Method for determining a position of an object in a beam apparatus, computer program product and beam apparatus for carrying out the method
US-2024258068-A1 · Aug 1, 2024 · US
US9618461B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9618461-B2 |
| Application number | US-201314050676-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 10, 2013 |
| Priority date | Oct 11, 2012 |
| Publication date | Apr 11, 2017 |
| Grant date | Apr 11, 2017 |
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An X-ray analysis apparatus for detecting, using an X-ray detector, X-rays given off by a sample when the sample is irradiated with X-rays, the X-ray analysis apparatus having replaceable components. The X-ray analysis apparatus comprises labels attached to the replaceable components and including symbols indicating the types of replaceable components, a camera for photographing the replaceable components and the labels, and CPU and image recognition software for specifying the types of replaceable components by calculation based on the symbols in the labels.
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What is claimed is: 1. An X-ray analysis apparatus for detecting, using an X-ray detector, X-rays given off by a sample when the sample is irradiated with X-rays, the X-ray analysis apparatus being capable of carrying out multiple types of measurements and comprising multiple types of replaceable components, the X-ray analysis apparatus comprising: indicators provided on the replaceable components; a camera for photographing the replaceable components and the indicators; control means for analyzing images photographed by the camera and carrying out the various types of measurements, wherein: the indicators include information indicating type names of the replaceable components, information indicating positions where the replaceable components are mounted, and information indicating directions of the replaceable components, and the control means determines whether types of the replaceable components, positions of the replaceable components and directions of the replaceable components are correct or not with respect to the measurement types, based upon the information indicting type names of the replaceable components, the information indicating positions where the replaceable components are mounted, and the information indicating directions of the replaceable components photographed by the camera. 2. The X-ray analysis apparatus according to claim 1 , wherein the indicator is either: (a) a symbol added to labels attached to the replaceable component, (b) the shape of the replaceable component, (c) a color added to the replaceable component, (d) a color of the label attached to the replaceable component, (e) a symbol written directly on the replaceable component, or (f) a symbol written directly by engraving on the replaceable component. 3. The X-ray analysis apparatus according to claim 1 , wherein a replaceable component of the X-ray analysis apparatus is an X-ray optical component and/or an attachment. 4. The X-ray analysis apparatus according to claim 1 , comprising: a pattern in which two mutually orthogonal directions can be classified, wherein the control means specifies the direction of a replaceable component of the X-ray analysis apparatus by calculation based on the pattern. 5. The X-ray analysis apparatus according to claim 4 , wherein the pattern in which two mutually orthogonal directions can be classified is a rectangular frame. 6. The X-ray analysis apparatus according to claim 1 , wherein the control means calculates the distance from a reference point in the photographed image of the camera to a specific point of a replaceable component of the X-ray analysis apparatus. 7. The X-ray analysis apparatus according to claim 6 , wherein a rectangular frame is added to the replaceable component, and the specific point on the replaceable component is a point of intersection of the diagonals of the rectangular frame. 8. The X-ray analysis apparatus according to claim 6 , wherein a rectangular frame is added to the replaceable component, and the specific point of the replaceable component is a corner of the rectangular frame. 9. The X-ray analysis apparatus according to claim 1 , wherein: a replaceable component of the X-ray analysis apparatus has an indicator having a linear length or an indicator having a planar width, wherein the control means calculates a change in the length of an indicator having a linear length or a change in the area of an indicator having a planar width, and finding a change in position of the replaceable component relative to the camera by calculation based on the change in length or the change in area. 10. The X-ray analysis apparatus according to claim 1 , further comprising a cover which encloses means for irradiating the sample with X-rays, the X-ray detector, the replaceable components, and the camera, wherein the cover is formed by a case having no observation window and a door having no observation window.
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