Method of manufacturing thermal insulation wall body

Patent metadata

Field	Value
Publication number	US-9466516-B2
Application number	US-201414458309-A
Country	US
Kind code	B2
Filing date	Aug 13, 2014
Priority date	Aug 21, 2013
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

A method of manufacturing a cylindrical thermal insulation wall body having a holding unit of a heater element formed in an inner peripheral surface includes processing a plate-shaped thermal insulation member such that a plurality of groove portions are formed at a predetermined pitch, processing the thermal insulation member such that an angle between either of the first surface and the second surface, and a third surface on which the groove portions are formed, is 90+180/n degrees, and manufacturing the cylindrical thermal insulation wall body by bonding a plurality of sectional thermal insulation members, wherein the plurality of sectional thermal insulation members are bonded such that the groove portions of the adjacent sectional thermal insulation members are aligned with each other and to form the holding unit in the inner peripheral surface of the cylindrical thermal insulation wall body.

First claim

What is claimed is:

1. A method of manufacturing a cylindrical thermal insulation wall body having a holding unit of a heater element formed in an inner peripheral surface, the method comprising:
processing a plate-shaped thermal insulation member such that a plurality of groove portions are formed at a predetermined pitch, the plurality of groove portions extending from a first surface to a second surface opposite to the first surface;
processing the thermal insulation member such that an angle between either of the first surface and the second surface, and a third surface, on which the groove portions are formed and which is perpendicular to a depth direction of the groove portions, is 90+180/n degrees, wherein n is a natural number of three or larger; and
manufacturing the cylindrical thermal insulation wall body by bonding a plurality of sectional thermal insulation members, wherein the plurality of sectional thermal insulation members are bonded such that the groove portions of the adjacent sectional thermal insulation members are aligned with each other and to form the holding unit in the inner peripheral surface of the cylindrical thermal insulation wall body.

2. The method of claim 1 , wherein the bonding in the manufacturing the cylindrical thermal insulation wall body comprises one of processes including i) using an adhesive, ii) fixing adjacent sectional thermal insulation members with a pin-shaped member in an outer peripheral surface, a top surface or a bottom surface of the thermal insulation wall body, iii) forming a convex portion in one of the adjacent sectional thermal insulation members and a concave portion mating with the convex portion in the other one, and iv) covering an outer periphery of the thermal insulation wall body by a band member.

3. The method of claim 1 , wherein the manufacturing the cylindrical thermal insulation wall body comprises disposing a thermally shrinkable heat resistant member between bonding surfaces of the adjacent sectional thermal insulation members.

4. The method of claim 1 , wherein in the processing a plate-shaped thermal insulation member, the groove portions are formed to extend in a direction perpendicular to the first surface and the second surface.

5. The method of claim 1 , wherein in the processing a plate-shaped thermal insulation member, the groove portions are formed to extend at a predetermined angle with respect to a direction perpendicular to the first surface and the second surface.

6. The method of claim 1 , wherein before the manufacturing the cylindrical thermal insulation wall body, rounding process is performed on at least one of the inner peripheral surface and an outer peripheral surface of the thermal insulation wall body.

Assignees

• Tokyo Electron Ltd

Inventors

• Kobayashi Makoto

Classifications

• H10P72/0434 Primary

  mainly by convection · CPC title

• B29C66/432

  for making tubular articles or closed loops, e.g. by joining several sheets (B29C66/547 takes precedence; bending and joining sheets at right angles to the longitudinal axis of the article being formed and joining the edges B29C53/38); for making hollow articles or hollow preforms · CPC title

• F27B17/0025

  specially adapted for treating semiconductor wafers · CPC title

• F27D11/10 Primary

  Disposition of electrodes · CPC title

• H05B3/66

  Supports or mountings for heaters on or in the wall or roof · CPC title