Method for manufacturing a micromechanical component

Patent metadata

Field	Value
Publication number	US-9890035-B2
Application number	US-201715401259-A
Country	US
Kind code	B2
Filing date	Jan 9, 2017
Priority date	Jan 15, 2016
Publication date	Feb 13, 2018
Grant date	Feb 13, 2018

Abstract

A method is provided for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. A first crystalline layer or a first amorphous layer or a first nanocrystalline layer or a first polycrystalline layer is deposited on or grown on a surface of the substrate or of the cap. A recess is introduced into the substrate or into the cap for accommodating the first crystalline layer or the first amorphous layer or the first nanocrystalline layer or the first polycrystalline layer.

First claim

What is claimed is:

1. A method for manufacturing a micromechanical component including a substrate and a cap which is connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the method comprising:
in a first method step, forming an access opening connecting the first cavity to surroundings of the micromechanical component in the substrate or in the cap;
in a second method step, adjusting at least one of the first pressure and the first chemical composition, in the first cavity;
in a third method step, sealing the access opening by introducing energy or heat into an absorbing part of the substrate or the cap, with the aid of a laser;
in a fourth method step, depositing or growing one of: i) a first crystalline layer, ii) a first amorphous layer, iii) a first nanocrystalline layer, or iv) a first polycrystalline layer, on a surface of the substrate or of the cap;
in a fifth method step, introducing a recess into the substrate or into the cap for accommodating the one of the first crystalline layer, the first amorphous layer, the first nanocrystalline layer, or the first polycrystalline layer;
in a sixth method step, depositing or growing one of: i) a second crystalline layer, ii) a second amorphous layer, iii) a second nanocrystalline layer, or iv) a second polycrystalline layer, on the one of the first crystalline layer, the first amorphous layer, the first nanocrystalline layer, or the first polycrystalline layer; and
in a seventh method step, depositing or growing one of: i) a third crystalline layer, ii) a third amorphous layer, iii) a third nanocrystalline layer, or iv) a third polycrystalline layer, on the one of the second crystalline layer, the second amorphous layer, the second nanocrystalline layer, or the second polycrystalline layer.

2. The method as recited in claim 1 , further comprising:
in an eight method step, depositing or growing one of: i) a fourth crystalline layer, ii) a fourth amorphous layer, iii) a fourth nanocrystalline layer, or iv) a fourth polycrystalline layer, on the one of the third crystalline layer, the third amorphous layer, the third nanocrystalline layer, or the third polycrystalline layer; and
in a ninth method step, at least partially removing at least one of: i) the substrate or the cap, ii) the one of the first crystalline layer, the first amorphous layer, the first nanocrystalline layer, or the first polycrystalline layer, iii) the one of the second crystalline layer, the second amorphous layer, the second nanocrystalline layer, or the second polycrystalline layer, iv) the one of the third crystalline layer, the third amorphous layer, the third nanocrystalline layer, or the third polycrystalline layer, and v) the one of the fourth crystalline layer, the fourth amorphous layer, the fourth nanocrystalline layer, or the fourth polycrystalline layer.

3. The method as recited in claim 2 , wherein the substrate or the cap is pivoted in a first pivot step chronologically after the fifth method step essentially by 180° about an axis extending essentially in parallel to the surface of the substrate or of the cap, the substrate or the cap being pivoted in a second pivot step chronologically before the ninth method step essentially by 180° about the axis extending essentially in parallel to the surface of the substrate or of the cap.

4. The method as recited in claim 3 , further comprising:
in a tenth method step, doping at least one of: i) the substrate or the cap, ii) the one of the first crystalline layer, the first amorphous layer, the first nanocrystalline layer, or the first polycrystalline layer, iii) the one of the second crystalline layer, the second amorphous layer, the second nanocrystalline layer, or the second polycrystalline layer, iv) the one of the third crystalline layer, the third amorphous layer, the third nanocrystalline layer, or the third polycrystalline layer, and v) the one of the fourth crystalline layer, the fourth amorphous layer, the fourth nanocrystalline layer, or the fourth polycrystalline layer.

5. A micromechanical component, comprising:
a substrate;
a cap connected to the substrate, wherein the cap, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the substrate or the cap including a sealed access opening;
one of a first crystalline layer, first amorphous layer, first nanocrystalline layer, or first polycrystalline layer deposited on or grown on a surface of the substrate or of the cap; and
one of a second crystalline layer, second amorphous layer, second nanocrystalline layer, or second polycrystalline layer deposited on or grown on the one of the first crystalline layer, the first amorphous layer, the first nanocrystalline layer, or the first polycrystalline layer;
wherein the substrate or the cap includes a recess for accommodating the one of the first crystalline layer, the first amorphous layer, the first nanocrystalline layer, and the first polycrystalline layer,
wherein the first pressure is lower than the second pressure, a first sensor unit for rotation rate measurement being situated in the first cavity and a second sensor unit for acceleration measurement being situated in the second cavity.

6. The micromechanical component as recited in claim 5 , wherein the cap, together with the substrate, encloses a second cavity, a second pressure prevailing and a second gas mixture having a second chemical composition being enclosed in the second cavity.

Assignees

• Bosch Gmbh Robert

Inventors

• Breitling Achim
• Reichenbach Frank
• Reinmuth Jochen
• Amthor Julia

Classifications

• B81B2201/0242

  Gyroscopes · CPC title

• B81C1/00285

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81C2203/0145

  Hermetically sealing an opening in the lid · CPC title

• B81B7/0038 Primary

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81B2201/0235

  Accelerometers · CPC title