Grouping features of showerheads in substrate processing systems
US-12539569-B2 · Feb 3, 2026 · US
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Smargiassi Eugene patents
Smargiassi Eugene is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Smargiassi Eugene |
| Total patents | 15 |
| First publication | Mar 17, 2015 |
| Latest publication | Feb 3, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Grouping features of showerheads in substrate processing systems
US-2023166371-A1 · Jun 1, 2023 · US
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
US-11177131-B2 · Nov 16, 2021 · US
Clean resistant windows for ultraviolet thermal processing
US-10240236-B2 · Mar 26, 2019 · US
Purging of porogen from UV cure chamber
US-10121682-B2 · Nov 6, 2018 · US
Method and apparatuses for reducing porogen accumulation from a uv-cure chamber
US-2018315604-A1 · Nov 1, 2018 · US
Method for reducing porogen accumulation from a UV-cure chamber
US-10020197-B2 · Jul 10, 2018 · US
Multi-station sequential curing of dielectric films
US-9873946-B2 · Jan 23, 2018 · US
Purging of porogen from uv cure chamber
US-2016284574-A1 · Sep 29, 2016 · US
Clean resistant windows for ultraviolet thermal processing
US-2016258057-A1 · Sep 8, 2016 · US
Recent patents
Latest publications not already listed above.
Purging of porogen from UV cure chamber
US-9384959-B2 · Jul 5, 2016 · US
Method and apparatuses for reducing porogen accumulation from a uv-cure chamber
US-2015255285-A1 · Sep 10, 2015 · US
Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
US-9073100-B2 · Jul 7, 2015 · US
Multi-station sequential curing of dielectric films
US-2015114292-A1 · Apr 30, 2015 · US
Multi-station sequential curing of dielectric films
US-8980769-B1 · Mar 17, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Novellus Systems Inc | 11 |
| Lam Res Corp | 4 |
| Haverkamp Jason | 1 |
| Hausmann Dennis | 1 |
| Mclaughlin Kevin | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0436 | 13 |
| H10P14/6538 | 11 |
| H10P14/665 | 11 |
| H10P72/0402 | 8 |
| H10P70/00 | 8 |