 and R 10 are independently selected from the group consisting of H, methyl, ethyl, propyl and butyl.

8. The process according to claim 1 wherein the additive in the aqueous pre-treatment composition is selected from compounds according to formula (1) wherein the residue pairs R 1 /R 3 and R 2 /R 4 independently have the same substituent selected from the group consisting of H, methyl, ethyl, propyl and butyl.

9. The process according to claim 1 wherein the additive in the aqueous pre-treatment composition is selected from compounds according to formula (1) wherein residues R 1 , R 2 , R 3 and R 4 are all the same and selected from the group consisting of H, methyl, ethyl, propyl and butyl.

10. The process according to claim 1 wherein the aqueous pre-treatment composition further comprises a complexing agent selected from the group consisting of aminocarboxylic acids, hydroxycarboxylic acids and mixtures thereof.

11. The process according to claim 1 wherein the aqueous pre-treatment composition is held during step iii. at a temperature in the range of 20 to 80° C.

12. The process according to claim 1 wherein the substrate comprising a copper surface is contacted with the aqueous pre-treatment composition in step iii. for 10 s to 20 min.

13. The process according to claim 1 wherein the metal or metal alloy deposited in step iv. is selected from the group consisting of nickel, Ni—P alloys, Ni—B alloys, Ni—B—P alloys, Ni—Mo—P alloys, Ni—Mo—B alloys, Ni—Mo—B—P alloys, Ni—W—P alloys, Ni—W—B alloys, Ni—W—B—P alloys, Ni—Mo—W—P alloys, Ni—Mo—W—B alloys, Ni—Mo—W—B—P alloys, cobalt, Co—P alloys, Co—B alloys, Co—B—P alloys, Co—Mo—P alloys, Co—W—P alloys, Co—W—B alloys, Co—W—B—P alloys, Co—Mo—W—P alloys, Co—Mo—W—B alloys and Co—Mo—W—B—P alloys, palladium, Pd—B alloys, Pd—P alloys and Pd—B—P alloys.

14. The process according to claim 1 wherein in step iii the noble metal is selectively removed from the substrate contacted in step ii such that the noble metal remains only on the copper surface.

Assignees

• Atotech Deutschland Gmbh

Inventors

• Janssen Boris Alexander
• Lautan Donny

Classifications

• C23F1/44

  Compositions for etching metallic material from a metallic material substrate of different composition · CPC title

• C23F1/02

  Local etching · CPC title

• H05K3/187

  means therefor, e.g. baths, apparatus · CPC title

• C23C18/32 Primary

  Coating with nickel, cobalt or mixtures thereof with phosphorus or boron (C23C18/50 takes precedence) · CPC title

• C23C18/1841

  with use of metal first · CPC title