Cavity pressure modification using local heating with a laser

Patent metadata

Field	Value
Publication number	US-9556019-B2
Application number	US-201514705630-A
Country	US
Kind code	B2
Filing date	May 6, 2015
Priority date	May 6, 2015
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

A method and system for changing a pressure within at least one enclosure in a MEMS device are disclosed. In a first aspect, the method comprises applying a laser through one of the at least two substrates onto a material which changes the pressure within at least one enclosure when exposed to the laser, wherein the at least one enclosure is formed by the at least two substrates. In a second aspect, the system comprises a MEMS device that includes a first substrate, a second substrate bonded to the first substrate, wherein at least one enclosure is located between the first and the second substrates, a metal layer within one of the first substrate and the second substrate, and a material vertically oriented over the metal layer, wherein when the material is heated the material changes a pressure within the at least one enclosure.

First claim

What is claimed is:

1. A method for changing a pressure within at least one enclosure in a microelectromechanical systems (MEMS) device, the method comprising:
applying a laser through one of at least two substrates onto a material that changes the pressure within at least one enclosure when exposed to the laser, wherein the at least one enclosure is formed by a MEMS substrate and a complementary metal-oxide-semiconductor (CMOS) substrate of the at least two substrates, and wherein the material is disposed on a metal layer of at least one of the MEMS substrate or the CMOS substrate; and
reflecting at least a portion of incident laser light from the laser with the metal layer back onto the material.

2. The method of claim 1 , further comprising:
embedding the material within one of the at least two substrates before applying the laser.

3. The method of claim 1 , wherein one of the at least two substrates includes a cavity.

4. The method of claim 1 , wherein the one of the at least two substrates is a silicon substrate.

5. The method of claim 1 , wherein the at least one enclosure contains a MEMS structure.

6. The method of claim 1 , wherein the material comprises an outgassing material.

7. The method of claim 6 , wherein the outgassing material comprises silicon oxide compound.

8. The method of claim 1 , wherein the material comprises a gettering material.

9. The method of claim 8 , wherein the gettering material comprises any of titanium, titanium compound, zirconium, zirconium compound, aluminum, magnesium, strontium, barium, calcium, nickel, niobium, cesium, tantalum, thorium, cerium, lanthanum, cobalt, vanadium, and phosphorous.

10. The method of claim 1 , wherein one of the at least two substrates includes a metal trough comprising the metal layer for holding the material there within.

11. The method of claim 10 , further comprising:
coupling the metal layer to one of the at least two substrates, wherein the metal layer is a portion of the metal trough that prevents further transmission of the laser.

12. The method of claim 10 , wherein the material comprises a plurality of interlayer dielectrics (ILDs) within the metal trough.

13. The method of claim 1 , wherein the material is disposed on the MEMS substrate.

14. The method of claim 1 , wherein the material is disposed on the CMOS substrate.

15. The method of claim 1 , wherein the laser is applied in a repeated manner to change the pressure within the at least one enclosure.

16. The method of claim 1 , further comprising:
measuring a pressure within the at least one enclosure; and
reapplying the laser to the material to change the pressure within the at least one enclosure.

17. The method of claim 1 , further comprising:
measuring a parameter indicative of the pressure within the at least one enclosure; and
reapplying the laser to the material to change the parameter.

18. The method of claim 17 , wherein the parameter is any of Q characteristics of the device, damping characteristics of the device, acoustic characteristics of the device, heat transfer within the at least one enclosure, and sound velocity of the device.

19. The method of claim 1 , wherein the laser is an infrared (IR) laser.

Assignees

• Invensense Inc

Inventors

• Dueweke Michael
• Lim Martin

Classifications

• B81C1/00293 Primary

  maintaining a controlled atmosphere with processes not provided for in B81C1/00285 · CPC title

• B81B7/0038 Primary

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81B7/02 Primary

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title

• B81C1/00285

  using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters · CPC title

• B81C2203/0785

  Transfer and j oin technology, i.e. forming the electronic processing unit and the micromechanical structure on separate substrates and joining the substrates · CPC title