Solution precursor plasma spray of ceramic coating for semiconductor chamber applications
US-2017291856-A1 · Oct 12, 2017 · US
US9862648B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9862648-B2 |
| Application number | US-201515301597-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 3, 2015 |
| Priority date | Apr 4, 2014 |
| Publication date | Jan 9, 2018 |
| Grant date | Jan 9, 2018 |
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A method for producing a metal fluoride ceramic, comprising: providing a sedimented compound comprising metal fluoride particles having an average particle size lower than 30 nm and a solvent, partially drying the sedimented compound at a temperature lower than 65° C. until the partially dried compound comprises from 5 wt % to 45 wt % of the solvent, and sintering, for example in air, the partially dried and sedimented compound.
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The invention claimed is: 1. A method for producing a metal fluoride ceramic, comprising: providing a sedimented compound comprising metal fluoride particles having an average particle size lower than 30 nm and a solvent; partially drying the sedimented compound at a temperature lower than 65° C. until the partially dried compound comprises from 5 wt % to 45 wt % of the solvent; and sintering the partially dried and sedimented compound. 2. The method according to claim 1 , wherein providing a sedimented compound comprises: centrifuging the metal fluoride particles in the solvent, and removing the supernate. 3. The method according to claim 1 , wherein the sintering is performed under air and under atmospheric pressure. 4. The method according to claim 1 , wherein the sedimented compound comprises about 60 wt % of solvent or less. 5. The method according to claim 1 , wherein the metal fluoride particles have a standard deviation of the particle size lower than 25 nm. 6. The method according to claim 1 , wherein the metal fluoride particles are selected from the group comprising MF2, AMF3, ABF4 and AB3F10, and a solid solution MF2-M′F2, wherein A is an alkali metal, B is a rare earth metal and M and M′ are an alkaline earth metal. 7. The method according to claim 6 , wherein A is selected from the group consisting of potassium, sodium, cesium and rubidium, B is selected from the group consisting of yttrium and lanthanides, and M and M′ are selected from the group comprising calcium, magnesium, barium and strontium. 8. The method according to claim 7 , wherein M is calcium. 9. The method according to claim 1 , wherein the metal fluoride particles further comprise at least one dopant. 10. The method according to claim 9 , wherein the dopant is selected from the group consisting of transition metals and rare earth metals. 11. The method according to claim 1 , wherein the metal fluoride particles are ytterbium (III) doped calcium fluoride particles. 12. The method according claim 1 , wherein the sintering is performed at a temperature ranging between 500° C. to 750° C. 13. The method according to claim 1 , wherein providing a sedimented compound comprises: providing a mixture of a solvent and of metal fluoride particles, and centrifuging the mixture for about 40 min or more, and removing the supernate.
Nanograined materials, i.e. having grain sizes below 100 nm · CPC title
High energy or reactive ball milling · CPC title
characterised by their solids loadings, i.e. the percentage of solids · CPC title
Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide · CPC title
Pressureless sintering · CPC title
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