Multi-station sequential curing of dielectric films

Patent metadata

Field	Value
Publication number	US-9873946-B2
Application number	US-201514593046-A
Country	US
Kind code	B2
Filing date	Jan 9, 2015
Priority date	Apr 26, 2005
Publication date	Jan 23, 2018
Grant date	Jan 23, 2018

Abstract

The present invention provides improved methods of preparing a low-k dielectric material on a substrate. The methods involve multiple operation ultraviolet curing processes in which UV intensity, wafer substrate temperature, UV spectral distribution, and other conditions may be independently modulated in each operation. Operations may be pulsed or even be concurrently applied to the same wafer. In certain embodiments, a film containing a structure former and a porogen is exposed to UV radiation in a first operation to facilitate removal of the porogen and create a porous dielectric film. In a second operation, the film is exposed to UV radiation to increase cross-linking within the porous film.

First claim

What is claimed is:

1. A chamber for processing semiconductor wafers, comprising:
a plurality of processing stations, each processing station having a wafer support and one or more radiation sources configured to provide ultraviolet radiation at that processing station; and
a mechanism to transfer a wafer to each processing station, wherein the processing stations are operable to provide wafer exposure characteristics that vary in at least one of radiation intensity, radiation wavelength, spectral distribution, and wafer temperature for at least two of the plurality of processing stations.

2. The chamber of claim 1 , wherein each radiation source comprises:
a) one or more light generators, and
b) one or more optical components operable to modify one or more characteristics of radiant output of the light generators.

3. The chamber of claim 2 , wherein the light generators are selected from the group consisting of: mercury-vapor lamps, doped mercury-vapor lamps, electrode lamps, excimer lamps, excimer lasers, noble gas lamps, metal halide lamps, radio-frequency-driven lamps, direct current lamps, and combinations thereof.

4. The chamber of claim 1 , wherein at least one of the processing stations includes two or more independently operable radiation sources.

5. The chamber of claim 4 wherein the independently operable radiation sources are configured to generate radiation that varies in at least one of radiation intensity, radiation wavelength, and spectral distribution.

6. A semiconductor processing tool, comprising
a) one or more processing chambers, each chamber comprising a wafer support and a radiation source configured to provide ultraviolet radiation and operable to provide wafer exposure characteristics that vary at least one of radiation intensity, radiation wavelength, spectral distribution, and wafer support temperature; and
b) a mechanism to transfer a wafer to each chamber.

7. The semiconductor processing tool of claim 6 , wherein the one or more processing chambers is configured to dissociate porogens while minimizing cross-linking in a low-k dielectric film and the one or more processing chambers is configured to cross-link bonds in the film.

8. The chamber of claim 1 , wherein the mechanism is a rotatable carousel that includes the wafer supports and wherein rotation of the carousel causes the wafer supports and any wafers supported by the wafer supports to be moved between the processing stations.

9. The chamber of claim 1 , wherein:
the chamber has at least four processing stations, and
the chamber is configured to:
provide, at a first processing station of the processing stations, a first wafer support temperature as well as ultraviolet radiation within a first spectral band and having a first ultraviolet radiation intensity within the first spectral band,
provide, at a second processing station of the processing stations, a second wafer support temperature as well as ultraviolet radiation within a second spectral band and having a second ultraviolet radiation intensity within the second spectral band,
provide, at a third processing station of the processing stations, a third wafer support temperature as well as ultraviolet radiation within a third spectral band and having a third ultraviolet radiation intensity within the third spectral band, and
provide, at a fourth processing station of the processing stations, a fourth wafer support temperature as well as ultraviolet radiation within a fourth spectral band and having a fourth ultraviolet radiation intensity within the fourth spectral band, wherein:
the first wafer support temperature is higher than the second, third, and fourth wafer support temperatures,
the first ultraviolet radiation intensity is lower than the second, third, and fourth ultraviolet radiation intensities, and
the first spectral band is different from the second, third, and fourth spectral bands.

10. The chamber of claim 9 , wherein:
the first wafer support temperature is approximately 415° C.,
the second, third, and fourth wafer support temperatures are selected from the group consisting of: approximately 350° C. and approximately 375° C.,
the first spectral band has wavelengths of between 250 nm and 270 nm,
the second, third, and fourth spectral bands have wavelengths of between 220 nm and 250 nm,
the first ultraviolet radiation intensity is approximately 35% of the second, third, and fourth ultraviolet radiation intensities.

11. The chamber of claim 10 , wherein the second, third, and fourth ultraviolet radiation intensities are between 200 mW/cm 2 and 400 mW/cm 2 .

12. The chamber of claim 10 , wherein the chamber is further configured to:
flow purge gas across a wafer in the first processing station at a first flow rate,
flow the purge gas across a wafer in the second processing station at a second flow rate,
flow the purge gas across a wafer in the third processing station at a third flow rate,
flow the purge gas across a wafer in the fourth processing station at a fourth flow rate, and
the first and second flow rates are higher than the third and fourth flow rates.

13. The chamber of claim 12 , wherein:
the first and second flow rates are between 15 and 25 standard liters per minute, and
the third and fourth flow rates are between 5 and 15 standard liters per minute.

14. The chamber of claim 12 , wherein the purge gas is selected from the group consisting of: helium, argon, and a mixture of helium and argon at ratio of 1:2.

15. The chamber of claim 1 , wherein:
the chamber has at least four processing stations, and
the chamber is configured to:
provide, at a first processing station of the processing stations, ultraviolet radiation within a first spectral band and having a first ultraviolet radiation intensity within the first spectral band,
provide, at a second processing station of the processing stations, ultraviolet radiation within a second spectral band and having a second ultraviolet radiation intensity within the second spectral band,
provide, at a third processing station of the processing stations, ultraviolet radiation within a third spectral band and having a third ultraviolet radiation intensity within the third spectral band, and
provide, at a fourth processing station of the processing stations, ultraviolet radiation within a fourth spectral band and having a fourth ultraviolet radiation intensity within the fourth spectral band, wherein:
the first ultraviolet radiation intensity is lower than the second, third, and fourth ultraviolet radiation intensities, and
the first spectral band is different from the second, third, and fourth spectral bands.

16. The chamber of claim 15 , wherein:
the first ultraviolet radiation intensity is approximately 70% of the second, third, and fourth ultraviolet radiation intensities,
the first spectral band is between 300 nm and 400 nm, and
the second, third, and fourth spectral bands are between 220 nm and 250 nm.

17. The chamber of claim 16 , wherein the chamber is further configured to:
flow purge gas across a wafer in the first processing station at a first flow rate,
flow the purge gas across a wafer in the second processing station at a second flow rate,
flow the purge gas across a wafer in the third processing station at a third flow rate,
flow the purge gas across a wafer in the fourth processing station at a fourth flow rate, and
the first and second flow rates are higher than the third and fourth flow rates.

18. The chamber of claim 17 , wherein:
the first and second flow rates are betw

Assignees

• Novellus Systems Inc

Inventors

• Haverkamp Jason Dirk
• Hausmann Dennis M
• Mclaughlin Kevin M
• Shrinivasan Krishnan
• Rivkin Michael
• Smargiassi Eugene
• Sabri Mohamed

Classifications

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title