Multi-beam current quantity measuring method, multi-charged particle drawing control device, and multi-charged particle beam drawing device

Patent metadata

Field	Value
Publication number	US-9734984-B2
Application number	US-201615001717-A
Country	US
Kind code	B2
Filing date	Jan 20, 2016
Priority date	Jan 21, 2015
Publication date	Aug 15, 2017
Grant date	Aug 15, 2017

Abstract

A current quantity measuring method of multi-beams irradiates with a charged particle beam, amplifies an electric signal corresponding to multi-beams passed through a plurality of aperture holes of an aperture member having the plurality of aperture holes to form multi-beams by irradiation with the charged particle beam, receives the electric signal amplified in the minute current measurement unit and counting the number of electrons in the multi-beams, calculates a current quantity of the multi-beams passed through the plurality of aperture holes by using a product of the calculated number of electrons in the multi-beams and elementary charge, and corrects irradiation time of the charged particle beam of each of the plurality of aperture holes on the basis of the calculated current quantity.

First claim

The invention claimed is:

1. A current quantity measuring method of multi-beams, the method comprising:
irradiating with a charged particle beam;
converting, in a minute current measurement unit, multi-beams passed through a plurality of aperture holes of an aperture member having the plurality of aperture holes for forming the multi-beams by irradiation with the charged particle beam, into an electric signal, and then amplifying the electric signal;
receiving, in a digitizer, the electric signal amplified in the minute current measurement unit and counting the number of electrons in the multi-beams;
calculating a current quantity of the multi-beams passed through the plurality of aperture holes by using a product of the calculated number of electrons in the multi-beams and elementary charge; and
correcting, in a correction unit, irradiation time of the charged particle beam of each of the plurality of aperture holes on the basis of the calculated current quantity.

2. The current quantity measuring method according to claim 1 , wherein, in counting the number of electrons in the multi-beams, a reference value for a wave height value of the signal input to the digitizer is provided previously, and in a case where the wave height value is within a range between thresholds including the reference value, the number of electrons in the multi-beams is counted as one.

3. The current quantity measuring method according to claim 2 , comprising:
converting the input signal to a voltage signal after amplifying the electric signal corresponding to the multi-beams, wherein
the voltage signal is input to the digitizer.

4. The current quantity measuring method according to claim 3 , wherein in counting the number of electrons in the multi-beams, the number of electrons in charged particle beams passed through a corresponding aperture hole is counted by each of the plurality of aperture holes.

5. A multi-charged particle beam drawing control device comprising:
a minute current measuring unit to convert multi-beams passed through a plurality of aperture holes of an aperture member having the plurality of aperture holes for forming the multi-beams by irradiation with the charged particle beam, into an electric signal, and then to amplify the electric signal;
a digitizer to receive the electric signal amplified in the minute current measurement unit, counting the number of electrons in the multi-beams by each of the plurality of apertures, and calculating a current quantity of the multi-beams passed through the plurality of aperture holes by using a product of the calculated number of electrons in the multi-beams and elementary charge; and
a correction unit configured to correct irradiation time of the charged particle beam of every one of the plurality of aperture holes on the basis of the calculated current quantity.

6. The multi-charged particle beam drawing control device according to claim 5 , wherein in the counting of the number of electrons in the multi-beams, a reference value for a wave height value of the signal input to the digitizer is provided previously, and in a case where the wave height value is within a range between thresholds including the reference value, the number of electrons in the multi-beams is counted as one.

7. The multi-charge particle beam drawing control device according to claim 6 , wherein
the minute current measuring unit comprises a converter configured to convert the input signal to a voltage signal, and
the voltage signal is input to the digitizer.

8. A multi-charge particle beam drawing device comprising:
a stage to mount a sample and to be moved consecutively;
an emitter to emit a charged particle beam;
an aperture member having a plurality of aperture holes by irradiating an area including all the aperture holes with the charged particle beam so that the charged particle beam passes through the aperture holes to form multi beams;
a blanking plate having a plurality of blankers, each blanker conducting blanking control of the corresponding beam in the multi-beams passed through the plurality of aperture holes;
a minute current measurement unit to convert the multi-beams passed through the plurality of aperture holes in the blanking plate, into an electric signal, and then to amplify the electric signal;
a digitizer to receive the electric signal amplified in the minute current measurement unit, counting the number of electrons in the multi-beams by every one of the plurality of apertures, and calculating a current quantity of the multi-beams passed through the plurality of aperture holes by using a product of the calculated number of electrons in the multi-beams and elementary charge; and
a correction unit to correct irradiation time of the charged particle beam by every one of the plurality of aperture holes on the basis of the calculated current quantity.

9. The multi-charged particle beam drawing device according to claim 8 , wherein in the counting of the number of electrons in the multi-beams, a reference value for a wave height value of the signal input to the digitizer is provided previously, and in a case where the wave height value is within a range between thresholds including the reference value, the number of electrons in the multi-beams is counted as one.

10. The multi-charged particle beam drawing device according to claim 9 , wherein
the minute current measuring unit comprises a converter to convert the electric signal to a voltage signal, and
the voltage signal is input to the digitizer, the digitizer calculating the number of electrons by every one of the plurality of aperture holes based on the voltage signal.

Assignees

• Nuflare Technology Inc

Inventors

• Iwata Hideyuki

Classifications

• G01R19/0061

  Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas · CPC title

• H01J37/243 Primary

  Beam current control or regulation circuits (H01J37/241 takes precedence) · CPC title

• H01J37/304

  Controlling tubes by information coming from the objects {or from the beam}, e.g. correction signals · CPC title

• H01J2237/2443

  Scintillation detectors · CPC title

• H01J37/3177 Primary

  Multi-beam, e.g. fly's eye, comb probe · CPC title