Method for depositing a metal chalcogenide on a substrate by cyclical deposition
US-2019272993-A1 · Sep 5, 2019 · US
US9562286B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9562286-B2 |
| Application number | US-201414499012-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 26, 2014 |
| Priority date | Sep 26, 2013 |
| Publication date | Feb 7, 2017 |
| Grant date | Feb 7, 2017 |
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The hardness of zinc sulfide is increased by adding selective elements within a specified range to the crystal lattice of the zinc sulfide. The increased hardness over conventional zinc sulfide does not substantially compromise the optical properties of the zinc sulfide. The zinc sulfide may be used as a protective coating for windows and domes.
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What is claimed is: 1. A composition comprising zinc sulfide and 0.5 molar % to 10 molar % of silicon as a dopant. 2. The composition of claim 1 , wherein the silicon is in amounts of 1 molar % to 6 molar %. 3. The composition of claim 1 , wherein the zinc sulfide is water clear zinc sulfide. 4. An article comprising a substrate and one or more layers of a composition comprising zinc sulfide and 0.5 molar % to 10 molar % of silicon as a dopant. 5. The article of claim 4 , wherein the silicon is in amounts of 1 molar % to 6 molar %. 6. The article of claim 4 , wherein the substrate is a dome or a window.
on temporary substrates, e.g. substrates subsequently removed by etching · CPC title
by cvd · CPC title
Coatings specially designed to be durable, e.g. scratch-resistant · CPC title
AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te · CPC title
Sulfides · CPC title
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