Substrate correction device, substrate lamination device, substrate processing system, substrate correction method, substrate processing method, and semiconductor device manufacturing method
US-2024404859-A1 · Dec 5, 2024 · US
Holding table
US9463542B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9463542-B2 |
| Application number | US-201313887501-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 6, 2013 |
| Priority date | May 10, 2012 |
| Publication date | Oct 11, 2016 |
| Grant date | Oct 11, 2016 |
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- Title
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Abstract
Official abstract text for this publication.
A holding table for holding a platelike workpiece which includes a base and an annular holding member attached to the base. The annular holding member has an annular holding surface for holding the outer circumferential portion of the platelike workpiece thereon. Accordingly, a central recess is defined by the base and the annular holding member so as to be surrounded by the annular holding member. The annular holding member is formed with a suction opening exposed to the annular holding surface, a vacuum line having one end communicating with the suction opening and the other end connected to a vacuum source, a discharge opening exposed to the annular holding surface at a position radially outside of the suction opening, and a fluid line having one end communicating with the discharge opening and the other end connected to a fluid source.
First claim
Opening claim text (preview).
What is claimed is: 1. A holding table for holding a platelike workpiece, comprising: a base; and an annular holding member attached to the base, the annular holding member having an annular holding surface for holding an outer circumferential portion of the platelike workpiece thereon, whereby a central recess is defined by the base and the annular holding member so as to be surrounded by the annular holding member; the annular holding member being formed with a suction openi…
Assignees
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Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P72/70Primary
Electricity · mapped topic
Operations & Transport · mapped topic
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- What does patent US9463542B2 cover?
- A holding table for holding a platelike workpiece which includes a base and an annular holding member attached to the base. The annular holding member has an annular holding surface for holding the outer circumferential portion of the platelike workpiece thereon. Accordingly, a central recess is defined by the base and the annular holding member so as to be surrounded by the annular holding mem…
- Who is the assignee on this patent?
- Disco Corp
- What technology area does this patent fall under?
- Primary CPC classification H10P72/70. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Oct 11 2016 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).