Piezoelectric ceramics, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device

Patent metadata

Field	Value
Publication number	US-9412931-B2
Application number	US-201314380002-A
Country	US
Kind code	B2
Filing date	Mar 26, 2013
Priority date	Mar 30, 2012
Publication date	Aug 9, 2016
Grant date	Aug 9, 2016

Abstract

Provided is a lead-free piezoelectric ceramics having enhanced mechanical quality factor (Qm) and mechanical strength. The piezoelectric ceramics, includes at least a first crystal grain and a second crystal grain. The first crystal grain has an average equivalent circle diameter of 2 μm or more and 30 μm or less. The first crystal grain includes a perovskite-type metal oxide represented by the following general formula (1) as a main component, and the second crystal grain includes a perovskite-type metal oxide represented by the following general formula (2) as a main component: (1) xBaTiO 3 -yCaTiO 3 -zCaZrO 3 ; and (2) x′BaTiO 3 -y′CaTiO 3 -z′CaZrO 3 , provided that x, y, z, x′, y′, and z′ satisfy x+y+z=1, x′+y′+z′=1, 0≦x′≦0.15, 0.85≦y′≦1, 0≦z≦0.05, x>x′, 0<y<y′, and z>0.

First claim

The invention claimed is:

1. A piezoelectric ceramics, comprising a first crystal grain and a second crystal grain,
wherein the first crystal grain has an average equivalent circle diameter of 2 μm to 30 μm,
wherein the first crystal grain includes a perovskite-type metal oxide represented by general formula (1) as a main component, and the second crystal grain includes a perovskite-type metal oxide represented by general formula (2) as a main component:
xBaTiO 3 -yCaTiO 3 -zCaZrO 3 ; and  (1)

x′BaTiO 3 -y′CaTiO 3 -z′CaZrO 3 ,  (2)

provided that x, y, z, x′, y′, and z′ satisfy x+y+z=1, x′+y′+z′=1, 0≦x′≦0.15, 0.85≦y′≦1, 0≦z′≦0.05, x>x′, 0<y<y′, and z>0, and
wherein when the piezoelectric ceramics is polished, a ratio of an area of the first crystal grain in a polished surface of the piezoelectric ceramics is larger than a ratio of an area of the second crystal grain in the polished surface.

2. The piezoelectric ceramics according to claim 1 , wherein the first crystal grain has a composition satisfying 0.80<x<0.90, 0.04<y<0.12, and 0.04<z<0.10.

3. The piezoelectric ceramics according to claim 1 , wherein a proportion of the perovskite-type metal oxide represented by the general formula (2) when one of a surface and a cross section of the piezoelectric ceramics is observed is from 0.5% by area to 5% by area.

4. The piezoelectric ceramics according to claim 1 , wherein the average equivalent circle diameter of the first crystal grain is larger than an average equivalent circle diameter of the second crystal grain.

5. The piezoelectric ceramics according to claim 4 , wherein the average equivalent circle diameter of the second crystal grain is 200 nm to 2 μm.

6. The piezoelectric ceramics according to claim 1 , wherein the first crystal grain contains Mn in an amount of 0.05% by weight to 0.40% by weight.

7. A piezoelectric element, comprising:
a first electrode;
a piezoelectric ceramics; and
a second electrode,
wherein the piezoelectric ceramics comprises the piezoelectric ceramics according to claim 1 .

8. A multilayered piezoelectric element, comprising a piezoelectric ceramic layer and an electrode layer including an internal electrode, which are alternately stacked,
wherein the piezoelectric ceramic layer is formed of the piezoelectric ceramics according to claim 1 .

9. The multilayered piezoelectric element according to claim 8 ,
wherein the internal electrode contains Ag and Pd, and
wherein a weight ratio M 1 /M 2 of a content weight M 1 of the Ag to a content weight M 2 of the Pd satisfies 0.25<M 1 /M 2 <4.0.

10. The multilayered piezoelectric element according to claim 8 , wherein the internal electrode contains at least one kind of Ni and Cu.

11. A liquid ejection head, comprising:
a liquid chamber comprising a vibration portion including the piezoelectric element according to claim 7 ; and
an ejection orifice communicating to the liquid chamber.

12. A liquid ejection apparatus, comprising:
a conveying unit for a recording medium; and
the liquid ejection head according to claim 11 .

13. An ultrasonic motor, comprising:
a vibration body including the piezoelectric element according to claim 7 ; and
a moving body to be brought into contact with the vibration body.

14. An optical equipment, comprising a drive unit including the ultrasonic motor according to claim 13 .

15. A vibration device, comprising a vibration body including the piezoelectric element according to claim 7 .

16. A dust removing device, comprising the vibration device according to claim 15 .

17. An imaging apparatus, comprising:
the dust removing device according to claim 16 ; and
an imaging element unit,
wherein the dust removing device includes a vibration member disposed on a light receiving surface side of the imaging element unit.

18. An electronic equipment, comprising a piezoelectric acoustic component including the piezoelectric element according to claim 7 .

19. A liquid ejection head, comprising:
a liquid chamber comprising a vibration portion including the multilayered piezoelectric element according to claim 8 ; and
an ejection orifice communicating to the liquid chamber.

20. A liquid ejection apparatus, comprising:
a conveying unit for a recording medium; and
the liquid ejection head according to claim 19 .

21. An ultrasonic motor, comprising:
a vibration body including the multilayered piezoelectric element according to claim 8 ; and
a moving body to be brought into contact with the vibration body.

22. An optical equipment, comprising a drive unit including the ultrasonic motor according to claim 21 .

23. A vibration device, comprising a vibration body including the multilayered piezoelectric element according to claim 8 .

24. A dust removing device, comprising the vibration device according to claim 23 .

25. An imaging apparatus, comprising:
the dust removing device according to claim 24 ; and
an imaging element unit,
wherein the dust removing device includes a vibration member disposed on a light receiving surface side of the imaging element unit.

26. An electronic equipment, comprising a piezoelectric acoustic component including the multilayered piezoelectric element according to claim 8 .

Assignees

• Canon Kk

Inventors

• Shimada Mikio
• Aiba Toshiaki
• Ifuku Toshihiro
• Matsuda Takanori
• Kubota Makoto
• Furuta Tatsuo
• Hayashi Jumpei

Classifications

• H02N2/163

  Motors with ring stator · CPC title

• C04B35/62645

  Thermal treatment of powders or mixtures thereof other than sintering · CPC title

• C04B2235/6562

  Heating rate · CPC title

• C04B2235/3262

  Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO · CPC title

• G03B3/10

  Power-operated focusing · CPC title