Apparatus for fabricating ingot

Patent metadata

Field	Value
Publication number	US-9702058-B2
Application number	US-201214129193-A
Country	US
Kind code	B2
Filing date	Jun 13, 2012
Priority date	Jun 24, 2011
Publication date	Jul 11, 2017
Grant date	Jul 11, 2017

Abstract

Disclosed is an apparatus for fabricating an ingot. The apparatus includes a crucible to receive a raw material, a holder disposed at an upper portion of the crucible to fix a seed, and a filter part in the crucible. The filter part is spaced apart from a surface of the raw material.

First claim

The invention claimed is:

1. An apparatus for fabricating an ingot, the apparatus comprising:
a crucible containing a raw material;
a top cover disposed on the crucible;
a seed holder disposed at a lower end portion of the top cover;
a seed disposed below the seed holder; and
a filter part in the crucible and disposed between a surface of the raw material and the top cover,
wherein the filter part is spaced apart from the surface of the raw material, the seed holder, and the seed.

2. The apparatus of claim 1 , wherein a first gas room is interposed between the filter part and the seed holder, and a second gas room is interposed between the filter part and the surface of the raw material.

3. The apparatus of claim 2 , wherein the raw material is sublimated in the first and second gas rooms.

4. The apparatus of claim 1 , wherein the filter part is disposed on the raw material and disposed along an inner wall of the crucible.

5. The apparatus of claim 1 , wherein the filter part extends from an upper portion of the raw material in a longitudinal direction of the crucible.

6. The apparatus of claim 1 , wherein the filter part is porous.

7. The apparatus of claim 1 , wherein the filter part has a thickness in a range of 1 mm to 10 cm.

8. The apparatus of claim 1 , wherein the filter part is a membrane.

9. The apparatus of claim 8 , wherein the membrane is a carbon-based membrane.

10. The apparatus of claim 1 , wherein the filter part has a fibrous structure.

11. The apparatus of claim 1 , wherein the filter part comprises a first layer and a second layer on the first layer.

12. The apparatus of claim 11 , wherein a pore of the first layer has a size different from a size of a pore of the second layer.

13. The apparatus of claim 11 , wherein a pore of the first layer has a size greater than a size of a pore of the second layer.

14. The apparatus of claim 1 , further comprising an auxiliary filter part on the surface of the raw material.

15. The apparatus of claim 14 , wherein the auxiliary filter part makes contact with the surface of the raw material.

16. The apparatus of claim 1 , further comprising a locking part protruding in the crucible, wherein the filter part is positioned at the locking part.

17. The apparatus of claim 1 , wherein the filter part makes contact with a side wall of the crucible.

18. The apparatus of claim 1 , wherein the filter part makes contact with the top cover.

19. The apparatus of claim 6 , wherein the filter part includes a plurality of pores, and wherein each pore has a size in a range of 0.1 μm to 300 μm.

Assignees

• Shin Dong Geun
• Son Chang Hyun
• Lg Innotek Co Ltd

Inventors

• Shin Dong Geun
• Son Chang Hyun

Classifications

• C30B23/00 Primary

  Single-crystal growth by condensing evaporated or sublimed materials · CPC title

• C30B23/005 Primary

  Controlling or regulating flux or flow of depositing species or vapour · CPC title

• C30B29/36

  Carbides · CPC title

• C30B23/02

  Epitaxial-layer growth · CPC title

• H10P95/00

  Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass · CPC title