Substrate processing method and substrate processing apparatus
US-12362202-B2 · Jul 15, 2025 · US
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Sunaka Ikuo patents
Sunaka Ikuo is listed as an inventor on 15 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sunaka Ikuo |
| Total patents | 15 |
| First publication | May 28, 2015 |
| Latest publication | Jul 15, 2025 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing method and substrate processing apparatus
US-2024096654-A1 · Mar 21, 2024 · US
Substrate processing method and substrate processing apparatus
US-11869777-B2 · Jan 9, 2024 · US
Processing apparatus, abnormality detection method, and storage medium
US-11094568-B2 · Aug 17, 2021 · US
Substrate processing method and substrate processing apparatus
US-2021098271-A1 · Apr 1, 2021 · US
Substrate transfer method and storage medium
US-10128138-B2 · Nov 13, 2018 · US
Processing apparatus, abnormality detection method, and storage medium
US-2018308730-A1 · Oct 25, 2018 · US
Substrate processing apparatus and liquid mixing method
US-10067514-B2 · Sep 4, 2018 · US
Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container
US-9773690-B2 · Sep 26, 2017 · US
Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium
US-9696262-B2 · Jul 4, 2017 · US
Recent patents
Latest publications not already listed above.
Substrate transfer method and storage medium
US-2017178935-A1 · Jun 22, 2017 · US
Substrate transfer apparatus, substrate transfer method, and storage medium
US-9627238-B2 · Apr 18, 2017 · US
Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container
US-2016172225-A1 · Jun 16, 2016 · US
Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium
US-2015300960-A1 · Oct 22, 2015 · US
Substrate processing apparatus and liquid mixing method
US-2015146498-A1 · May 28, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 15 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/3406 | 7 |
| H01L21/67772 | 6 |
| H10P72/0414 | 6 |
| H10P72/0424 | 6 |
| H01L21/67051 | 6 |