Method for producing oxynitride film by atomic layer deposition process
US-9809490-B2 · Nov 7, 2017 · US
by cvd · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C03C2218/152 |
| Official title | by cvd |
| Display label | by cvd |
| Total patents | 242 |
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is stable.
| Year | Patents |
|---|---|
| 2015 | 17 |
| 2016 | 17 |
| 2017 | 27 |
| 2018 | 23 |
| 2019 | 20 |
| 2020 | 25 |
| 2021 | 18 |
| 2022 | 25 |
| 2023 | 22 |
| 2024 | 24 |
| 2025 | 19 |
| 2026 | 5 |
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
US-9809490-B2 · Nov 7, 2017 · US
US-9791769-B2 · Oct 17, 2017 · US
US-2017240462-A1 · Aug 24, 2017 · US
US-2017222025-A1 · Aug 3, 2017 · US
US-2017208796-A1 · Jul 27, 2017 · US
US-2017168224-A1 · Jun 15, 2017 · US
US-2017165703-A1 · Jun 15, 2017 · US
US-2017166476-A1 · Jun 15, 2017 · US
US-2017165706-A1 · Jun 15, 2017 · US
US-2017166475-A1 · Jun 15, 2017 · US
US-2017144926-A1 · May 25, 2017 · US
US-2017123102-A1 · May 4, 2017 · US
US-2017107143-A1 · Apr 20, 2017 · US
US-2017088460-A1 · Mar 30, 2017 · US
US-2017081235-A1 · Mar 23, 2017 · US
US-2017081241-A1 · Mar 23, 2017 · US
US-9599746-B2 · Mar 21, 2017 · US
US-2017050878-A1 · Feb 23, 2017 · US
US-9573845-B2 · Feb 21, 2017 · US
US-9573843-B2 · Feb 21, 2017 · US
Answers are generated from the same data shown on this page.