High-speed hotspot or defect imaging with a charged particle beam system

Patent metadata

Field	Value
Publication number	US-9754761-B2
Application number	US-201615162249-A
Country	US
Kind code	B2
Filing date	May 23, 2016
Priority date	May 26, 2015
Publication date	Sep 5, 2017
Grant date	Sep 5, 2017

Abstract

An inspection tool includes a controller that is configured to generate a scan pattern for an electron beam to image areas of interest on the wafer. The scan pattern minimizes dwell time of the electron beam on the surface of the wafer between the areas of interest. At least one stage speed and at least one raster pattern can be selected based on the areas of interest. The controller sends instructions to electron beam optics to direct the electron beam at the areas of interest on the surface of the wafer using the scan pattern.

First claim

What is claimed is:

1. An inspection tool comprising:
an electron beam generator unit configured to generate an electron beam;
a stage configured to clamp a wafer;
at least one actuator configured to move the stage;
electron beam optics configured to direct the electron beam at a surface of the wafer;
a detector configured to detect electrons from the electron beam; and
a controller in electronic communication with at least the electron beam optics and the actuator, wherein the controller is configured to:
receive instructions including at least two areas of interest in a swath of the wafer to be scanned by the electron beam;
generate a scan pattern for the electron beam to image the areas of interest on the wafer, wherein the scan pattern minimizes dwell time of the electron beam on the surface of the wafer between the areas of interest, and wherein the controller selects at least one stage speed and at least one raster pattern based on the areas of interest in the swath; and
send instructions to the electron beam optics to direct the electron beam at the areas on the surface of the wafer using the scan pattern.

2. The inspection tool of claim 1 , wherein the electron beam optics are configured to scan the electron beam across the surface of the wafer in two perpendicular directions.

3. The inspection tool of claim 1 , wherein the stage is configured to move in two perpendicular directions.

4. The inspection tool of claim 1 , wherein the controller is configured to send instructions to move the stage while the electron beam optics scans the electron beam.

5. The inspection tool of claim 1 , wherein the controller is further configured to use a reference point on the wafer to generate the scan pattern for the wafer.

6. The inspection tool of claim 1 , wherein the controller is further configured to generate the scan pattern to capture the areas of interest while minimizing inspection time.

7. A method comprising:
generating a scan pattern for an electron beam to image at least two areas of interest in a swath of a wafer, wherein the scan pattern minimizes dwell time of the electron beam on the surface of the wafer between the areas of interest, and wherein at least one stage speed and at least one raster pattern are selected for the scan pattern based on the areas of interest in the swath; and
directing the electron beam over the surface of the wafer using the scan pattern.

8. The method of claim 7 , further comprising moving a stage clamping the wafer.

9. The method of claim 8 , wherein the moving is configured to be in two perpendicular directions.

10. The method of claim 8 , wherein the moving and the directing are sequential.

11. The method of claim 8 , wherein the moving and the directing are simultaneous.

12. The method of claim 8 , wherein the moving is at a constant speed during the directing.

13. The method of claim 8 , wherein the wafer further comprises at least one area of interest in a different swath, and wherein the scanning occurs in the different swath of the wafer during the moving.

14. The method of claim 8 , wherein the moving and the directing are not at normal angles with respect to each other.

15. The method of claim 14 , wherein the moving and the directing are at a 45° angle with respect to each other.

16. The method of claim 7 , wherein the directing is configured to be in two perpendicular directions.

17. The method of claim 7 , wherein the directing includes only partially directing the electron beam over one of the areas of interest and further comprising completing the directing of the electron beam over the area of interest after directing the electron beam over another of the areas of interest.

18. The method of claim 7 , wherein the generating further comprises capturing the areas of interest while minimizing inspection time.

Assignees

• Kla Tencor Corp

Inventors

• Xiao Hong
• Maher Christopher

Classifications

• H01J2237/2817

  Pattern inspection · CPC title

• H01J2237/12

  electrostatic · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title