Exposure apparatus, exposing method, method for manufacturing device, program, and recording medium

Patent metadata

Field	Value
Publication number	US-9507265-B2
Application number	US-201514681475-A
Country	US
Kind code	B2
Filing date	Apr 8, 2015
Priority date	Oct 12, 2012
Publication date	Nov 29, 2016
Grant date	Nov 29, 2016

Abstract

An exposure apparatus includes a liquid immersion member including a first member and a second member and configured to form a liquid immersion space of the liquid, a driving apparatus configured to move the second member with respect to the first member; and a controller configured to control the driving apparatus. The controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows.

First claim

What is claimed is:

1. An exposure apparatus that sequentially exposes each of a plurality of shot regions of a substrate by exposure light via liquid between an emitting surface of an optical member and the substrate while moving the substrate in a scanning direction with respect to the exposure light emitted from the emitting surface, the exposure apparatus comprising:
a liquid immersion member that includes a first member and a second member and that is configured to form a liquid immersion space of the liquid, the first member being disposed at at least a portion of surrounding of the optical member, the second member being disposed at a portion of surrounding of the optical member;
a driving apparatus that is configured to move the second member with respect to the first member; and
a controller that is configured to control the driving apparatus,
wherein, before or after sequential exposures of each of a plurality of shot regions, which are included in one row on the substrate and are disposed in a direction which intersects with the scanning direction, are performed, shot regions of another row different from the one row are exposed,
the controller controls the driving apparatus so that a first operation of the second member in a first movement period of the substrate which is between exposure termination of a first shot region and exposure start of a second shot region is different from a second operation of the second member in a second movement period of the substrate which is between exposure termination of a third shot region and exposure start of a fourth shot region, the first and second shot regions being included in the same row, the third and fourth shot regions being arranged in different rows, and
positions of the second member with respect to the optical member are different from each other in the direction which intersects with the scanning direction at start of the first movement period and at start of the second movement period.

2. The exposure apparatus according to claim 1 , wherein the third shot region is included in same row as the first shot region.

3. The exposure apparatus according to claim 1 , wherein
the second shot region is disposed to be adjacent to the first shot region with respect to the direction which intersects with the scanning direction.

4. The exposure apparatus according to claim 1 , wherein
the row including the fourth shot region is disposed to be adjacent to the row including the third shot region with respect to the scanning direction.

5. The exposure apparatus according to claim 1 , wherein
movement directions of the second member are different from each other in the first movement period and the second movement period.

6. The exposure apparatus according to claim 5 , wherein
the movement directions include the direction which intersects with the scanning direction.

7. The exposure apparatus according to claim 5 , wherein
the second member moves to one side with respect to the direction which intersects with the scanning direction in the first movement period, and wherein
the second member moves to one side or the other side with respect to the direction which intersects with the scanning direction in the second movement period.

8. The exposure apparatus according to claim 7 , wherein
the substrate moves to one side with respect to the direction which intersects with the scanning direction in the first movement period, and wherein
the substrate moves to one side or the other side with respect to the direction which intersects with the scanning direction in the second movement period.

9. The exposure apparatus according to claim 1 , wherein
movement distances of the second member are different from each other in the first movement period and the second movement period.

10. The exposure apparatus according to claim 9 , wherein
the movement distances include a movement distance with respect to the direction which intersects with the scanning direction.

11. The exposure apparatus according to claim 1 , wherein
positions of the second member with respect to the optical member are different from each other at termination of the first movement period and termination of the second movement period.

12. The exposure apparatus according to claim 1 , wherein
movement speeds of the second member are different from each other in the first movement period and the second movement period.

13. The exposure apparatus according to claim 12 , wherein
the movement speeds include a movement speed with respect to the direction which intersects with the scanning direction.

14. The exposure apparatus according to claim 1 , wherein
accelerations of the second member are different from each other in the first movement period and the second movement period.

15. The exposure apparatus according to claim 14 , wherein
the accelerations include an acceleration with respect to the direction which intersects with the scanning direction.

16. The exposure apparatus according to claim 1 , wherein
the second member moves within a movable range which is determined with respect to the direction which intersects with the scanning direction.

17. The exposure apparatus according to claim 1 , wherein
the second member continuously moves in the first movement period.

18. The exposure apparatus according to claim 17 , wherein
the second member continuously moves in a first exposure period and in the first movement period, the first exposure period being between exposure start and exposure termination of the first shot region.

19. The exposure apparatus according to claim 17 , wherein
the second member continuously moves in the first exposure period which is between the exposure start and the exposure termination of the first shot region, in the first movement period, and in a second exposure period which is between the exposure start and the exposure termination of the second shot region.

20. The exposure apparatus according to claim 1 , wherein
the second member continuously moves in the second movement period.

21. The exposure apparatus according to claim 20 , wherein
the second member continuously moves in a third exposure period and in the second movement period, the third exposure period being between the exposure start and the exposure termination of the third shot region.

22. The exposure apparatus according to claim 20 , wherein
the second member continuously moves in the third exposure period which is between the exposure start and the exposure termination of the third shot region, in the second movement period, and in a fourth exposure period which is between the exposure start and the exposure termination of the fourth shot region.

23. The exposure apparatus according to claim 1 , wherein
the second member stops in at least a portion of the second movement period.

24. The exposure apparatus according to claim 23 , wherein
the substrate moves in a direction substantially parallel to the scanning direction in at least a portion of the second movement period, and wherein
the second member stops in at least a portion of the period in which the substrate is moved in a direction substantially parallel to the scanning direction.

25. The exposure apparatus according to claim 23 , wherein
the second member continuously moves in the third exposure period which is between the exposure start and the exposure termination of the third shot region.

Assignees

• Nikon Corp

Inventors

• Sato Shinji

Classifications

• G03F7/70341 Primary

  Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041) · CPC title

• G03F7/2041 Primary

  in the presence of a fluid, e.g. immersion; using fluid cooling means · CPC title

• G03F7/70866

  of mask or workpiece · CPC title

• G03F7/70525

  Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure · CPC title