Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target
US-9072153-B2 · Jun 30, 2015 · US
System and method for generating extreme ultraviolet light
US9265136B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9265136-B2 |
| Application number | US-201213572484-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 10, 2012 |
| Priority date | Feb 19, 2010 |
| Publication date | Feb 16, 2016 |
| Grant date | Feb 16, 2016 |
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- Title
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Abstract
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A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.
First claim
Opening claim text (preview).
What is claimed is: 1. A system comprising: a laser beam apparatus configured to generate a laser beam; and a target supply unit configured to supply a target material to be irradiated with the laser beam for generating extreme ultraviolet light, wherein the laser beam apparatus is configured to: generate a first pre-pulse laser beam with which the target material is irradiated, the first pre-pulse laser beam having a pulse duration of less than 1 ns, so as to make the targe…
Assignees
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Classifications
Electricity · mapped topic
- H05G2/0088Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9265136B2 cover?
- A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for genera…
- Who is the assignee on this patent?
- Hori Tsukasa, Kakizaki Kouji, Yanagida Tatsuya, and 3 more
- What technology area does this patent fall under?
- Primary CPC classification H05G2/0088. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 16 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).