Thermal spray material, thermal spray coating and thermal spray coated article

Patent metadata

Field	Value
Publication number	US-2016326058-A1
Application number	US-201615142181-A
Country	US
Kind code	A1
Filing date	Apr 29, 2016
Priority date	May 8, 2015
Publication date	Nov 10, 2016
Grant date	—

Abstract

This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O—X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.

First claim

What is claimed is:

1 . A thermal spray comprising:
a rare earth element oxyhalide (RE-O—X) comprising a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents, the rare earth element oxyhalide having a molar ratio (X/RE) of the halogen to the rare earth element molar ratio of 1.1 or greater.

2 . The thermal spray material of claim 1 , wherein the molar ratio (X/RE) of the halogen to the rare earth element is 1.3 or greater, but 1.39 or less.

3 . The thermal spray material of claim 1 , further comprising:
a rare earth element halide, with the rare earth element halide accounting for 23% or more of the total mass.

4 . The thermal spray material of claim 1 essentially free of a rare earth element halide.

5 . The thermal spray material of claim 1 essentially free of a rare earth element oxide

6 . The thermal spray material of claim 1 , wherein the rare earth element is yttrium, the halogen is fluorine, and the rare earth element oxyhalide is an yttrium oxyfluoride.

7 . A thermal spray coating that is a thermal spray deposit of the thermal spray material of claim 1 .

8 . A thermal spray coating comprising:
a rare earth element oxyhalide (RE-O—X) comprising a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents, the rare earth element oxyhalide having a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.

9 . The thermal spray coating of claim 8 essentially free of the rare earth element oxide.

10 . The thermal spray coating of claim 8 , wherein the rare earth element is yttrium, the halogen is fluorine, and the rare earth element oxyhalide is an yttrium oxyfluoride.

11 . A thermal sprayed article having a substrate surface provided with the thermal spray coating of claim 7 .

12 . A thermal sprayed article having a substrate surface provided with the thermal spray coating of claim 8 .

Assignees

• Tokyo Electron Ltd
• Fujimi Inc

Inventors

• Nagayama Nobuyuki
• Ibe Hiroyuki
• Tsuzuki Kazuyuki

Classifications

• C01F17/265

  Fluorides · CPC title

• C04B2235/445

  Fluoride containing anions, e.g. fluosilicate · CPC title

• C04B35/505 Primary

  based on yttrium oxide · CPC title

• C04B35/50

  based on rare-earth compounds {(non-oxide rare earth compounds C04B35/5156)} · CPC title

• C04B35/553

  based on fluorides · CPC title