Piezoelectric material, piezoelectric element, and electronic device

Patent metadata

Field	Value
Publication number	US-9673379-B2
Application number	US-201514723963-A
Country	US
Kind code	B2
Filing date	May 28, 2015
Priority date	May 30, 2014
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

A piezoelectric material that does not contain lead and has excellent piezoelectric constant and mechanical quality factor in a device driving temperature range (−30° C. to 50° C.) is provided. A piezoelectric material includes a main component containing a perovskite metal oxide represented by following general formula (1), and a first auxiliary component containing Mn, wherein an amount of the contained Mn is 0.002 moles or more and 0.015 moles or less relative to 1 mole of the metal oxide.

(Ba 1-y Bi y ) a (Ti 1-x-z Zr x Fe z )O 3   (1)

(where 0.010≦x≦0.060, 0.001≦y≦0.015, 0.001≦z≦0.015, 0.950≦y/z≦1.050, and 0.986≦a≦1.020).

First claim

What is claimed is:

1. A piezoelectric material comprising:
a perovskite metal oxide represented by following general formula (1); and
Mn,
wherein an amount of the contained Mn is 0.002 moles or more and 0.015 moles or less relative to 1 mole of the metal oxide
(Ba 1-y Bi y ) a (Ti 1-x-z Zr x Fe z )O 3   (1)

where 0.010≦x≦0.060, 0.001≦y≦0.015, 0.001≦z≦0.015, 0.950≦y/z≦1.050, and 0.986≦a≦1.020.

2. The piezoelectric material according to claim 1 , further comprising at least one of Si and B,
wherein an amount of the sum of the contained Si and B is 0.0010 parts by weight or more and 4.0000 parts by weight or less relative to 100 parts by weight of the perovskite metal oxide represented by the general formula (1).

3. The piezoelectric material according to claim 1 , wherein an average equivalent circular diameter of crystal grains forming the piezoelectric material is 500 nm or more and 10 μm or less.

4. The piezoelectric material according to claim 1 , wherein a relative density of the piezoelectric material is 93% or more and 100% or less.

5. The piezoelectric material according to claim 1 , wherein a dielectric loss tangent, at a frequency of 1 kHz, of the piezoelectric material is 0.006 or less.

6. A piezoelectric element comprising at least:
a first electrode;
a piezoelectric material portion; and
a second electrode,
wherein a piezoelectric material forming the piezoelectric material portion is the piezoelectric material according to claim 1 .

7. A multilayered piezoelectric element comprising a plurality of piezoelectric material layers and a plurality of electrode layers including an internal electrode, the piezoelectric material layers and the electrode layers being alternately stacked,
wherein a piezoelectric material forming the piezoelectric material layers is the piezoelectric material according to claim 1 .

8. The multilayered piezoelectric element according to claim 7 , wherein the internal electrode contains Ag and Pd, and
wherein a weight ratio of M1/M2 is 0.25≦M1/M2≦4.0 where a weight of the contained Ag is M1 and a weight of the contained Pd is M2.

9. The multilayered piezoelectric element according to claim 7 , wherein the internal electrode contains at least one of Ni and Cu.

10. A liquid discharge head comprising at least:
a liquid chamber including a vibrating unit provided with the piezoelectric element according to claim 6 ; and
a discharge port communicating with the liquid chamber.

11. A liquid discharge apparatus comprising:
a stage for an object; and
the liquid discharge head according to claim 10 .

12. An ultrasonic motor comprising at least:
a vibrating member provided with the piezoelectric element according to claim 6 ; and
a moving member in contact with the vibrating member.

13. An optical device comprising a driving unit provided with the ultrasonic motor according to claim 12 .

14. An oscillatory device comprising a vibrating member including a diaphragm provided with the piezoelectric element according to claim 6 .

15. A dust removing device comprising a vibrating unit provided with the oscillatory device according to claim 14 .

16. An imaging apparatus comprising at least:
the dust removing device according to claim 15 ; and
an image sensor unit,
wherein the diaphragm of the dust removing device is provided on a light-receiving surface side of the image sensor unit.

17. An electronic device comprising the piezoelectric element according to claim 6 .

18. A liquid discharge head comprising at least:
a liquid chamber including a vibrating unit provided with the multilayered piezoelectric element according to claim 7 ; and
a discharge port communicating with the liquid chamber.

19. A liquid discharge apparatus comprising:
a stage for an object; and
the liquid discharge head according to claim 18 .

20. An ultrasonic motor comprising at least:
a vibrating member provided with the multilayered piezoelectric element according to claim 7 ; and
a moving member in contact with the vibrating member.

21. An optical device comprising a driving unit provided with the ultrasonic motor according to claim 20 .

22. An oscillatory device comprising a vibrating member including a diaphragm provided with the multilayered piezoelectric element according to claim 7 .

23. A dust removing device comprising a vibrating unit provided with the oscillatory device according to claim 22 .

24. An imaging apparatus comprising at least:
the dust removing device according to claim 23 ; and
an image sensor unit,
wherein the diaphragm of the dust removing device is provided on a light-receiving surface side of the image sensor unit.

25. An electronic device comprising the multilayered piezoelectric element according to claim 7 .

Assignees

• Canon Kk

Inventors

• Murakami Shunsuke
• Watanabe Takayuki
• Matsuda Takanori
• Oshima Kanako
• Kubota Makoto

Classifications

• C04B2235/3418

  Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint · CPC title

• C04B2235/77

  Density · CPC title

• H02N2/106

  Langevin motors · CPC title

• C04B2235/3409

  Boron oxide, borates, boric acids, or oxide forming salts thereof, e.g. borax · CPC title

• B41J2/14233

  of film type, deformed by bending and disposed on a diaphragm · CPC title