Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium

Patent metadata

Field	Value
Publication number	US-9696262-B2
Application number	US-201314649615-A
Country	US
Kind code	B2
Filing date	Dec 5, 2013
Priority date	Dec 7, 2012
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A substrate processing apparatus includes: a load port into which the transport container is carried; a detecting unit that detects storage condition of the substrates which are contained in the transport container, which has been carried into the load port and the lid of which has been removed; a processing unit that processes the substrates removed from the transport container having been carried into the load port; and a control unit. The control unit performs a first step that detects storage condition of the substrates, which are contained in the transport container having been carried into the load port, before the substrates are removed from the transport container to be delivered to the processing unit; a second step that detects storage condition of the substrates, which have been processed in the processing unit and returned to the original transport container, before closing the lid; and a third step that judges whether or not the transport container has an abnormality based on results of the first and second steps.

First claim

The invention claimed is:

1. A substrate processing apparatus that removes substrates from a transport container and processes the substrates, wherein the transport container has a container main body whose substrate removal opening formed in a front face of the container main body is air-tightly closed by a lid, and the transport container is configured to allow a plurality of the substrates to be transported while the substrates being contained in the transport container in a form like shelves, said substrate processing apparatus comprising:
a load port into which the transport container is carried;
a detecting unit that detects spatial positions of the substrates contained in the transport container, which has been carried into the load port and the lid of which has been removed;
a processing unit that processes the substrates removed from the transport container having been carried into the load port; and
a control unit that performs a first step that detects spatial positions of the substrates contained in the transport container, which are in the transport container having been carried into the load port, before the substrates are removed from the transport container to be delivered to the processing unit; a second step that detects spatial positions of the substrates contained in the transport container, which have been processed in the processing unit and returned to the original transport container, before closing the lid; and a third step that judges whether or not the transport container has an abnormality based on results of the first and second steps.

2. The substrate processing apparatus according to claim 1 , wherein the detecting unit includes a light sensor having a horizontal light axis that moves vertically relative to the transport container so as to obtain data on presence or absence of transmitted light correlated with height positions in the opening of the transport container.

3. The substrate processing apparatus according to claim 1 , wherein the control unit judges that the transport container has an abnormality, if an abnormality of the spatial positions of the substrates is detected in the first step and if the same abnormality as that in the first step is detected in the second step.

4. The substrate processing apparatus according to claim 1 , wherein the control unit judges that a transport system in the substrate processing apparatus has an abnormality, if an abnormality of the spatial positions of the substrates is detected in the second step and if an abnormality of the spatial positions of the substrates is not detected in the first step.

5. The substrate processing apparatus according to claim 1 , wherein the control unit judges that an abnormality has occurred during transporting of the transport container or during removal of the lid, if an abnormality of the spatial positions of the substrates is detected in the first step and if an abnormality of the spatial positions of the substrates is not detected in the second step.

6. The substrate processing apparatus according to claim 1 , wherein the control unit reports a judgment result to a host computer when the control unit judges that the transport container has an abnormality.

7. A method of operating a substrate processing apparatus that removes substrates from a transport container and processes the substrates, wherein the transport container has a container main body whose substrate removal opening formed in a front face of the container main body is air-tightly closed by a lid, and the transport container is configured to allow a plurality of the substrates to be transported while the substrates being contained in the transport container in a form like shelves, said method comprising:
a step that carries the transporting container into the load port and removes the lid;
a first detecting step that thereafter detects spatial positions of the substrates contained in the transport container, before the substrates are delivered to a processing unit;
a step that thereafter removes the substrates from the transport container, processes the substrates in the processing unit, and contains the substrates into the transport container;
a second detecting step that thereafter detects spatial positions of the substrates contained in the transport container, before the lid is closed; and
a judging step that judges whether or not the transporting container has an abnormality based on results of the first and second detecting steps.

8. The method of operating the substrate processing apparatus according to claim 7 , wherein the first and second detecting steps each include a step that obtains data on presence or absence of transmitted light correlated with height positions in the opening of the transport container, by using a light sensor having a horizontal light axis that moves vertically relative to the transport container.

9. The method of operating the substrate processing apparatus according to claim 7 , wherein the judging step includes a step of judging that the transporting container has an abnormality, if an abnormality of the spatial positions of the substrates is detected in the first detecting step and if the same abnormality as that in the first detecting step is detected in the second detecting step.

10. The method of operating the substrate processing apparatus according to claim 7 , wherein the judging step includes a step of judging that a transport system in the substrate processing apparatus has an abnormality, if an abnormality of the spatial positions of the substrates is detected in the second detecting step and if an abnormality of the spatial positions of the substrates is not detected in the first detecting step.

11. The method of operating the substrate processing apparatus according to claim 7 , wherein the judging step judges that an abnormality has occurred during transporting of the transport container or during removal of the lid, if an abnormality is detected in the first detecting step and if an abnormality is not detected in the second detecting step.

12. A non-transitory storage medium storing a program that is used for executing a method of operating a substrate processing apparatus that removes substrates from a transport container and processes the substrates, wherein the transport container has a container main body whose substrate removal opening formed in a front face of the container main body is air-tightly closed by a lid, and the transport container is configured to allow a plurality of the substrates to be transported while the substrates being contained in the transport container in a form like shelves, and wherein the program is configured for execution of the operating method according to claim 7 .

13. A method of operating a plurality of substrate processing apparatuses that each remove substrates from a transport container and processes the substrates, wherein the transport container has a container main body whose substrate removal opening formed in a front face of the container main body is air-tightly closed by a lid, and the transport container is configured to allow a plurality of the substrates to be transported while the substrates being contained in the transport container in a form like shelves, said method comprising:
a step that returns substrates having been processed in one of the substrate processing apparatuses to the transport container placed on a load port;
a carry-out inspecting step that thereafter detects spatial positions of the substrates contained in the transport container, before the lid is closed;
a step that thereafter closes the transport container, and carries the transport container into a load port of anoth

Assignees

• Tokyo Electron Ltd

Inventors

• Morikawa Katsuhiro
• Sunaka Ikuo

Classifications

• H10P72/3408

  Docking arrangements · CPC title

• H10P72/3221

  Overhead conveying · CPC title

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/0608 Primary

  of substrates stored in a container, a magazine, a carrier, a boat or the like · CPC title

• H10P72/18

  characterised by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports · CPC title