Bubble and foam solutions using a completely immersed air-free feedback flow control valve

Patent metadata

Field	Value
Publication number	US-9617652-B2
Application number	US-201314102220-A
Country	US
Kind code	B2
Filing date	Dec 10, 2013
Priority date	Dec 11, 2012
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

The embodiments disclosed herein relate to methods and apparatus for promoting bubble-free circulation of processing fluids in a recirculation system. Certain disclosed techniques involve passive, mechanical valve designs that promote variable resistance to flow in a drain. Other techniques involve automated flow control schemes that utilize feedback from flow meters, level sensors, etc. to achieve a balanced and bubble-free flow. The disclosed embodiments greatly reduce the incorporation of gas into a processing fluid, in particular as the processing fluid returns from a processing cell to a reservoir.

First claim

What is claimed is:

1. An apparatus for electroplating material onto a substrate, comprising:
an electroplating cell comprising:
a vessel for holding electrolyte;
a weir wall positioned at the periphery of the vessel; and
a fluid collection trough substantially surrounding the weir wall, such that during electroplating, electrolyte flows into the vessel, over the weir wall and into the fluid collection trough;

an electrolyte reservoir;
a return conduit for delivering electrolyte from the fluid collection trough to the electrolyte reservoir; and
a flow control mechanism for variably increasing and decreasing a resistance to flow in the return conduit, wherein the flow control mechanism comprises a float and a flow constrictor, wherein the float is configured to rise with the level of electrolyte in the fluid collection trough to thereby raise the flow constrictor and increase flow through the return conduit, wherein the flow control mechanism prevents the passage of gas through the return conduit during electroplating.

2. The apparatus of claim 1 , wherein the flow control mechanism prevents passage of gas through the return conduit by ensuring that a level of electrolyte in the fluid collection trough does not fall below a designated minimum level.

3. The apparatus of claim 1 , wherein the float and flow constrictor are separate elements connected by a connector.

4. The apparatus of claim 3 , wherein the flow constrictor is substantially spherical.

5. The apparatus of claim 1 , wherein the flow constrictor is shaped like a cone or truncated cone.

6. The apparatus of claim 3 , wherein the flow constrictor is a flap that covers an inlet to the return conduit, wherein the flap swings about a connection point to variably control the resistance to flow through the return conduit.

7. The apparatus of claim 1 , further comprising a flow constricting region in the fluid collection trough or return conduit, wherein the flow constrictor and the flow constricting region are configured to mate with one another.

8. The apparatus of claim 7 , wherein the flow constrictor and the flow constricting region mate with one another to form a fluid tight seal.

9. The apparatus of claim 7 , further comprising a drain path through which electrolyte may drain from the fluid collection trough into the return conduit even when the flow constrictor and the flow constricting region are mated with one another in a closed position.

10. The apparatus of claim 1 , further comprising baffles positioned proximate the float and/or flow constrictor, wherein the baffles operate to prevent formation of vortices in the electrolyte.

11. The apparatus of claim 1 , further comprising one or more float position constricting elements that restrict where the float may be the fluid collection trough.

12. The apparatus of claim 1 , further comprising an overflow conduit for delivering electrolyte from the fluid collection trough to the electrolyte reservoir, wherein an inlet to the overflow conduit is positioned above a target fluid level in the fluid collection trough.

13. The apparatus of claim 1 , further comprising an additional electroplating cell, wherein the return conduit comprises a first inlet for receiving electrolyte from the electroplating cell and a second inlet for receiving electrolyte from the additional electroplating cell.

14. The apparatus of claim 1 , wherein an outlet of the return conduit is positioned below a level of electrolyte in the electrolyte reservoir.

15. The apparatus of claim 1 , further comprising a secondary fluid collection trough positioned in the return conduit for holding electrolyte after it leaves the fluid collection trough and before it enters the electrolyte reservoir, and wherein the flow control mechanism is positioned in the secondary fluid collection trough.

16. An apparatus for electroplating material onto a substrate, comprising:
an electroplating cell comprising:
a vessel for holding electrolyte;
a weir wall positioned at the periphery of the vessel; and
a fluid collection trough substantially surrounding the weir wall, such that during electroplating, electrolyte flows into the vessel, over the weir wall and into the fluid collection trough;

an electrolyte reservoir;
a return conduit for delivering electrolyte from the fluid collection trough to the electrolyte reservoir;
a plating recirculation loop comprising the electrolyte reservoir, a first pump, the electroplating cell and the return conduit; and
a bypass conduit, wherein the bypass conduit branches off of the plating recirculation loop at a point before the electrolyte reaches the electroplating cell, wherein the bypass conduit rejoins the plating recirculation loop at a point after the electrolyte spills over the weir wall of the electroplating cell,
wherein the apparatus is configured to provide a substantially constant total electrolyte flow rate leaving the electrolyte reservoir and passing through the return conduit, while simultaneously allowing a variable flow rate of electrolyte delivered to the electroplating cell.

17. The apparatus of claim 16 , further comprising a bubble sensor positioned in the return conduit.

18. The apparatus of claim 16 , further comprising a second pump positioned in either the plating recirculation loop or the bypass conduit.

Assignees

• Lam Res Corp

Inventors

• Abraham Richard
• Rash Robert
• Porter David W
• Mayer Steven T
• Ostrowski John

Classifications

• C25D17/00

  Constructional parts, or assemblies thereof, of cells for electrolytic coating · CPC title

• G01F23/296

  Acoustic waves · CPC title

• C25D17/001

  Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells · CPC title

• G01F23/14

  by measurement of pressure · CPC title

• G01F23/263

  by measuring variations in capacitance of capacitors · CPC title