Apparatus for treating an exhaust gas in a foreline

Patent metadata

Field	Value
Publication number	US-9867238-B2
Application number	US-201313860572-A
Country	US
Kind code	B2
Filing date	Apr 11, 2013
Priority date	Apr 26, 2012
Publication date	Jan 9, 2018
Grant date	Jan 9, 2018

Abstract

In some embodiments an apparatus for treating an exhaust gas in a foreline of a substrate processing system may include a dielectric tube configured to be coupled to the foreline of the substrate processing system to allow a flow of exhaust gases from the foreline through the dielectric tube; an RF coil wound about an outer surface of the dielectric tube, the RF coil having a first end to provide an RF input to the RF coil, the first end of the RF coil disposed proximate a first end of the dielectric tube and a second end disposed proximate a second end of the dielectric tube; a tap coupled to the RF coil to provide an RF return path, the tap disposed between the first end of the dielectric tube and a central portion of the dielectric tube.

First claim

The invention claimed is:

1. An apparatus for treating an exhaust gas in a foreline of a substrate processing system, comprising:
a dielectric tube configured to be coupled to the foreline of the substrate processing system to allow a flow of exhaust gases from the foreline through the dielectric tube;
an RF coil wound about an outer surface of the dielectric tube, the RF coil having a first end to provide an RF input to the RF coil, the first end of the RF coil disposed proximate a first end of the dielectric tube and a second end disposed proximate a second end of the dielectric tube; and
a tap coupled to the RF coil to provide an RF return path, the tap disposed between the first end of the dielectric tube and a central portion of the dielectric tube.

2. The apparatus of claim 1 , further comprising:
an RF power source coupled to a first end of the RF coil to provide RF power to the RF coil.

3. The apparatus of claim 2 , further comprising:
a first capacitor coupled to the RF power source and disposed between the RF power source and the first end of the RF coil.

4. The apparatus of claim 2 , further comprising:
a second capacitor coupled to the RF power source and disposed between the RF power source and the RF return path.

5. The apparatus of claim 1 , wherein the dielectric tube is fabricated from alumina.

6. The apparatus of claim 1 , wherein the tap is coupled to the RF coil within about five turns of the first end of the RF coil.

7. The apparatus of claim 1 , wherein the dielectric tube comprises:
a first outwardly extending flange disposed on the first end of the dielectric tube; and
a second outwardly extending flange disposed on the second end of the dielectric tube, wherein each of the first outwardly extending flange and second outwardly extending flange couple the dielectric tube to the foreline.

8. The apparatus of claim 7 , wherein each of the first outwardly extending flange and second outwardly extending flange comprise a plurality of channels to allow a flow of heat transfer fluid through each of the first outwardly extending flange and second outwardly extending flange.

9. The apparatus of claim 1 , wherein the dielectric tube has a length of about 6 to about 15 inches.

10. The apparatus of claim 1 , wherein the RF coil has a length of about 5 to about 15 turns.

11. The apparatus of claim 1 , wherein the RF coil has a diameter of about 1.5 to about 4 inches.

12. The apparatus of claim 1 , wherein a distance between turns of the RF coil is about 0.25 to about 0.75 inches.

13. The apparatus of claim 1 , further comprising:
a second tap coupled to a different position on the RF coil than the tap, wherein the second tap is disposed between the second end of the dielectric tube and the tap.

Assignees

• Applied Materials Inc

Inventors

• Cox Michael S
• Dickinson Colin John

Classifications

• Y02C20/30

  of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6] · CPC title

• H05H1/46

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title

• H05B6/36 Primary

  Coil arrangements · CPC title

• H01J37/32844 Primary

  Treating effluent gases · CPC title

• H01J37/32834 Primary

  Exhausting · CPC title