Piezoelectric material, piezoelectric element, and electronic device

Patent metadata

Field	Value
Publication number	US-9306150-B2
Application number	US-201514795786-A
Country	US
Kind code	B2
Filing date	Jul 9, 2015
Priority date	Jul 12, 2013
Publication date	Apr 5, 2016
Grant date	Apr 5, 2016

Abstract

There is provided a piezoelectric material not containing any lead component, having stable piezoelectric characteristics in an operating temperature range, a high mechanical quality factor, and satisfactory piezoelectric characteristics. The piezoelectric material according to the present invention includes a main component containing a perovskite-type metal oxide that can be expressed using the following general formula (1), and subcomponents containing Mn, Li, and Bi. When the metal oxide is 100 parts by weight, the content of Mn on a metal basis is not less than 0.04 parts by weight and is not greater than 0.36 parts by weight, content α of Li on a metal basis is equal to or less than 0.0012 parts by weight (including 0 parts by weight), and content β of Bi on a metal basis is not less than 0.042 parts by weight and is not greater than 0.850 parts by weight

(Ba 1-x Ca x ) a (Ti 1-y-z Zr y Sn z )O 3   (1)

(in the formula (1), 0.09≦x≦0.30, 0.025≦y≦0.085, 0≦z≦0.02, and 0.986≦a≦1.02).

First claim

What is claimed is:

1. A method for manufacturing a piezoelectric material, the method comprising:
preparing raw material that contains at least each of Ba, Ca, Ti, Zr, Mn, and Bi, the raw material being selected from among Ba compound, Ca compound, Ti compound, Zr compound, Sn compound, Mn compound, Li compound, Bi compound, Si compound, and B compound;
fabricating a compact from the raw material; and
sintering the compact at a temperature not lower than 1100° C. and not higher than 1550° C. to obtain a piezoelectric material,

wherein the piezoelectric material includes:
a main component containing a perovskite-type metal oxide expressed by the following general formula (1);
a first subcomponent containing Mn;
a second subcomponent containing Li; and
a third subcomponent containing Bi,
wherein the content of Mn on a metal basis is not less than 0.04 parts by weight and is not greater than 0.36 parts by weight when the metal oxide is 100 parts by weight, the content α of Li on a metal basis is equal to or less than 0.0012 parts by weight (including 0 parts by weight) when the metal oxide is 100 parts by weight, and content β of Bi on a metal basis is not less than 0.042 parts by weight and is not greater than 0.850 parts by weight when the metal oxide is 100 parts by weight
(Ba 1-x Ca x ) a (Ti 1-y-z Zr y Sn z )O 3   (1)

(in the formula (1), 0.09≦x≦0.30, 0.025≦y≦0.085, 0≦z≦0.02, and 0.986≦a≦1.02).

2. The method for manufacturing the piezoelectric material according to claim 1 , wherein a relationship 0.055≦y≦0.085 is satisfied with respect to “y” in the general formula (1).

3. The method for manufacturing the piezoelectric material according to claim 1 , wherein the piezoelectric material includes a fourth subcomponent containing Mg, and the content of the fourth subcomponent on a metal basis is equal to or less than 0.10 parts by weight (excluding 0 parts by weight) when the perovskite-type metal oxide that can be expressed using the general formula (1) is 100 parts by weight.

4. The method for manufacturing the piezoelectric material according to claim 1 , wherein the piezoelectric material includes a fifth subcomponent that contains at least one of Si and B, and the content of the fifth subcomponent on a metal basis is not less than 0.001 parts by weight and is not greater than 4.000 parts by weight when the perovskite-type metal oxide that can be expressed using the general formula (1) is 100 parts by weight.

5. The method for manufacturing the piezoelectric material according to claim 1 , wherein a relationship y+z≦(11x/14)−0.037 is satisfied in the general formula (1).

6. The method for manufacturing the piezoelectric material according to claim 1 , wherein a relationship x≦0.17 is satisfied in the general formula (1).

7. The method for manufacturing the piezoelectric material according to claim 1 , wherein the Curie temperature of the piezoelectric material is equal to or greater than 100° C.

8. The method for manufacturing the piezoelectric material according to claim 1 , wherein a dielectric tangent of the piezoelectric material at a frequency of 1 kHz is equal to or less than 0.006.

