Tellurium compounds useful for deposition of tellurium containing materials

Patent metadata

Field	Value
Publication number	US-9537095-B2
Application number	US-201414332924-A
Country	US
Kind code	B2
Filing date	Jul 16, 2014
Priority date	Feb 24, 2008
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

Precursors for use in depositing tellurium-containing films on substrates such as wafers or other microelectronic device substrates, as well as associated processes of making and using such precursors, and source packages of such precursors. The precursors are useful for deposition of Ge 2 Sb 2 Te 5 chalcogenide thin films in the manufacture of nonvolatile Phase Change Memory (PCM), by deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD).

First claim

What is claimed is:

1. A method of forming a phase change material comprising a tellurium-containing film, comprising volatilizing a tellurium precursor composition to form a tellurium precursor vapor, and contacting the tellurium precursor vapor with a substrate to deposit tellurium thereon, wherein the tellurium precursor composition comprises a tellurium precursor comprising a diorgano ditelluride compound wherein each organo group is the same and is selected from the group consisting of C 1 -C 8 alkyl; C 1 -C 12 hydrocarbyl selected from aryl, fluoroalkyl, allyl, alkenyl or dienyl; silyl; and substituted silyl.

2. The method of claim 1 , wherein the tellurium precursor is a dialkyl ditelluride wherein the alkyl is C 1 -C 8 alkyl.

3. The method of claim 1 , wherein the tellurium precursor is a C 1 -C 12 hydrocarbyl selected from aryl, fluoroalkyl, allyl, alkenyl or dienyl.

4. The method of claim 1 , wherein the tellurium precursor is diisopropyl ditelluride.

5. The method of claim 1 , wherein the tellurium precursor is dimethyl ditelluride.

6. The method of claim 1 , wherein the tellurium precursor is diethylditelluride.

7. The method of claim 1 , wherein the phase change material is a GST film.

8. The method of claim 1 , wherein the contacting comprises atomic layer deposition.

9. The method of claim 1 , wherein the contacting comprises chemical vapor deposition.

10. The method of claim 1 , wherein the tellurium-containing film is an amorphous Sb 2 Te 3 film.

11. The method of claim 1 , wherein the tellurium is deposited at a temperature below 300° C.

12. The method of claim 1 , wherein the tellurium precursor composition further comprises a solvent medium with the tellurium precursor dissolved therein.

13. A method of forming a GST film comprising volatilizing a tellurium precursor composition to form a tellurium precursor vapor, and contacting the tellurium precursor vapor with a substrate to deposit tellurium thereon, wherein the tellurium precursor composition comprises a tellurium precursor comprising a diorgano ditelluride compound wherein each organo group is the same and is selected from the group consisting of C 1 -C 8 alkyl; C 1 -C 12 hydrocarbyl selected from aryl, fluoroalkyl, allyl, alkenyl or dienyl; silyl; and substituted silyl.

14. The method of claim 13 , wherein the tellurium precursor is a dialkyl ditelluride wherein the alkyl is C 1 -C 8 alkyl.

15. The method of claim 14 , wherein the tellurium precursor is dimethyl ditelluride, diethyl ditelluride or diisopropyl ditelluride.

16. The method of claim 15 , wherein the tellurium precursor is diisopropyl ditelluride.

17. The method of claim 13 , wherein the contacting comprises atomic layer deposition.

18. The method of claim 13 , wherein the contacting comprises chemical vapor deposition.

19. The method of claim 13 , wherein the tellurium-containing film is an amorphous Sb 2 Te 3 film.

20. The method of claim 13 , wherein the tellurium is deposited at a temperature below 300° C.

Assignees

• Entegris Inc

Inventors

• Stender Matthias
• Xu Chongying
• Chen Tianniu
• Hunks William
• Chen Philip S H
• Roeder Jeffrey F
• Baum Thomas H

Classifications

• C23C16/305

  Sulfides, selenides, or tellurides · CPC title

• H01L45/1616 Primary

  Electricity · mapped topic

• C07C395/00

  Compounds containing tellurium · CPC title

• C07F7/10

  containing nitrogen {having a Si-N linkage} · CPC title

• C07C333/16 Primary

  Salts of dithiocarbamic acids · CPC title