Multi charged particle beam writing apparatus, and multi charged particle beam writing method

Patent metadata

Field	Value
Publication number	US-9437396-B2
Application number	US-201514755376-A
Country	US
Kind code	B2
Filing date	Jun 30, 2015
Priority date	May 24, 2013
Publication date	Sep 6, 2016
Grant date	Sep 6, 2016

Abstract

A multi charged particle beam writing apparatus includes a dose calculation unit to calculate a first dose resolving the resist of the target object, for a first beam of the multiple beams, corresponding to a pattern forming region, in which a pattern is arranged; and to calculate a second dose not resolving the resist, for a second beam of the multiple beams, corresponding to a no-pattern forming region, which surrounds the whole perimeter of the pattern and in which no pattern is arranged, and a deflection control unit to control a plural blankers so that a dose of the first beam is to be the first dose calculated and a dose of the second beam is to be the second dose calculated.

First claim

What is claimed is:

1. A multi charged particle beam writing apparatus comprising:
a stage configured to mount a target object and to be continuously movable, a resist having been applied to the target object;
an emission unit configured to emit a charged particle beam;
an aperture member, in which a plurality of openings are formed, configured to form multiple beams by letting a region including a whole of the plurality of openings be irradiated with the charged particle beam and letting portions of the charged particle beam respectively pass through a corresponding opening of the plurality of openings;
a plurality of blankers configured to respectively perform blanking deflection of a corresponding beam in the multiple beams having passed through the plurality of openings of the aperture member;
a blanking aperture member configured to block each beam having been deflected to be in a beam-off state by the plurality of blankers;
a dose calculation unit configured to
calculate a first dose that resolves the resist, for a first beam of the multiple beams which is corresponding to a pattern forming region, in which a figure pattern is arranged, and
calculate a second dose that does not resolve the resist, for a second beam of the multiple beams which is corresponding to a no-pattern forming region, which surrounds a whole perimeter of the figure pattern and in which no figure pattern is arranged, wherein the first dose is calculated by using the second dose and the second dose is calculated by using the first dose; and

a deflection control unit configured to control the plurality of blankers so that the first beam and the second beam are irradiated on the target object, the first beam irradiated for the first dose and resolves the resist and the second beam irradiated for the second dose and does not resolve the resist.

2. The apparatus according to claim 1 , wherein the no-pattern forming region, which surrounds the whole perimeter of the figure pattern and in which no figure pattern is arranged, includes a region in contact with the figure pattern.

3. The apparatus according to claim 1 , wherein a region not in contact with the figure pattern serves as the no-pattern forming region, which surrounds the whole perimeter of the figure pattern and in which no figure pattern is arranged, and a beam with the second dose irradiates the region not in contact with the figure pattern serving as the no-pattern forming region.

4. The apparatus according to claim 3 , wherein a reduced pattern obtained by reducing a reversed pattern, which is generated by reversing the figure pattern and a part in which no figure pattern is arranged, is written in the no-pattern forming region.

5. The apparatus according to claim 1 , further comprising
a dose coefficient calculation unit configured to
calculate a first dose coefficient for calculating an incident dose that resolves the resist, for a first beam of the multiple beams which is corresponding to the pattern forming region, in which the figure pattern is arranged, and
calculate a second dose coefficient for calculating an incident dose that does not resolve the resist, for a second beam of the multiple beams which is corresponding to the no-pattern forming region, which surrounds the whole perimeter of the figure pattern and in which no figure pattern is arranged.

6. The apparatus according to claim 1 , further comprising:
a pattern density calculation unit configured to calculate a pattern density, for each mesh region of a plurality of mesh regions obtained by virtually dividing a writing region into the plurality of mesh regions by a predetermined size;
a storage unit configured to store a relational equation between a coefficient, which is used for a dose calculation equation for calculating the second dose and is variable depending on a pattern density, and the pattern density; and
a coefficient calculation unit configured to read the relational equation from the storage unit and calculate the coefficient by using a value of the pattern density, for the each mesh region.

7. A multi charged particle beam writing method comprising:
calculating a first dose that resolves a resist on a target object, for a beam of multiple beams which is corresponding to a pattern forming region, in which a figure pattern is arranged, the multiple beams being formed by portions of a charged particle beam respectively passing through a corresponding opening of a plurality of openings;
calculating a second dose that does not resolve the resist, for a beam of the multiple beams which is corresponding to a no-pattern forming region, which surrounds a whole perimeter of the figure pattern and in which no figure pattern is arranged;
writing the pattern forming region, in which the figure pattern is arranged, by a irradiating a first beam on the target object, the first beam irradiated for the first dose and resolves the resist; and
writing the no-pattern forming region, which surrounds the whole perimeter of the figure pattern and in which no figure pattern is arranged, by a irradiating a second beam on the target object, the second beam irradiated for the second dose and does not resolve the resist,
wherein the first dose is calculated by using the second dose and the second dose is calculated by using the first dose.

8. The method according to claim 7 , wherein the no-pattern forming region, which surrounds the whole perimeter of the figure pattern and in which no figure pattern is arranged, includes a region in contact with the figure pattern.

9. The method according to claim 7 , wherein a region not in contact with the figure pattern serves as the no-pattern forming region, which surrounds the whole perimeter of the figure pattern and in which no figure pattern is arranged, and a beam with the second dose irradiates the region not in contact with the figure pattern serving as the no-pattern forming region.

10. The method according to claim 9 , wherein a reduced pattern obtained by reducing a reversed pattern, which is generated by reversing the figure pattern and a part in which no figure pattern is arranged, is written in the no-pattern forming region.

11. The method according to claim 7 , further comprising:
calculating a first dose coefficient for calculating an incident dose that resolves the resist, for a beam of the multiple beams which is corresponding to the pattern forming region, in which the figure pattern is arranged; and
calculating a second dose coefficient for calculating an incident dose that does not resolve the resist, for a beam of the multiple beams which is corresponding to the no-pattern forming region, which surrounds the whole perimeter of the figure pattern and in which no figure pattern is arranged.

12. The method according to claim 7 , further comprising:
calculating a pattern density, for each mesh region of a plurality of mesh regions obtained by virtually dividing a writing region into the plurality of mesh regions by a predetermined size; and
reading a relational equation from a storage unit that stores the relational equation between a coefficient, which is used for a dose calculation equation for calculating the second dose and is variable depending on a pattern density, and the pattern density, and calculating the coefficient by using a value of the pattern density, for the each mesh region.

13. The apparatus according to claim 1 , further comprising:
a coefficient calculation unit configured to calculate a coefficient, which is used for a dose calculation equation for calculating the second dose, for the each mesh region.

Assignees

• Nuflare Technology Inc

Inventors

• Matsumoto Hironobu

Classifications

• H01J2237/31754

  using electron beams · CPC title

• H01J37/3007

  Electron or ion-optical systems · CPC title

• H01J2237/31774

  Multi-beam · CPC title

• H01J37/20

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• H01J37/045

  Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge · CPC title