Solution precursor plasma spray of ceramic coating for semiconductor chamber applications
US-2017291856-A1 · Oct 12, 2017 · US
US2016326062A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2016326062-A1 |
| Application number | US-201615216536-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jul 21, 2016 |
| Priority date | Jan 22, 2014 |
| Publication date | Nov 10, 2016 |
| Grant date | — |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
There are provided a method for manufacturing a magnesium fluoride sintered compact to be free from cracks and chipping and to have high relative density, a method for manufacturing a neutron moderator, and the neutron moderator. The method for manufacturing a magnesium fluoride sintered compact includes a powder filling process for filling a magnesium fluoride powder material into a die by tapping, and an intermediate body sintering (pulsed electric current sintering) process for performing pulsed electric current sintering for sintering the filled magnesium fluoride powder material while applying a pulsed electric current thereto, to obtain a magnesium fluoride sintered compact (intermediate body).
Opening claim text (preview).
What is claimed is: 1 . A method for manufacturing a magnesium fluoride sintered compact, the method comprising: filling a magnesium fluoride powder material into a die by tapping; and performing pulsed electric current sintering for sintering the filled magnesium fluoride powder material while applying a pulsed electric current thereto, to obtain a magnesium fluoride sintered compact. 2 . The method for manufacturing a magnesium fluoride sintered compact according to claim 1 , wherein, in the powder filling, the magnesium fluoride powder material is a high-purity material having a purity of 99 percent by mass or higher, and the rest thereof contains inevitable impurities. 3 . A method for manufacturing a neutron moderator, the method comprising: preparing a plurality of disc-shaped magnesium fluoride sintered compacts manufactured by the method for manufacturing a magnesium fluoride sintered compact according to claim 1 ; and layering and joining the disc-shaped magnesium fluoride sintered compacts to manufacture a neutron moderator. 4 . The method for manufacturing a neutron moderator according to claim 3 , wherein in the layering and joining, when the disc-shaped magnesium fluoride sintered compacts are used as intermediate bodies, at least one second intermediate layered body is layered, the second intermediate layered body being obtained by further drilling the intermediate bodies. 5 . The method for manufacturing a neutron moderator according to claim 4 , wherein in the layering and joining, when the disc-shaped magnesium fluoride sintered compacts are used as intermediate bodies, at least one third intermediate layered body is layered, the third intermediate layered body being obtained by tapering an outer periphery of the intermediate bodies. 6 . The method for manufacturing a neutron moderator according to claim 5 , wherein in the layering and joining, a neutron moderator is manufactured by layering a first intermediate layered body in which the intermediate bodies are layered, the second intermediate layered body, and the third intermediate layered body. 7 . A neutron moderator that moderates neutrons, the neutron moderator comprising an intermediate layered body in which a plurality of disc-shaped magnesium fluoride sintered compacts are layered.
Antineoplastic agents · CPC title
Pressure sintering · CPC title
Magnesium oxides or oxide-forming salts thereof · CPC title
Neutrons · CPC title
Layered products essentially comprising ceramics, e.g. refractory products · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.