Apparatus and process for producing a single crystal of silicon

Patent metadata

Field	Value
Publication number	US-9828692-B2
Application number	US-201514670477-A
Country	US
Kind code	B2
Filing date	Mar 27, 2015
Priority date	Apr 14, 2014
Publication date	Nov 28, 2017
Grant date	Nov 28, 2017

Abstract

An apparatus for producing a single crystal of silicon comprises a plate with a top side, an outer edge, and an inner edge, a central opening adjoining the inner edge, and a tube extending from the central opening to beneath the bottom side of the plate;
a device for metering granular silicon onto the plate; a first induction heating coil above the plate, provided for melting of the granular silicon deposited; a second induction heating coil positioned beneath the plate, provided for stabilization of a melt of silicon, the melt being present upon a growing single crystal of silicon. The top side of the plate consists of ceramic material and has elevations, the distance between the elevations in a radial direction being not less than 2 mm and not more than 15 mm.

First claim

What is claimed is:

1. A process for producing a single crystal of silicon, comprising:
providing an apparatus comprising: a plate having an outer edge, an inner edge, and a top side, a central opening adjoining the inner edge, and a tube which extends from the central opening to beneath a bottom side of the plate; a device for depositing granular silicon onto the top side of the plate; a first induction heating coil which is arranged above the plate configured to melt the granular silicon deposited; a second induction heating coil which positioned beneath the plate, configured to stabilize a melt of silicon present upon a growing single crystal of silicon, wherein the top side of the plate consists of ceramic material and has a plurality of elevations rising above a surface of the plate, the distance between the middles of adjacent elevations in a radial direction being not less than 2 mm and not more than 15 mm;
providing a growing single crystal of silicon by crystallizing liquid silicon on a seed crystal; and
depositing granular silicon on the top side of the plate proximate the outer edge of the top side, while rotating the plate;
melting the granular silicon and passing the molten silicon over the elevations through the central opening in the plate and through the tube until the molten silicon joins the melt upon the growing single crystal of silicon.

2. A process for producing a single crystal of silicon, as claimed in claim 1 , wherein:
the ceramic material is selected from the group consisting of alumina, boron nitride, lanthanum hexaboride, silicon carbide, silicon nitride, tantalum oxide, yttria, zirconia, quartz, and mixtures thereof.

3. A process for producing a single crystal of silicon, as claimed in claim 1 , wherein:
the elevations are arranged concentrically about the central opening.

4. A process for producing a single crystal of silicon, as claimed in claim 1 , wherein:
the outer edge of the top side of the plate is surrounded by a wall.

5. The process of claim 1 , wherein the plurality of elevations is in the form of a spiral.

6. The process of claim 1 , wherein the plurality of elevations is in the form of concentric circles.

7. The process of claim 1 , wherein closed valleys are located between successive elevations.

8. The process of claim 1 , wherein valleys located between adjacent elevations exhibit a downward gradient between valleys located more close to the central opening relative to valleys located further away from the central opening.

9. The process of claim 8 , wherein the gradient has an angle of from 1° to 15° from horizontal.

10. The process of claim 1 , wherein valleys are located between adjacent elevations, with a height from the bottom of a valley to the highest point of an elevation bounding the valley is from 0.1 mm to 5 mm.

11. The process of claim 1 , wherein valleys are located between adjacent elevations, with a height from the bottom of a valley to the highest point of an elevation bounding the valley is from 0.5 mm to 3 mm.

12. The process of claim 1 , wherein the elevations and valleys are present on an inner surface of the tube.

Assignees

• Siltronic Ag

Inventors

• Brenninger Georg
• Stein Waldemar
• Haeberlen Maik

Classifications

• C30B13/14

  Crucibles or vessels · CPC title

• C30B11/001

  Continuous growth · CPC title

• C30B15/12

  Double crucible methods · CPC title

• C30B11/003

  Heating or cooling of the melt or the crystallised material · CPC title

• C30B29/06

  Silicon · CPC title