Apparatus and methods for reducing particles in semiconductor process chambers

Patent metadata

Field	Value
Publication number	US-9761416-B2
Application number	US-201414200077-A
Country	US
Kind code	B2
Filing date	Mar 7, 2014
Priority date	Mar 15, 2013
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

Embodiments of the present disclosure generally provide various apparatus and methods for reducing particles in a semiconductor processing chamber. One embodiment of present disclosure provides a vacuum screen assembly disposed over a vacuum port to prevent particles generated by the vacuum pump from entering substrate processing regions. Another embodiment of the present disclosure provides a perforated chamber liner around a processing region of the substrate. Another embodiment of the present disclosure provides a gas distributing chamber liner for distributing a cleaning gas around the substrate support under the substrate supporting surface.

First claim

The invention claimed is:

1. A vacuum screen assembly configured to be disposed between a processing chamber and a vacuum pump connected to the processing chamber, the vacuum screen assembly comprising:
a first planar disk having a first plurality of through holes formed therethrough and two or more receiving openings on a side of the first planar disk facing the vacuum pump;
a second planar disk stacked under the side of the first planar disk and facing the vacuum pump, wherein the second planar disk has a second plurality of through holes formed therethrough and two or more protrusions on a side of the second planar disk facing the first planar disk, wherein each of the two or more protrusions mates with one of the two or more receiving openings of the first planar disk, and wherein each of the first plurality of through holes at least partially align with a respective one of a second plurality of through holes and is tilted at an opposite direction from the respective one of the second plurality of through holes to form chevron shaped flow paths which reduce a line of sight from the processing chamber to the vacuum pump.

2. The vacuum screen assembly of claim 1 , further comprising:
a third planar disk; and
a fourth planar disk stacked under the third planar disk, wherein a plurality of chevron shaped flow paths are formed through the third planar disk and the fourth planar disk, and the first and second planar disks are stacked over the third and fourth planar disks and closer to the processing chamber to form a plurality of zigzagging flow paths, wherein the zigzagging flow paths comprise the chevron shaped flow paths through the first and second planar disks aligned with the chevron shaped flow paths through the third and fourth planar disks.

Assignees

• Applied Materials Inc

Inventors

• Nguyen Andrew
• Howard Bradley
• Rauf Shahid
• Balakrishna Ajit
• Cho Tom K
• Collins Kenneth S
• Kumar Anand
• Willwerth Michael D
• Sarode Vishwanath Yogananda

Classifications

• H01J37/32871

  Means for trapping or directing unwanted particles · CPC title

• H01J37/32477

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title

• H01J37/32449

  Gas control, e.g. control of the gas flow · CPC title

• B32B1/08

  Tubular products · CPC title

• B29C66/71

  characterised by the composition of the plastics material of the parts to be joined (welding bar compositions B29C65/125) · CPC title