Locally heated multi-zone substrate support

Patent metadata

Field	Value
Publication number	US-9735037-B2
Application number	US-201615295375-A
Country	US
Kind code	B2
Filing date	Oct 17, 2016
Priority date	Aug 6, 2013
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

Embodiments of the present disclosure provide an electrostatic chuck (ESC) having azimuthal temperature control. In one embodiment, the electrostatic chuck includes an insulating base, a dielectric layer disposed on the insulating base, the dielectric layer having a substrate supporting surface, a plurality of heating elements coupled to the insulating base, and a first set of electrodes and a second set of electrodes, wherein the plurality of heating elements are surrounded by the first set of electrodes and the second set of electrodes.

First claim

What is claimed is:

1. An electrostatic chuck, comprising:
an insulating base;
a dielectric layer disposed on the insulating base, the dielectric layer having a substrate supporting surface;
a plurality of heating elements coupled to the insulating base; and
a first set of electrodes positioned in a first plane and a second set of electrodes positioned in a second plane, wherein the first plane and the second plane are parallel to each other, and the plurality of heating elements are surrounded by the first set of electrodes and the second set of electrodes.

2. The electrostatic chuck of claim 1 , wherein the plurality of heating elements are extended in a direction that is perpendicular to the first set of electrodes and the second set of electrodes.

3. The electrostatic chuck of claim 1 , wherein the first set of electrodes and the second set of electrodes are intervening to each other.

4. The electrostatic chuck of claim 3 , wherein the plurality of heating elements are arranged in the form of a finger like.

5. The electrostatic chuck of claim 1 , wherein the first set of electrodes is positioned coplanar with the second set of electrodes.

6. The electrostatic chuck of claim 1 , wherein the first set of electrodes and the second set of electrodes are alternatingly arranged about a central axis of the electrostatic chuck.

7. The electrostatic chuck of claim 1 , wherein the first set of electrodes and the second set of electrodes are coupled to a DC power source, an AC power source, or an RF power source.

8. The electrostatic chuck of claim 1 , wherein each of the first set of electrodes and the second set of electrodes comprises interconnected electrode islands connected by an interconnection.

9. The electrostatic chuck of claim 1 , wherein the plurality of heating elements are formed on a backside surface of the insulating base.

10. An electrostatic chuck, comprising:
an insulating base;
a dielectric layer disposed on the insulating base, the dielectric layer having a substrate supporting surface;
a plurality of heating elements coupled to the insulating base;
a first set of electrodes positioned in a first plane and having a first polarity; and
a second set of electrodes positioned in a second plane and having a second polarity opposite to the first polarity, wherein the first plane and the second plane are parallel to each other, and the first set of electrodes and the second set of electrodes are arranged in a pixel-like configuration such that any two electrode in a row or column have opposite polarities.

11. The electrostatic chuck of claim 10 , wherein the first set of electrodes and the second set of electrodes are arranged in a hexagonal array or a honeycomb array.

12. The electrostatic chuck of claim 10 , wherein the first set of electrodes and the second set of electrodes are arranged in a symmetrical pattern.

13. The electrostatic chuck of claim 10 , wherein the first set of electrodes is positioned coplanar with the second set of electrodes.

14. The electrostatic chuck of claim 10 , wherein the plurality of heating elements are in the form of discrete sections.

15. The electrostatic chuck of claim 10 , wherein the plurality of heating elements are formed on a backside surface of the insulating base.

16. An electrostatic chuck, comprising:
an insulating base;
a dielectric layer disposed on the insulating base, the dielectric layer having a substrate supporting surface;
a plurality of heating elements coupled to the insulating base, wherein one or more of the plurality of heating elements are coupled to a temperature controller; and
a first set of electrodes and a second set of electrodes, wherein the first set of electrodes is disposed immediate adjacent to the second set of electrodes, and the plurality of heating elements are disposed along a space defined between the first set of electrodes and the second set of electrodes, and wherein a spacing between the first set of electrodes and the second set of electrodes is about 1 mm to about 3 mm.

17. The electrostatic chuck of claim 16 , wherein the plurality of heating elements are formed on a backside surface of the insulating base.

Assignees

• Applied Materials Inc

Inventors

• Cox Michael S

Classifications

• Y10T29/49083

  Heater type · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title