Microfluidic impingement jet cooled embedded diamond GaN HEMT
US-9484284-B1 · Nov 1, 2016 · US
US9484283B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9484283-B2 |
| Application number | US-201313734615-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 4, 2013 |
| Priority date | Jan 4, 2013 |
| Publication date | Nov 1, 2016 |
| Grant date | Nov 1, 2016 |
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Modular cooling apparatuses are disclosed. In one embodiment, a cooling apparatus includes an inlet manifold, a jet plate manifold, a plurality of jet plates, a vapor manifold, and a target layer. The inlet manifold includes a fluid distribution chamber, and a plurality of fluid distribution channels symmetrically located within the fluid distribution chamber. The jet plate manifold is coupled to the inlet manifold such that the plurality of jet plate openings is vertically aligned with respect to the plurality of fluid distribution channels. The plurality of jet plates is removably disposed in the jet plate manifold. The vapor manifold has a plurality of walls that define a vapor manifold opening and at least one outlet channel through at least one of the walls. The target layer is coupled to the vapor manifold such that the jet orifice surface of each jet plate is positioned above the target layer.
Opening claim text (preview).
What is claimed is: 1. A cooling apparatus comprising: an inlet manifold comprising: a fluid distribution chamber; and a plurality of fluid distribution channels symmetrically located within the fluid distribution chamber; a jet nozzle manifold comprising a plurality of jet nozzle openings, wherein the jet nozzle manifold is coupled to the inlet manifold such that the plurality of jet nozzle openings is vertically aligned with respect to the plurality of fluid distribution channels; a plurality of jet nozzles disposed within the plurality of jet nozzle openings, each jet nozzle of the plurality of jet nozzles comprising: a jet orifice surface comprising one or more jet orifices; and a jet channel, wherein the jet channel is fluidly coupled to an individual fluid distribution channel of the plurality of fluid distribution channels, and the coolant fluid flows through the one or more jet orifices as one or more impingement jets; a vapor manifold coupled to the jet nozzle manifold, the vapor manifold comprising a plurality of walls defining a vapor manifold opening, and at least one outlet channel through at least one wall of the plurality of walls, wherein at least a portion of each jet nozzle is disposed within the vapor manifold opening; and a target layer coupled to the vapor manifold, wherein the jet orifice surface of each jet nozzle is positioned above the target layer. 2. The cooling apparatus of claim 1 , wherein the fluid distribution chamber comprises a curved perimeter wall such that a fluid flow of coolant fluid within the fluid distribution chamber is substantially equal at each fluid distribution channel of the plurality of fluid distribution channels. 3. The cooling apparatus of claim 2 , further comprising a fluid routing feature centrally positioned on a floor of the fluid distribution chamber, wherein the fluid routing feature receives coolant fluid and directs the coolant fluid toward the plurality of fluid distribution channels. 4. The cooling apparatus of claim 3 , wherein the fluid routing feature is a pyramid. 5. The cooling apparatus of claim 1 , wherein the one or more jet orifices comprises an array of jet orifices. 6. The cooling apparatus of claim 1 , wherein the jet orifice surface of each jet nozzle of the plurality of jet nozzles comprises a jet orifice pattern that is unique amongst the plurality of jet nozzles. 7. The cooling apparatus of claim 1 , wherein: each jet nozzle comprises a flange portion; each jet nozzle opening comprises a seat; the plurality of jet nozzles is disposed within the plurality of jet nozzle openings such that the flange portion is positioned on the seat; and the jet orifice surface is opposite from the flange portion. 8. The cooling apparatus of claim 7 , wherein each jet nozzle comprises a narrow portion extending from the flange portion, and the jet orifice surface is located on the narrow portion opposite from the flange portion. 