Seed crystal holder for growing a crystal by a solution method

Patent metadata

Field	Value
Publication number	US-9890470-B2
Application number	US-201314375783-A
Country	US
Kind code	B2
Filing date	Jan 30, 2013
Priority date	Jan 30, 2012
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

A seed crystal holder according to the present invention for growing a crystal by a solution method, and that includes a seed crystal made of silicon carbide; a holding member above the seed crystal; a bonding agent configured to fix the seed crystal and the holding member; and a sheet member made of carbon which is interposed in the bonding agent in a thickness direction, and which has an outer periphery smaller than an outer periphery of the seed crystal in a plan view.

First claim

The invention claimed is:

1. A seed crystal holder for growing a crystal by a solution method, comprising:
a seed crystal made of silicon carbide;
a sheet member made of carbon and having an outer periphery;
a first bonding agent configured to fix the sheet member to the seed crystal and having an outer periphery;
a holding member above the sheet member; and
a second bonding agent configured to fix the sheet member to the holding member and having an outer periphery,
wherein in a plan view the outer periphery of the first bonding agent is located outside the outer periphery of the second bonding agent and the outer periphery of the second bonding agent is smaller than the outer periphery of the sheet member, and
the seed crystal, the first bonding agent, the sheet member, the second bonding agent, and the holding member have respective diameters, and the diameter of the seed crystal is larger than the diameter of the first bonding agent, which is larger in diameter than the sheet member, which is larger in diameter than the second bonding agent, which is larger in diameter than holder.

2. The seed crystal holder according to claim 1 , wherein the outer periphery of the sheet member is larger than an outer periphery of the holding member in a plan view.

3. The seed crystal holder according to claim 1 , wherein the bonding agent comprises a cavity constituted with the seed crystal.

4. The seed crystal holder according to claim 3 , wherein the bonding agent further comprises a pore thereinside, and the cavity is larger than the pore, the pore being located between the sheet member and the holding member.

5. The seed crystal holder according to claim 1 , wherein the sheet member comprises a through hole in the thickness direction, and an inside of the through hole is filled with a part of the bonding agent.

6. The seed crystal holder according to claim 5 , wherein the sheet member further comprises a plurality of through holes, and the number of the plurality of through holes increases as going to a center of the sheet member from an outer circumference.

7. The seed crystal holder according to claim 1 , wherein a part of the first bonding agent covers a side surface of the sheet member.

8. The seed crystal holder according to claim 1 , wherein the sheet member includes carbon particles and silicon as a component.

9. The seed crystal holder according to claim 1 , wherein the sheet member includes silicon in a state of silicon carbide.

10. The seed crystal holder according to claim 1 , wherein the first and second bonding agents include-silicon as a component.

11. The seed crystal holder according to claim 10 , wherein the silicon included in the second bonding agent is more than the silicon included in the first bonding agent.

Assignees

• Kyocera Corp

Inventors

• Masaki Katsuaki
• Kuba Yutaka
• Domoto Chiaki
• Ueyama Daisuke
• Hayashi Yuichiro

Classifications

• Y10T117/1024

  for crystallization from liquid or supercritical state · CPC title

• Y10T117/1092

  Shape defined by a solid member other than seed or product [e.g., Bridgman-Stockbarger] · CPC title

• C30B9/06 Primary

  using as solvent a component of the crystal composition · CPC title

• C30B15/32

  Seed holders, e.g. chucks · CPC title

• C30B29/36 Primary

  Carbides · CPC title