Ceramic component formed ceramic portions bonded together with a halogen plasma resistant bonding agent

Patent metadata

Field	Value
Publication number	US-9896376-B2
Application number	US-201414121484-A
Country	US
Kind code	B2
Filing date	Sep 8, 2014
Priority date	Nov 12, 2008
Publication date	Feb 20, 2018
Grant date	Feb 20, 2018

Abstract

A bonded ceramic component which is resistant to reactive halogen-containing plasmas, said component comprising ceramic portions which are bonded together by a bonding material which includes an oxyfluoride glass-ceramic-comprising transition area between interfaces of the ceramic portions, where the transition area includes from at least 0.1 volume % amorphous phase up to about 50 volume % amorphous phase.

First claim

We claim:

1. A bonded ceramic component which is resistant to reactive plasmas, comprising:
a first ceramic portion comprising a first ceramic;
a second ceramic portion comprising a second ceramic;
a glass-ceramic bonding layer between the first ceramic portion and the second ceramic portion, wherein said glass-ceramic bonding layer comprises an amorphous phase, and wherein said amorphous phase ranges from about 0.1 volume % to about 50 volume % of said glass-ceramic bonding layer;
a first transition layer between the first ceramic portion and the glass-ceramic bonding layer, the first transition layer comprising elements from the glass-ceramic bonding layer and elements from the first ceramic portion; and
a second transition layer between the second ceramic portion and the glass-ceramic bonding layer, the second transition layer comprising elements from the glass-ceramic bonding layer and elements from the second ceramic portion.

2. A bonded ceramic component in accordance with claim 1 , wherein said glass-ceramic boding layer amorphous phase ranges from about 4.5 volume % to about 50 volume %.

3. A bonded ceramic component in accordance with claim 2 , wherein said glass-ceramic bonding layer includes a ceramic phase which comprises an element selected from the group consisting of Nd, Ce, Sm, Er, Al, Y, Sc, La, Hf, Nb, Mg, Si, Gd, Tm, Dy, Yb, Ba, Na, and combinations thereof.

4. A bonded ceramic component in accordance with claim 2 , wherein said glass-ceramic bonding layer includes an additive selected from the group consisting of Nd 2 O 3 , CeO 2 , Sm 2 O 3 , Er 2 O 3 , ErF 3 , Sc 2 O 3 , ScF 3 , La 2 O 3 , LaF 3 , HfO 2 , HfF 4 , Nb 2 O 3 , NbF 5 , ZrO 2 , MgO, SiO 2 , Na 2 CO 3 , and combinations thereof.

5. A bonded ceramic component in accordance with claim 4 , wherein said glass-ceramic bonding layer comprises an element selected from the group consisting of Nd, Ce, Sm, Er, Al, Y, Sc, La, Hf, Nb, Mg, Si, Gd, Tm, Dy, Yb, Ba, Na, and combinations thereof.

6. A bonded ceramic component in accordance with claim 2 , wherein said amorphous phase comprises fluorine.

7. A bonded ceramic component in accordance with claim 6 , wherein said fluorine is present as a compound selected from the group consisting of YF 3 , NdF 3 , AlF 3 , ZrF 4 , SmF 3 , CeF 3 , DyF 3 , GdF 3 , InF 3 , LaF 3 , ThF 4 , TmF 3 , YbF 3 , BaF 2 , CaF 2 , and combinations thereof.

8. A bonded ceramic component in accordance with claim 1 , wherein said amorphous phase comprises fluorine.

9. A bonded ceramic component in accordance with claim 8 , wherein said fluorine is present as a compound selected from the group consisting of YF 3 , NdF 3 , AlF 3 , ZrF 4 , SmF 3 , CeF 3 , DyF 3 , GdF 3 , InF 3 , LaF 3 , ThF 4 , TmF 3 , YbF 3 , BaF 2 , CaF 2 , and combinations thereof.

10. A bonded ceramic component in accordance with claim 1 , wherein said glass-ceramic bonding layer includes a ceramic phase which comprises an element selected from the group consisting of Nd, Ce, Sm, Er, Al, Y, Sc, La, Hf, Nb, Mg, Si, Gd, Tm, Dy, Yb, Ba, Na, and combinations thereof.

11. A bonded ceramic component in accordance with claim 1 , wherein said glass-ceramic bonding layer includes an additive selected from the group consisting of Nd 2 O 3 , CeO 2 , Sm 2 O 3 , Er 2 O 3 , ErF 3 , Sc 2 O 3 , ScF 3 , La 2 O 3 , LaF 3 , HfO 2 , HfF 4 , Nb 2 O 3 , NbF 5 , ZrO 2 , MgO, SiO 2 , Na 2 CO 3 , and combinations thereof.

12. A bonded ceramic component in accordance with claim 1 , wherein the first ceramic portion comprises Y 2 O 3 and the second ceramic portion comprises Al 2 O 3 .

13. A bonded ceramic component in accordance with claim 1 , wherein the bonded ceramic component is selected from a group consisting of a lid, a showerhead, a chamber liner and an electrostatic chuck.

14. A bonded ceramic component in accordance with claim 1 , wherein the glass-ceramic bonding layer comprises YF 3 and Al 2 O 3 .

15. A bonded ceramic component in accordance with claim 1 , wherein the glass-ceramic bonding layer comprises YF 3 , Al 2 O 3 , ZrO 2 , MgO and Na 2 CO 3 .

16. A bonded ceramic component in accordance with claim 1 , wherein the glass-ceramic bonding layer comprises YF 3 and NdF 3 .

17. A bonded ceramic component in accordance with claim 16 , wherein the glass-ceramic bonding layer comprises 70-90 wt % YF 3 and 10-30 wt % NdF 3 .

18. A bonded ceramic component which is resistant to reactive plasmas, comprising:
a first ceramic portion comprising a first ceramic;
a second ceramic portion comprising a second ceramic;
a glass-ceramic bonding layer, wherein the first ceramic portion and the second ceramic portion are bonded together by said glass-ceramic bonding layer, wherein a glass phase in said glass-ceramic bonding layer ranges from about 0.1 volume % to about 50 volume % of said glass-ceramic bonding layer, and wherein said glass-ceramic bonding layer is formed from a mixture comprising an oxide in combination with a fluoride selected from the group consisting of YF 3 , NdF 3 , AlF 3 , ZrF 4 , SmF 3 , CeF 3 , DyF 3 , GdF 3 , InF 3 , LaF 3 , ThF 4 , TmF 3 , YbF 3 , BaF 2 , CaF 2 , and combinations thereof;
a first transition layer between the first ceramic portion and the glass-ceramic bonding layer, the first transition layer comprising elements from the glass-ceramic bonding layer and elements from the first ceramic portion; and
a second transition layer between the second ceramic portion and the glass-ceramic bonding layer, the second transition layer comprising elements from the glass-ceramic bonding layer and elements from the second ceramic portion.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer Y
• Duan Ren Guan
• Collins Kenneth S

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• C04B2237/10

  Glass interlayers, e.g. frit or flux · CPC title

• C04B2235/445

  Fluoride containing anions, e.g. fluosilicate · CPC title

• C04B2235/5445

  submicron sized, i.e. from 0,1 to 1 micron · CPC title

• C04B2237/064

  based on alumina or aluminates · CPC title