Beam reverser module and optical power amplifier having such a beam reverser module

Patent metadata

Field	Value
Publication number	US-9843153-B2
Application number	US-201514816217-A
Country	US
Kind code	B2
Filing date	Aug 3, 2015
Priority date	Feb 8, 2013
Publication date	Dec 12, 2017
Grant date	Dec 12, 2017

Abstract

A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.

First claim

The invention claimed is:

1. A module, comprising:
a mirror comprising a highly reflective surface configured to: a) receive a laser beam propagating in a first direction; and b) reflect the laser beam into a second direction different from the first direction; and
a first beam deflecting element downstream of the highly reflective surface along a path of the laser beam,
wherein:
the first beam deflecting element is configured to deflect the laser beam into a third direction which is different from the first and the second directions so that the laser beam deflected at the first beam deflecting element intersects the laser beam propagating in the first direction;
the module is configured so that the laser beam exits the module while propagating along the third direction;
the first beam deflecting element is transmissive to the laser beam;
the first beam deflecting element comprises a prism; and
the module is a beam reverser module.

2. The module of claim 1 , wherein:
the first beam deflecting element comprises an entrance surface and an exit surface; and
the first beam deflecting element is configured so that, during use of the module, the laser beam propagates through the first beam deflecting element from the entrance surface of the first beam deflecting element to the exit surface of the first beam deflecting element without total internal reflection.

3. The module of claim 2 , wherein at least one surface selected from the group consisting of the entrance surface of the first beam deflecting element and the exit surface of the first beam deflecting element comprises a high laser durability anti-reflective coating.

4. A module, comprising:
a mirror comprising a highly reflective surface configured to: a) receive a laser beam propagating in a first direction; and b) reflect the laser beam into a second direction different from the first direction;
a first beam deflecting element downstream of the highly reflective surface along a path of the laser beam; and
a second beam deflecting element upstream of the highly reflective coating along the path of the laser beam,
wherein:
the first beam deflecting element is configured to deflect the laser beam into a third direction which is different from the first and the second directions so that the laser beam deflected at the first beam deflecting element intersects the laser beam propagating in the first direction;
the module is configured so that the laser beam exits the module while propagating along the third direction;
the first beam deflecting element is transmissive to the laser beam; and
the module is a beam reverser module.

5. The module of claim 4 , wherein:
the second beam deflecting element comprises an entrance surface and an exit surface; and
the second beam deflecting element is configured so that, during use of the module, the laser beam propagates through the second beam deflecting element from the entrance surface of the second beam deflecting element to the exit surface of the second beam deflecting element without total internal reflection.

6. The module of claim 5 , wherein at least one surface selected from the group consisting of the entrance surface of the second beam deflecting element and the exit surface of the second beam deflecting element comprises an anti-reflective coating.

7. The module of claim 4 , wherein the second beam deflecting element comprises a prism.

8. The module of claim 4 , wherein the first and second beam deflecting elements comprise a single monolithic optical element.

9. The module of claim 4 , wherein the first and second beam deflecting elements comprise a single monolithic prism.

10. The module of claim 4 , further comprising a purge device configured to directly purge at least one of the optical elements of the module with a purge rate that varies over a surface of the optical element in accordance with a position of the laser beam on or in the optical element, wherein the purge device is configured to purge the first total internal reflection surface.

11. A module, comprising:
a mirror comprising a highly reflective surface configured to: a) receive a laser beam propagating in a first direction; and b) reflect the laser beam into a second direction different from the first direction; and
a purge device configured to directly purge at least one of the optical elements of the module with a purge rate that varies over a surface of the optical element in accordance with a position of the laser beam on or in the optical element.

12. An amplifier, comprising:
a beam reverser module;
a power amplifier chamber; and
an optical unit,
wherein:
the power amplifier comprises an active medium for a laser beam;
the beam reverser comprises a mirror comprising a highly reflective surface configured to: a) receive the laser beam from the power amplifier propagating in a first direction; and b) reflect the laser beam into a second direction different from the first direction so that laser beam returns to the power amplifier;
during use of the amplifier, the optical unit expands the laser beam and outcouples the laser beam; and
the amplifier is an optical amplifier.

13. The module of claim 1 , wherein, during use of the module, the laser beam propagates through the first beam deflecting element without total internal reflection.

14. The module of claim 8 , wherein the second beam deflecting element is transmissive to the laser beam.

15. The amplifier of claim 12 , wherein, during use of the module, the laser beam propagates through the first beam deflecting element without total internal reflection.

16. The amplifier of claim 12 , wherein:
the first beam deflecting element comprises an entrance surface and an exit surface; and
the first beam deflecting element is configured so that, during use of the amplifier, the laser beam propagates through the first beam deflecting element from the entrance surface of the first beam deflecting element to the exit surface of the first beam deflecting element without total internal reflection.

17. The amplifier of claim 16 , wherein at least one surface selected from the group consisting of the entrance surface of the first beam deflecting element and the exit surface of the first beam deflecting element comprises a high laser durability anti-reflective coating.

18. The amplifier of claim 12 , wherein the first beam deflecting element comprises a prism.

19. The amplifier of claim 12 , further comprising a second beam deflecting element upstream of the highly reflective coating along the path of the laser beam.

20. The amplifier of claim 19 , wherein:
the second beam deflecting element comprises an entrance surface and an exit surface; and
the second beam deflecting element is configured so that, during use of the amplifier, the laser beam propagates through the second beam deflecting element from the entrance surface of the second beam deflecting element to the exit surface of the second beam deflecting element without total internal reflection.

21. The amplifier of claim 20 , wherein at least one surface selected from the group consisting of the entrance surface of the second beam deflecting element and the exit surface of the second beam deflecting element comprises an anti-reflective coating.

22. The amplifier of claim 19 , wherein the second beam deflecting element comprises a prism.

23. The amplifier of claim 19 , wherein the first and second beam deflecting elements comprise a single mono

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Schall Michael
• Kraus Johannes
• Muenz Holger
• Schuster Ingrid
• Anderl Willi
• Weber Ulrich
• Bauer Markus
• Erxmeyer Jeffrey
• Maire Michel Le

Classifications

• G02B5/08

  Mirrors {(vehicle mirrors involving special optical features B60R1/08)} · CPC title

• H01S3/0071 Primary

  Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title

• H01S3/2251

  ArF, i.e. argon fluoride is comprised for lasing around 193 nm · CPC title

• H01S3/2256

  KrF, i.e. krypton fluoride is comprised for lasing around 248 nm · CPC title

• H01S3/10023

  by functional association of additional optical elements, e.g. filters, gratings, reflectors · CPC title