Piezoelectric material, piezoelectric element, and electronic equipment

Patent metadata

Field	Value
Publication number	US-9260348-B2
Application number	US-201414764030-A
Country	US
Kind code	B2
Filing date	Jan 24, 2014
Priority date	Jan 29, 2013
Publication date	Feb 16, 2016
Grant date	Feb 16, 2016

Abstract

There is provided a lead- and potassium-free piezoelectric material having a high piezoelectric constant and a satisfactory insulation property and a piezoelectric element that includes the piezoelectric material. The piezoelectric material contains a perovskite-type metal oxide having the general formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 (wherein x satisfies 0.80≦x≦0.95, and y satisfies 0.85≦y≦0.95) and Zn, wherein the Zn content corresponds to more than 0 mol % and 5 mol % or less of the amount of perovskite-type metal oxide. The piezoelectric element includes the piezoelectric material.

First claim

The invention claimed is:

1. A piezoelectric material, comprising: a perovskite-type metal oxide having the following general formula (1); and Zn, wherein a content of the Zn corresponds to more than 0.1 mol % and 2 mol % or less of the amount of the perovskite-type metal oxide:
(Na x Ba 1-y )(Nb y Ti 1-y )O 3   (1)

wherein x satisfies 0.80≦x≦0.95, and y satisfies 0.85≦y≦0.95.

2. The piezoelectric material according to claim 1 , further comprising at least one element selected from Cu and Mn, wherein the amount of the at least one element selected from Cu and Mn corresponds to more than 0 mol % and 1 mol % or less of the amount of the perovskite-type metal oxide.

3. The piezoelectric material according to claim 1 , wherein x is smaller than y in the general formula (1).

4. A piezoelectric element, comprising: a first electrode; a piezoelectric material portion; and a second electrode, wherein the piezoelectric material portion includes the piezoelectric material according to claim 1 .

5. A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber includes a vibrating portion that includes the piezoelectric element according to claim 4 .

6. A liquid discharge apparatus, comprising: a stage configured to receive an object; and the liquid discharge head according to claim 5 .

7. An ultrasonic motor, comprising: a vibrating member that includes the piezoelectric element according to claim 4 ; and a moving body in contact with the vibrating member.

8. An optical apparatus, comprising a drive unit that includes the ultrasonic motor according to claim 7 .

9. A vibratory apparatus, comprising a vibrating member that includes the piezoelectric element according to claim 4 on a diaphragm.

10. A dust removing device, comprising a vibrating portion including the vibratory apparatus according to claim 9 .

11. An image pickup apparatus, comprising: the dust removing device according to claim 10 ; and an image pickup element unit, wherein the diaphragm of the dust removing device is disposed on the light-receiving surface side of the image pickup element unit.

12. Electronic equipment, comprising a piezoelectric acoustic component that includes the piezoelectric element according to claim 4 .

13. A multilayered piezoelectric element, comprising: piezoelectric material layers and electrode layers alternately stacked on top of one another, the electrode layers including an internal electrode, wherein the piezoelectric material layers contain the piezoelectric material according to claim 1 .

14. The multilayered piezoelectric element according to claim 13 , wherein the internal electrode contains Ag and Pd, and the weight ratio M1/M2 of the weight M1 of Ag to the weight M2 of Pd is in the range of 1.5≦M1/M2≦9.0.

15. The multilayered piezoelectric element according to claim 13 , wherein the internal electrode contains at least one of Ni and Cu.

16. A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber includes a vibrating portion that includes the multilayered piezoelectric element according claim 13 .

17. A liquid discharge apparatus comprising a stage configured to receive an object and the liquid discharge head according to claim 16 .

18. An ultrasonic motor comprising a vibrating member that includes the multilayered piezoelectric element according to claim 13 and a moving body in contact with the vibrating member.

19. An optical apparatus comprising a drive unit that includes the ultrasonic motor according to claim 18 .

20. A vibratory apparatus comprising a vibrating member that includes the multilayered piezoelectric element according to claim 13 on a diaphragm.

21. A dust removing device, comprising a vibrating portion including the vibratory apparatus according to claim 20 .

22. An image pickup apparatus, comprising the dust removing device according to claim 21 and an image pickup element unit, wherein the diaphragm of the dust removing device is disposed on the light-receiving surface side of the image pickup element unit.

23. Electronic equipment comprising a piezoelectric acoustic component that includes the multilayered piezoelectric element according to claim 13 .

Assignees

• Canon Kk

Inventors

• Ueda Miki
• Watanabe Takayuki
• Murakami Shunsuke

Classifications

• H04N23/811

  by dust removal, e.g. from surfaces of the image sensor or processing of the image signal output by the electronic image sensor · CPC title

• H04N23/55

  Optical parts specially adapted for electronic image sensors; Mounting thereof · CPC title

• H04N23/52

  Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements · CPC title

• B41J2/14201

  Structure of print heads with piezoelectric elements · CPC title

• B06B1/06

  operating with piezoelectric effect or with electrostriction (piezoelectric or electrostrictive devices per se H10N30/00) · CPC title