FinFET semiconductor devices including recessed source-drain regions on a bottom semiconductor layer and methods of fabricating the same

Patent metadata

Field	Value
Publication number	US-9716176-B2
Application number	US-201414534453-A
Country	US
Kind code	B2
Filing date	Nov 6, 2014
Priority date	Nov 26, 2013
Publication date	Jul 25, 2017
Grant date	Jul 25, 2017

Abstract

FinFET semiconductor devices and methods of forming the same are provided. The finFET semiconductor devices may include an insulator layer, a bottom semiconductor layer on the insulator layer, a channel fin on the bottom semiconductor layer, a source region on the bottom semiconductor layer and adjacent a first side of the channel fin, and a drain region on the bottom semiconductor layer and adjacent a second side of the channel fin opposite the first side.

First claim

What is claimed is:

1. A finFET semiconductor device, comprising:
an insulator layer;
a bottom semiconductor layer on the insulator layer, the bottom semiconductor layer comprising a first percentage of a first material and a fifth percentage of a second semiconductor material;
a channel fin on the bottom semiconductor layer, the channel fin comprising a second percentage of the first material and a sixth percentage of the second semiconductor material, wherein the second percentage of the first material in the channel fin is less than the first percentage of the first material in the bottom semiconductor layer;
a source region on the bottom semiconductor layer and adjacent a first side of the channel fin, the source region comprising a third percentage of the first material and a seventh percentage of the second semiconductor material, wherein the third percentage of the first material in the source region is greater than the second percentage of the first material in the channel fin; and
a drain region on the bottom semiconductor layer and adjacent a second side of the channel fin that is opposite the first side, the drain region comprising a fourth percentage of the first material and an eighth percentage of the second semiconductor material, wherein the fourth percentage of the first material in the drain region is greater than the second percentage of the first material in the channel fin,
wherein the first material is silicon and the second semiconductor material is germanium.

2. The finFET semiconductor device of claim 1 , wherein the third and fourth percentages of the first material in the source and drain regions are less than or equal to the first percentage of the first material in the bottom semiconductor layer.

3. The finFET semiconductor device of claim 1 , wherein the third and fourth percentages of the first material in the source and drain regions are about equal to the first percentage of the first material in the bottom semiconductor layer.

4. The finFET semiconductor device of claim 1 , wherein the bottom semiconductor layer comprises a thickness in a range of about 5 nm to about 15 nm and the channel fin comprises a thickness in a range of about 10 nm to about 75 nm.

5. The finFET semiconductor device of claim 4 , wherein the bottom semiconductor layer comprises a thickness of about 5 nm and the channel fin comprises a thickness of about 35 nm.

6. The finFET semiconductor device of claim 1 ,
wherein a channel of the finFET semiconductor device comprises the channel fin and a first portion of the bottom semiconductor layer beneath the channel fin,
wherein a source of the finFET semiconductor device comprises the source region and a second portion of the bottom semiconductor layer beneath the source region, and
wherein a drain of the finFET semiconductor device comprises the drain region and a third portion of the bottom semiconductor layer beneath the drain region.

7. The finFET semiconductor device of claim 6 , further comprising a gate stack on a top surface of the channel fin and extending down sidewall surfaces of the channel fin.

8. The finFET semiconductor device of claim 7 , wherein the drain region is on a recessed portion of the bottom semiconductor layer, wherein a distance between adjacent surfaces of the drain region and the insulator layer is less than a distance between adjacent surfaces of the channel fin and the insulator layer.

9. The finFET semiconductor device of claim 8 ,
wherein the first percentage of the first material in the bottom semiconductor layer is in a range of about 10% to about 40%,
wherein the fourth percentage of the first material in the drain region is in a range of about 10% to about 40% and less than or equal to the first percentage of the first material in the bottom semiconductor layer, and
wherein the second percentage of the first material in the channel fin is in a range of about 5% to about 35% and less than the fourth percentage of the first material in the drain region.

10. The finFET semiconductor device of claim 1 ,
wherein the finFET semiconductor device is an n-type finFET,
wherein the drain region comprises a lower drain region adjacent the bottom semiconductor layer and a upper drain region on the lower drain region, and
wherein the upper drain region comprises an upper drain percentage of the first material in the upper drain region that is higher than a lower drain percentage of the first material in the lower drain region.

11. The finFET semiconductor device of claim 1 ,
wherein the finFET semiconductor device is a p-type finFET,
wherein the drain region comprises a lower drain region adjacent the bottom semiconductor layer and a upper drain region on the lower drain region, and
wherein the upper drain region comprises an upper drain percentage of the first material in the upper drain region that is less than a lower drain percentage of the first material in the lower drain region.

12. The finFET semiconductor device of claim 1 ,
wherein the channel fin, source region, and drain region comprise a first channel fin, a first source region, and a first drain region, respectively, of an n-type finFET,
wherein the finFET semiconductor device further comprises a p-type finFET,
wherein the p-type finFET comprises a second channel fin, a second source region, and a second drain region, each on the bottom semiconductor layer, and
wherein percentages of the first material in the second channel fin, the second source region, and the second drain region are about equal to the second, third, and fourth percentages, respectively, of the first material.

13. The finFET semiconductor device of claim 1 ,
wherein the channel fin, source region, and drain region comprise a first channel fin, a first source region, and a first drain region, respectively, of an n-type finFET,
wherein the finFET semiconductor device further comprises a p-type finFET,
wherein the p-type finFET comprises a second channel fin, a second source region, and a second drain region, each on the bottom semiconductor layer, and
wherein percentages of the first material in the second channel fin, the second source region, and the second drain region are different from the second, third, and fourth percentages, respectively, of the first material.

14. The finFET semiconductor device of claim 1 ,
wherein the channel fin, source region, and drain region comprise a first channel fin, a first source region, and a first drain region, respectively, of an n-type finFET,
wherein the finFET semiconductor device further comprises a p-type finFET,
wherein the p-type finFET comprises a second channel fin, a second source region, and a second drain region, each on the bottom semiconductor layer, and
wherein at least one of percentages of the first material in the second channel fin, the second source region, and the second drain region is different from the second, third, and fourth percentages, respectively, of the first material.

15. The finFET semiconductor device of claim 14 ,
wherein the different at least one of the percentages of the first material in the second channel fin, the second source region, and the second drain region is a product of a masked Ge condensation process that decreases a percentage of silicon in the bottom semiconductor layer and/or the channel fin of the n-type finFET.

16. The finFET semiconductor device of claim 1 , wherein a sum of the first percentage and the fifth percentage is approximately 1, a sum of the second percentage and the sixth percentage is approximately 1, a sum of the third percentage and the seven

Assignees

• Rodder Mark S
• Obradovic Borna J
• Bowen Robert C
• Samsung Electronics Co Ltd

Inventors

• Rodder Mark S
• Obradovic Borna J
• Bowen Robert C

Classifications

• H10D30/024

  of fin field-effect transistors [FinFET] · CPC title

• H10D30/62 Primary

  Fin field-effect transistors [FinFET] · CPC title

• H01L29/785 Primary

  Electricity · mapped topic

• H01L21/845

  Electricity · mapped topic

• H01L29/7848

  Electricity · mapped topic