Heat treatment furnace and heat treatment apparatus

Patent metadata

Field	Value
Publication number	US-9466515-B2
Application number	US-201213527150-A
Country	US
Kind code	B2
Filing date	Jun 19, 2012
Priority date	Jun 21, 2011
Publication date	Oct 11, 2016
Grant date	Oct 11, 2016

Abstract

A heat treatment furnace includes: a processing vessel configured to accommodate therein at least one object to be processed; a cylindrical heat insulating member covering a periphery of the processing vessel; and a heater disposed along an inner circumferential surface of the heat insulating member. The heater includes strip-shaped corrugated heater elements disposed along the inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward.

First claim

What is claimed is:

1. A heat treatment furnace, comprising:
a processing vessel configured to accommodate therein at least one object to be processed;
a cylindrical heat insulating member covering a periphery of the processing vessel; and
a heater disposed along a flat inner circumferential surface of the heat insulating member having no groove,
wherein the heater includes strip-shaped corrugated heater elements spirally disposed along the flat inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward,
wherein the heater elements constitute a single spiral shaped member surrounding the processing vessel,
wherein the valley portions of the heater elements are supported by release prevention valley portion support pins and the mountain portions of the heater elements are supported by collapse prevention mountain portion support pins, each of the release prevention valley portion support pins including at least one release prevention member buried in the heat insulating member to prevent the prevention valley portion support pin from being released from the heat insulating member and each of the collapse prevention mountain portion support pins including at least one release prevention member buried in the heat insulating member to prevent the collapse prevention mountain portion support pin from being released from the heat insulating member,
wherein the valley portions are arranged more inward compared to the flat inner circumferential surface of the heat insulating member and the mountain portions are arranged more inward compared to the valley portions, and
wherein each top end portion of the valley portions and the mountain portions of the heater elements is made by a bent line, the bent line being inclined with respect to a widthwise direction of the heater elements.

2. A heat treatment apparatus, comprising:
a heat treatment furnace having a processing vessel configured to accommodate therein one or more objects to be processed, a lower end of the heat treatment furnace being open to form a vessel opening;
a lid configured to open or close the vessel opening;
a holding unit loaded on the lid and configured to mount therein the objects to be processed in multi-stages; and
an elevation mechanism configured to vertically move the holding unit and the lid to open or close the vessel opening and to load or unload the holding unit into or from the processing vessel, wherein the heat treatment furnace includes:
a cylindrical heat insulating member covering a periphery of the processing vessel; and
a heater disposed along a flat inner circumferential surface of the heat insulating member having no groove,

wherein the heater includes strip-shaped corrugated heater elements spirally disposed along the flat inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward,
wherein the heater elements constitute a single spiral shaped member surrounding the processing vessel,
wherein the valley portions of the heater elements are supported by release prevention valley portion support pins and the mountain portions of the heater elements are supported by collapse prevention mountain portion support pins, each of the release prevention valley portion support pins including at least one release prevention member buried in the heat insulating member to prevent the prevention valley portion support pin from being released from the heat insulating member and each of the collapse prevention mountain portion support pins including at least one release prevention member buried in the heat insulating member to prevent the collapse prevention mountain portion support pin from being released from the heat insulating member,
wherein the valley portions are arranged more inward compared to the flat inner circumferential surface of the heat insulating member and the mountain portions are arranged more inward compared to the valley portions, and
wherein each top end portion of the valley portions and the mountain portions of the heater elements is made by a bent line, the bent line being inclined with respect to a widthwise direction of the heater elements.

Assignees

• Kobayashi Makoto
• Yamaga Kenichi
• Sasaki Akira
• Ikeda Daisuke
• Koike Takahiro
• Nichias Corp
• Tokyo Electron Ltd

Inventors

• Kobayashi Makoto
• Yamaga Kenichi
• Sasaki Akira
• Ikeda Daisuke
• Koike Takahiro

Classifications

• H10P72/0434 Primary

  mainly by convection · CPC title

• H01L21/67109 Primary

  Electricity · mapped topic

• F27B17/0025

  specially adapted for treating semiconductor wafers · CPC title