Evanescent field opto-mechanical displacement sensor

Patent metadata

Field	Value
Publication number	US-9759552-B2
Application number	US-201615168921-A
Country	US
Kind code	B2
Filing date	May 31, 2016
Priority date	Nov 14, 2013
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.

First claim

The invention claimed is:

1. A displacement sensor system, comprising:
a waveguide core deposited on top of a lower cladding, wherein the waveguide core comprises an etched waveguide that is configured to receive and propagate light to enable an evanescent optical field above the waveguide surface, said waveguide core comprising a thickness less than a wavelength and an air top cladding; and
a movable perturber suspended above the etched waveguide and positioned to interact with the evanescent optical field above the waveguide surface; wherein the perturber has an effective index smaller than the effective index of the waveguide, wherein the evanescent field interaction induces an optical phase shift when the movable perturber is displaced.

2. The sensor system of claim 1 , further comprising an integrated optical readout circuit configured to measure the optical phase shift as the perturber interacts with the evanescent optical field.

3. The sensor system of claim 2 , wherein the integrated optical readout circuit converts the optical phase shift into an intensity modulation, and wherein a change in intensity modulation corresponds to a change in the position of the perturber.

4. The sensor system of claim 2 , wherein the integrated optical readout circuit comprises at least one of a Mach-Zehnder interferometer; an optical cavity; or a directional coupler.

5. The sensor system of claim 1 , wherein the perturber has a refractive index greater than 1.

6. The sensor system of claim 1 , wherein the perturber displacement is caused by an external force acting on the perturber.

7. The sensor system of claim 1 , wherein the perturber is configured with a proof-mass, and the perturber displacement is caused by an acceleration.

8. The sensor system of claim 1 , wherein the perturber is configured to act as a membrane that deforms under pressure, and the perturber displacement is caused by a change in pressure car a detection of sound waves.

9. The sensor system of claim 1 , wherein the perturber is coated with a conductive material and the perturber displacement is caused by an external electric field.

10. The sensor system of claim 1 , wherein the perturber is coated with a magnetic material and the perturber displacement is caused by an external magnetic field.

11. A method for sensing a displacement, comprising the steps of:
receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface, the waveguide core comprising a thickness less than a wavelength and an air top cladding, the etched waveguide comprising a waveguide effective refractive index;
positioning a movable perturber so the perturber interacts with the evanescent optical field above the waveguide surface, wherein the perturber has a perturber effective refractive index smaller than the waveguide effective refractive index of the waveguide;
inducing an optical phase shift in the waveguide when the movable perturber is displaced in the evanescent optical field; and
measuring the optical phase shift.

12. The method of claim 11 , further comprising the step of converting the optical phase shift into an intensity modulation by means of interferometry.

13. The method of claim 12 , wherein the interferometry is achieved by one of a Mach-Zehnder interferometer; an optical cavity; or a directional coupler.

14. The method of claim 13 , wherein measure ent of the phase shift enables the determination of the perturber displacement magnitude.

15. A displacement sensor system, comprising:
a waveguide core deposited on top of a lower cladding, said waveguide core comprising an etched waveguide, said etched waveguide comprising a waveguide surface and a waveguide effective refractive index, said etched waveguide being configured to receive and propagate light thereby enabling an evanescent optical field above the waveguide surface; and
a movable perturber suspended above the etched waveguide and positioned to interact with the evanescent optical field above the waveguide surface; wherein an evanescent field interaction induces an optical phase shift when the movable perturber is displaced, the perturber comprising a perturber effective refractive index smaller than the waveguide effective refractive index.

Assignees

• Us Navy

Inventors

• Pruessner Marcel W
• Stievater Todd H
• Rabinovich William S

Classifications

• G01B11/161 Primary

  by interferometric means · CPC title

• G01B11/026

  by measuring distance between sensor and object (G01B11/0608 takes precedence) · CPC title

• G01B9/02051 Primary

  Integrated design, e.g. on-chip or monolithic · CPC title

• G01B11/14

  for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) · CPC title

• G01D5/35329

  using interferometer with two arms in transmission, e.g. Mach-Zender interferometer · CPC title