Method for manufacturing optical interferometer

Patent metadata

Field	Value
Publication number	US-9618323-B2
Application number	US-201414911583-A
Country	US
Kind code	B2
Filing date	Jul 31, 2014
Priority date	Aug 19, 2013
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.

First claim

The invention claimed is:

1. A method of manufacturing an optical interferometer, the method comprising:
a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate formed of silicon and a first insulating layer formed on the main surface;
a second step of disposing a first wall portion extending along the main surface between a first side surface of the first semiconductor portion at the side of the second semiconductor portion and a second side surface of the second semiconductor portion at the side of the first semiconductor portion;
a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask; and
a fourth step of removing the first wall portion after the third step,
wherein the shadow mask has a mask portion and a first opening portion provided in the mask portion, and
wherein, in the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from the first opening portion.

2. The method of manufacturing the optical interferometer according to claim 1 , wherein, in the first step, the first and second semiconductor portions are formed by etching a semiconductor layer formed on the main surface and the first insulating layer and the second step is performed by forming the first wall portion on the main surface and the first insulating layer by the etching.

3. The method of manufacturing the optical interferometer according to claim 2 , wherein, in the third step, the first side surface is masked by the mask portion and the first wall portion by joining a back surface of the mask portion to a top portion of the first wall portion.

4. The method of manufacturing the optical interferometer according to claim 3 ,
wherein a second wall portion extending along the back surface is formed on the back surface of the mask portion, and
wherein, in the third step, a bottom portion of the second wall portion is joined to the top portion of the first wall portion.

5. The method of manufacturing the optical interferometer according to claim 3 ,
wherein a second insulating layer is formed on the back surface of the mask portion, and
wherein, in the third step, the back surface of the mask portion is joined to the top portion of the first wall portion through the second insulating layer.

6. The method of manufacturing the optical interferometer according to claim 1 ,
wherein, in the first step, a third semiconductor portion for a deflection mirror is formed on the main surface and the first insulating layer,
wherein, in the second step, a third wall portion extending along the main surface is disposed between a third side surface of the third semiconductor portion at the side of the first semiconductor portion and the first semiconductor potion,
wherein, in the third step, a mirror surface is formed in the third semiconductor portion by forming a second metal film on the third side surface using the shadow mask,
wherein the shadow mask has a second opening portion formed in the mask portion, and
wherein, in the third step, a side surface of the first semiconductor portion at the side of the third semiconductor potion is masked by the mask portion and the third wall portion and the second metal film is formed in a state in which the third side surface is exposed from the second opening portion.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Suzuki Tomofumi
• Warashina Yoshihisa
• KASAMORI Kohei
• Sugimoto Tatsuya
• Ito Jo

Classifications

• G01J3/4532

  Devices of compact or symmetric construction (G01J3/4531 takes precedence) · CPC title

• G01J3/4535

  Devices with moving mirror (G01J3/4532 takes precedence) · CPC title

• G01J3/0256

  Compact construction · CPC title

• G01B9/02051 Primary

  Integrated design, e.g. on-chip or monolithic · CPC title