Vibration Measurement Device
US-2024410745-A1 · Dec 12, 2024 · US
Process apparatus with on-the-fly substrate centering
US9514974B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9514974-B2 |
| Application number | US-201414325702-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 8, 2014 |
| Priority date | Jul 8, 2013 |
| Publication date | Dec 6, 2016 |
| Grant date | Dec 6, 2016 |
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- Title
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Abstract
Official abstract text for this publication.
A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.
First claim
Opening claim text (preview).
What is claimed is: 1. A substrate processing apparatus comprising: a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein; a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening; and at least one substrate sensor element disposed on a side of the door and oriented and positioned by the doo…
Assignees
Inventors
Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P72/0606Primary
Electricity · mapped topic
Cross-Sectional Technologies · mapped topic
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- What does patent US9514974B2 cover?
- A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed o…
- Who is the assignee on this patent?
- Brooks Automation Inc, Brooks Automation Inc
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0606. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Dec 06 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).