9. A cooling apparatus comprising: an inlet manifold comprising: a fluid distribution chamber; a plurality of fluid distribution channels symmetrically located within the fluid distribution chamber; a fluid routing feature centrally positioned on a floor of the fluid distribution chamber, wherein the fluid routing feature receives coolant fluid and directs the coolant fluid toward the plurality of fluid distribution channels; a jet nozzle manifold comprising a plurality of jet nozzle openings, wherein the jet nozzle manifold is coupled to the inlet manifold such that the plurality of jet nozzle openings is vertically aligned with respect to the plurality of fluid distribution channels; a plurality of jet nozzles removably disposed within the plurality of jet nozzle openings, each jet nozzle of the plurality of jet nozzles comprising: a jet orifice surface comprising one or more jet orifices; and a jet channel, wherein the jet channel is fluidly coupled to an individual fluid distribution channel of the plurality of fluid distribution channels, and the coolant fluid flows through the one or more jet orifices as one or more impingement jets; a vapor manifold coupled to the jet nozzle manifold, the vapor manifold comprising a plurality of walls defining a vapor manifold opening, and at least one outlet channel through at least one wall of the plurality of walls, wherein at least a portion of each jet nozzle is disposed within the vapor manifold opening; and a target layer coupled to the vapor manifold, wherein the jet orifice surface of each jet nozzle is positioned above the target layer. 10. The cooling apparatus of claim 9 , wherein the fluid distribution chamber comprises a curved perimeter wall such that a fluid flow of coolant fluid within the fluid distribution chamber is substantially equal at each fluid distribution channel of the plurality of fluid distribution channels. 11. The cooling apparatus of claim 9 , wherein the jet orifice surface of each jet nozzle of the plurality of jet nozzles comprises a jet orifice pattern that is unique amongst the plurality of jet nozzles. 12. The cooling apparatus of claim 9 , wherein: the inlet manifold is removably coupled to the jet nozzle manifold; the jet nozzle manifold is removably coupled to the vapor manifold; and the vapor manifold is removably coupled to the target layer. 13. A cooling apparatus comprising: a fluid inlet layer comprising a fluid inlet; an inlet manifold comprising: a fluid distribution chamber; and a plurality of fluid distribution channels, wherein the plurality of fluid distribution channels is symmetrically located within the fluid distribution chamber, and the inlet manifold is coupled to the fluid inlet layer such that the fluid inlet is fluidly coupled to the fluid distribution chamber; a jet nozzle manifold comprising a plurality of jet nozzle openings, each jet nozzle opening comprising a seat, wherein the jet nozzle manifold is coupled to the inlet manifold such that the plurality of jet nozzle openings is vertically aligned with respect to the plurality of fluid distribution channels; a plurality of jet nozzles removably disposed within the plurality of jet nozzle openings, each jet nozzle of the plurality of jet nozzles comprising: a flange portion, wherein the plurality of jet nozzles is disposed within the plurality of jet nozzle openings such that the flange portion is positioned on the seat; a jet orifice surface opposite from the flange portion, wherein the jet orifice surface comprises one or more jet orifices; and a jet channel, wherein the jet channel is fluidly coupled to an individual fluid distribution channel of the plurality of fluid distribution channels, and the coolant fluid flows through the one or more jet orifices as one or more impingement jets; a vapor manifold coupled to the jet nozzle manifold, the vapor manifold comprising a plurality of walls defining a vapor manifold opening, and at least one outlet channel through at least one wall of the plurality of walls, wherein at least a portion of each jet nozzle is disposed within the vapor manifold opening; a target layer coupled to the vapor manifold, wherein the jet orifice surface of each jet nozzle is positioned above the target layer; and an insulation assembly coupled to the target layer, the insulation assembly comprising a plurality of recesses for receiving a plurality of heat generating devices. 14. The cooling apparatus of claim 13 , wherein the fluid distribution chamber comprises a curved perimeter wall such that a fluid flow of coolant fluid within the fluid distribution chamber is substantially equal at each fluid distribution channel
for cooling by change of state · CPC title
using jet impingement (H10W40/776 takes precedence) · CPC title
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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