Field facet system and lithography apparatus
US-12547080-B2 · Feb 10, 2026 · US
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Anderl Willi patents
Anderl Willi is listed as an inventor on 18 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Anderl Willi |
| Total patents | 18 |
| First publication | Nov 26, 2015 |
| Latest publication | Feb 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Field facet system and lithography apparatus
US-12353137-B2 · Jul 8, 2025 · US
Field facet system and lithography apparatus
US-2023384686-A1 · Nov 30, 2023 · US
Field facet system and lithography apparatus
US-2023384685-A1 · Nov 30, 2023 · US
Facet mirror for an illumination optical unit of a projection exposure apparatus
US-11789367-B2 · Oct 17, 2023 · US
Facet mirror for an illumination optical unit of a projection exposure apparatus
US-2022206398-A1 · Jun 30, 2022 · US
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
US-11372334-B2 · Jun 28, 2022 · US
Projection lighting system for semiconductor lithography with an improved heat transfer
US-10969699-B2 · Apr 6, 2021 · US
Beam reverser module and optical power amplifier having such a beam reverser module
US-10777958-B2 · Sep 15, 2020 · US
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
US-2020096874-A1 · Mar 26, 2020 · US
Recent patents
Latest publications not already listed above.
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
US-10534269-B2 · Jan 14, 2020 · US
Projection lighting system for semiconductor lithography with an improved heat transfer
US-2019384187-A1 · Dec 19, 2019 · US
Cooler for use in a device in a vacuum
US-10303067-B2 · May 28, 2019 · US
Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module
US-2018102620-A1 · Apr 12, 2018 · US
Beam reverser module and optical power amplifier having such a beam reverser module
US-9843153-B2 · Dec 12, 2017 · US
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
US-2017315453-A1 · Nov 2, 2017 · US
Cooler for use in a device in a vacuum
US-2016299443-A1 · Oct 13, 2016 · US
Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module
US-2015340829-A1 · Nov 26, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 18 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G02B7/1815 | 8 |
| G03F7/70075 | 8 |
| G02B5/0891 | 6 |
| G03F7/70116 | 6 |
| G03F7/70891 | 6 |