Ionization gauge with operational parameters and geometry designed for high pressure operation

Patent metadata

Field	Value
Publication number	US-9404827-B2
Application number	US-201414174386-A
Country	US
Kind code	B2
Filing date	Feb 6, 2014
Priority date	Feb 21, 2008
Publication date	Aug 2, 2016
Grant date	Aug 2, 2016

Abstract

An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

First claim

What is claimed is:

1. An ionization gauge to measure pressure comprising:
an anode enclosing a volume;
an electron source that generates electrons outside of the anode;
an inside ion collector electrode, located inside of the anode, that collects ions formed by the impact between the electrons and gas molecules and atoms inside the anode; and
an outside ion collector electrode, located outside of the anode, that collects ions formed by the impact between the electrons and gas molecules and atoms outside the anode, the outside ion collector electrode being closer than the inside ion collector electrode to the electron source, to collect ions at pressures above about 10 −4 Torr.

2. The ionization gauge of claim 1 , wherein the bias voltage of the anode is switched to a reduced level during normal operation with pressure above 10 −4 Torr to decrease a yield of sputtering collisions.

3. An ionization gauge as claimed in claim 1 , further comprising a switch that provides for collection of the ions using the outside ion collector electrode in a high-pressure mode of operation and collection of ions using the inside ion collector electrode during a normal mode of operation.

4. The ionization gauge of claim 1 , wherein the outside ion collector surrounds the anode, the inside ion collector electrode and the electron source.

5. A method of measuring a gas pressure from gas molecules and atoms, comprising the steps of:
producing electrons from an electron source outside of an anode;
transmitting the electrons to the anode to form ions;
collecting ions formed by impact between the electrons and gas molecules and atoms inside the anode with an inside ion collector electrode located inside the anode; and
collecting ions formed by impact between the electrons and gas molecules and atoms outside of the anode with an outside ion collector electrode, located outside the anode and closer than the inside ion collector electrode to the electron source, at pressures above about 10 −4 Torr.

6. The method of claim 5 , wherein the bias voltage of the anode is switched to a reduced level during normal operation with pressure above 10 −4 Torr to decrease a yield of sputtering collisions.

7. The method of claim 5 , further comprising switching between collection of the ions using the outside ion collector electrode in a high-pressure mode of operation and collection of ions using the inside ion collector electrode during a normal mode of operation.

8. The method of claim 5 , wherein the outside ions collector surrounds the anode, the inside ion collector electrode and the electron source.

9. An ionization gauge to measure a pressure comprising:
an anode enclosing a volume;
an electron source that generates electrons;
a low-pressure ion collector electrode, located to a side of the anode opposite to the electron source, that collects ions formed by the impact between the electrons and gas molecules and atoms at low pressures; and
a high-pressure ion collector electrode, located to a same side of the anode as the electron source, that collects ions formed by the impact between the electrons and gas molecules and atoms, the high-pressure ion collector electrode being closer than the low-pressure ion collector electrode to the electron source to collect ions at ion pressures above about 10 −4 Torr.

10. A method of measuring gas pressure from gas molecules and atoms comprising the steps of:
releasing electrons from an electron source;
transmitting the electrons through an anode enclosing a volume to form ions;
collecting ions formed by the impact between the electrons and gas molecules and atoms with a low-pressure ion collector electrode to a side of the anode opposite to the electron source; and
at pressures above about 10 −4 Torr, collecting ions formed by impact between the electrons and gas molecules and atoms to a same side of the anode as the electron source with a high-pressure ion collector electrode that is closer than the low-pressure ion collector electrode to the electron source.

Assignees

• Mks Instr Inc

Inventors

• Brucker Gerardo A

Classifications

• H01J41/02

  Discharge tubes for measuring pressure of introduced gas {or for detecting presence of gas} · CPC title

• G01L21/30 Primary

  by making use of ionisation effects · CPC title

• G01L21/34

  using electric discharge tubes with cold cathodes · CPC title

• G01L21/32 Primary

  using electric discharge tubes with thermionic cathodes · CPC title