9. A method for manufacturing a piezoelectric element, the method comprising providing a first electrode and a second electrode to a piezoelectric material,
wherein the piezoelectric material includes:
a main component containing a perovskite-type metal oxide expressed by the following general formula (1);
a first subcomponent containing Mn;
a second subcomponent containing Li; and
a third subcomponent containing Bi,

wherein the content of Mn on a metal basis is not less than 0.04 parts by weight and is not greater than 0.36 parts by weight when the metal oxide is 100 parts by weight, the content α of Li on a metal basis is equal to or less than 0.0012 parts by weight (including 0 parts by weight) when the metal oxide is 100 parts by weight, and content β of Bi on a metal basis is not less than 0.042 parts by weight and is not greater than 0.850 parts by weight when the metal oxide is 100 parts by weight
(Ba 1-x Ca x ) a (Ti 1-y-z Zr y Sn z )O 3   (1)

(in the formula (1), 0.09≦x≦0.30, 0.025≦y≦0.085, 0≦z≦0.02, and 0.986≦a≦1.02).

10. A method for manufacturing a multilayered piezoelectric element, the method comprising alternately stacking a piezoelectric material and an electrode,
wherein the piezoelectric material includes:
a main component containing a perovskite-type metal oxide expressed by the following general formula (1);
a first subcomponent containing Mn;
a second subcomponent containing Li; and
a third subcomponent containing Bi,

wherein the content of Mn on a metal basis is not less than 0.04 parts by weight and is not greater than 0.36 parts by weight when the metal oxide is 100 parts by weight, the content α of Li on a metal basis is equal to or less than 0.0012 parts by weight (including 0 parts by weight) when the metal oxide is 100 parts by weight, and content β of Bi on a metal basis is not less than 0.042 parts by weight and is not greater than 0.850 parts by weight when the metal oxide is 100 parts by weight
(Ba 1-x Ca x ) a (Ti 1-y-z Zr y Sn z )O 3   (1)

(in the formula (1), 0.09≦x≦0.30, 0.025≦y≦0.085, 0≦z≦0.02, and 0.986≦a≦1.02).

11. The method for manufacturing the multilayered piezoelectric element according to claim 10 , wherein the electrode includes Ag and Pd and a relationship 0.25≦M1/M2≦4.0 is satisfied with respect to a weight ratio M1/M2, in which M1 represents the content of Ag and M2 represents the content of Pd.

12. The method for manufacturing the multilayered piezoelectric element according to claim 10 , wherein the electrode contains at least one of Ni and Cu.

13. A method for manufacturing a liquid discharge head, the method comprising:
providing a liquid chamber that is equipped with a vibrating unit in which a piezoelectric element including a pair of electrodes and a piezoelectric material, or a multilayered piezoelectric element including alternately stacked piezoelectric material and electrode is disposed; and
providing a discharge port that communicates with the liquid chamber,
wherein the piezoelectric material included in the piezoelectric element or the piezoelectric material stacked in the multilayered piezoelectric element includes a main component containing a perovskite-type metal oxide expressed by the following general formula (1);
a first subcomponent containing Mn;
a second subcomponent containing Li; and
a third subcomponent containing Bi,

wherein the content of Mn on a metal basis is not less than 0.04 parts by weight and is not greater than 0.36 parts by weight when the metal oxide is 100 parts by weight, the content α of Li on a metal basis is equal to or less than 0.0012 parts by weight (including 0 parts by weight) when the metal oxide is 100 parts by weight, and content β of Bi on a metal basis is not less than 0.042 parts by weight and is not greater than 0.850 parts by weight when the metal oxide is 100 parts by weight
(Ba 1-x Ca x ) a (Ti 1-y-z Zr y Sn z )O 3   (1)

(in the formula (1), 0.09≦x≦0.30, 0.025≦y≦0.085, 0≦z≦0.02, and 0.986≦a≦1.02).

14. A method for manufacturing a liquid discharge apparatus, the method comprising:
providing a liquid chamber that is equipped with a vibrating unit in which a piezoelectric element including a pair of electrodes and a piezoelectric material, or a multilayered piezoelectric element including alternately stacked piezoelectric material and electrode is disposed, and providing a liquid discharge head including at least a discharge port that communicates with the liquid cha

Assignees

• Canon Kk

Inventors

• Tanaka Hidenori
• Watanabe Takayuki
• Murakami Shunsuke
• Furuta Tatsuo
• Yabuta Hisato

Classifications

• H01L41/1871 Primary

  Electricity · mapped topic

• H02N2/22

  Methods relating to manufacturing, e.g. assembling, calibration · CPC title

• G02B27/0006

  with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B) · CPC title

• B06B1/06

  operating with piezoelectric effect or with electrostriction (piezoelectric or electrostrictive devices per se H10N30/00) · CPC title

• H01L41/277

  Electricity · mapped topic